A5031616117- Advanced MEMS and NEMS Technologies
- Acoustic Wave Resonator Technologies
- Mechanical and Optical Resonators
- Catalytic Processes in Materials Science
- Catalysis and Oxidation Reactions
- Electrocatalysts for Energy Conversion
- Photonic and Optical Devices
- 3D IC and TSV technologies
- Fuel Cells and Related Materials
- Advancements in Battery Materials
- Zeolite Catalysis and Synthesis
- Graphene research and applications
- Gas Sensing Nanomaterials and Sensors
- Advanced materials and composites
- Advanced ceramic materials synthesis
- CO2 Reduction Techniques and Catalysts
- Analytical Chemistry and Sensors
- Advanced battery technologies research
- Advanced Sensor and Energy Harvesting Materials
- Ultrasonics and Acoustic Wave Propagation
- Carbon and Quantum Dots Applications
- Catalysts for Methane Reforming
- Ammonia Synthesis and Nitrogen Reduction
- Electrowetting and Microfluidic Technologies
- Advanced Surface Polishing Techniques
Institute of Semiconductors
2013-2023
Chinese Academy of Sciences
2013-2023
Shenyang Normal University
2023
University of Science and Technology Liaoning
2018-2023
University of Science and Technology of China
2018-2023
University of Chinese Academy of Sciences
2020
State Council of the People's Republic of China
2020
Nankai University
2016
Tsinghua University
2013
Pt-based catalysts are widely used in propane dehydrogenation to meet the dramatically increased demand of propylene from an on-purpose catalytic process. Although process has been commercialized with high selectivity for decades, prevention coke deposition is still a daunting challenge. Herein, order provide full coverage impact deposition, we critically analyze formation on catalyst. First, intrinsic nature coke, including composition, distribution, and effects, presented. The developments...
Diatomic catalysts, particularly those with heteronuclear active sites, have recently attracted considerable attention for their advantages over single-atom catalysts in reactions involving multielectron transfers. Herein, we report bimetallic iridium–iron diatomic (IrFe–N–C) derived from metal–organic frameworks a facile wet chemical synthesis followed by postpyrolysis. We use various advanced characterization techniques to comprehensively confirm the atomic dispersion of Ir and Fe on...
As the commercial catalyst in propane direct dehydrogenation (PDH) reaction, one of biggest challenges Pt catalysts is coke formation, which severely reduces activity and stability. In this work, a first-principles DFT-based kinetic Monte Carlo simulation (kMC) performed to understand origin an effective method proposed curb coke. The conventional DFT calculations give complete description reaction pathway propylene, deep dehydrogenation, C–C bond cracking. rate-limiting step identified as...
In this paper, we propose a novel method for pedestrian dead reckoning (PDR) using microelectromechanical system magnetic, angular rate, and gravity sensors, which includes double-step unscented Kalman filter (DUKF) hidden Markov model (HMM)-based zero-velocity-update (ZVU) algorithm. The DUKF divides the measurement updates of vector magnetic field into two steps in order to avoid unwanted correction Euler angle error. HMM-based ZVU algorithm is developed recognize efficiently. Thus,...
Phosphorus-doped carbon shows superior performance for the CO<sub>2</sub> electrochemical reduction reaction, revealing crucial role of phosphorus bonding configuration.
Dry reforming of methane (DRM) is one the effective catalytic routes to utilize and carbon dioxide molecules. The supported Ni catalysts on lanthanide oxides show remarkable reactivities stabilities in DRM. However, it remains inconclusive regarding mechanism origin stability catalysts. In this work, first-principles density functional theory (DFT) calculations are performed investigate properties CeO2-supported Ni-based catalyst. several sites including metal, support, interface, vacancy...
Bifunctional atomically dispersed ruthenium electrocatalysts with a low metal loading (0.2 wt%) exhibit outstanding performance for bipolar membrane water electrolysis.
In this paper, the piezoelectric coefficient d33 of AlN thin films for MEMS applications was studied by piezoresponse force microscopy (PFM) measurement and finite element method (FEM) simulation. Both sample without a top electrode another with were measured PFM to characterize property effectively. To obtain numerical solution, an equivalent model system established based on theoretical analysis. The simulation results two samples revealed effective value d33-test should be smaller than...
Over the past several decades, technology of micro-electromechanical system (MEMS) has advanced. A clear need miniaturization and integration electronics components had new solutions for next generation wireless communications. The aluminum nitride (AlN) MEMS contour-mode resonator (CMR) emerged become promising competitive due to advantages small size, high quality factor frequency, low resistance, compatibility with integrated circuit (IC) technology, ability integrating multi-frequency...
In this work, for the first time it is demonstrated that supported single Au in either a positive or negative charge state can catalyze acetylene hydrochlorination competitively with regard to other reported catalysts by using first-principle calculations. The nitrogen and boron dopants on single-walled carbon nanotube (SWCNT) not only behave as stable anchoring positions but also effectively adjust electronic structure of Au. It revealed becomes positively negatively charged nitrogen-...
A miniature piezoresistive pressure sensor fabricated by temporary bonding technology was reported in this paper. The sensing membrane formed on the device layer of an SOI (Silicon-On-Insulator) wafer, which bonded to borosilicate glass (Borofloat 33, BF33) wafer for supporting before releasing with Cu-Cu after boron doping and electrode patterning. handle another BF33 thinning etching. Finally, substrate thinned chemical mechanical polishing (CMP) reduce total thickness. copper removed acid...
Mo2C/MoO3@rGO ternary nanocomposites were synthesized by a hydrothermal method, which can be applied to the high-sensitivity detection of low concentration NH3 at room temperature. Compared with pure MoO3 and MoO3@rGO sensors, sensors showed significantly improved response Among them, 6% sensor up 0.82 for 5 ppm time 87 s, was 27.33 times higher than that (0.03 in 154 s) 5.86 (0.14 139 s). It also has high repeatability, selectivity, good long-term stability, immunity humidity. These...
The developments of carbon dots (CDs) catalysts in key electrochemistry process from computational simulation.
In this paper, we report a novel aluminum nitride (AlN) resonant micro-electromechanical systems (MEMS) accelerometer. The spring beams are T-shaped with two masses hanged at the end. This accelerometer is sensitive to z-axis acceleration due thin thickness. Different from working mechanism of ordinary MEMS accelerometers, excited resonate in-plane. addition stiffness changes significantly when an out plane (z-axis) inertial force applied on structure. Therefore, frequency structure will...
A novel three-dimensional (3D) hermetic packaging technique suitable for capacitive microelectromechanical systems (MEMS) sensors is studied. The composite substrate with through silicon via (TSV) used as the encapsulation cap fabricated by a glass-in-silicon (GIS) reflow process. In particular, low-resistivity pillars embedded in glass are designed to serve electrical feedthrough and fixed capacitance plate at same time simplify fabrication process improve reliability. properties of were...
The tunable electronic and optical properties of graphene quantum dots achieved by nitrogen doping
We investigated the aluminum nitride etching process for MEMS resonators. The is based on Cl2/BCl3/Ar gas chemistry in inductively coupled plasma system. hard mask of SiO2 used. rate, selectivity, sidewall angle, bottom surface roughness and microtrench are studied as a function flow bias power chamber pressure. relations among those parameters reported theoretical analyses given. By optimizing parameters, 1.98 nm angle 83° were achieved. This can meet manufacturing requirements resonator.
In this paper, we report a novel aluminum nitride (AlN) thin-film piezoelectric resonant accelerometer. Different from the ordinary MEMS (micro-electro-mechanical systems) accelerometers, entire structure of accelerometer, including mass and springs, is excited to resonate in-plane, resonance frequency sensitive out-plane acceleration. The centrosymmetrical with serpentine electrodes laid on supporting beams for driving sensing. stiffness changes when an inertial force applied structure....
A MEMS fabrication process with through-glass vias (TGVs) by laser drilling was presented, and reliability concerns about packaging TGV, likes debris via metallization, were overcome. The on Pyrex 7740 glasses studied using a picosecond wavelength of 532 nm. TGVs tapered, the minimum inlet diameter holes 300 μm 90 μm, relative outlet is 48 μm. It took 9 h 58 min for 4874 four-inch wafer. Debris in ablation collected only side, side clean enough bonding. glass anodically bonded to silicon...
With the development of designing and manufacturing level for micro-electromechanical system (MEMS) gyroscopes, control circuit has become a key point to determine their internal performance. Nevertheless, phase delay electronic components may result in some serious hazards. This study described real-time correction MEMS vibratory gyroscopes. A detailed theoretical analysis was provided clarify influence on in-phase quadrature (IQ) coupling characteristics zero-rate output (ZRO) utilizing...