With the development of designing and manufacturing level for micro-electromechanical system (MEMS) gyroscopes, control circuit has become a key point to determine their internal performance. Nevertheless, phase delay electronic components may result in some serious hazards. This study described real-time correction MEMS vibratory gyroscopes. A detailed theoretical analysis was provided clarify influence on in-phase quadrature (IQ) coupling characteristics zero-rate output (ZRO) utilizing...

Porous polytetrafluoroethylene (PTFE) is physically flexible, thermally and chemically stable, relatively inexpensive, commercially available. It attractive for various flexible sensors. This paper has studied capacitive humidity sensors fabricated on porous PTFE substrates. Graphene oxide (GO) was used as a sensing material, both hydrophobic hydrophilic the substrates, interdigitated electrodes substrates were screen-printed. SEM Raman spectrum utilized to characterize GO PTFE. An ethanol...

With the development of designing and manufacturing level for micro-electromechanical system (MEMS) gyroscopes, control circuit becomes a key point to determine their internal performances. Nevertheless, phase delay electron components may result in some serious hazards. This paper describes real-time correction MEMS vibratory gyroscopes. A detailed theoretical analysis is provided clarify influences on in-phase quadrature (IQ) coupling characteristics zero rate output (ZRO) utilizing...

Tuning fork gyroscopes (TFGs) are promising for potential high-precision applications. This work proposes and experimentally demonstrates a novel high-Q dual-mass tuning microelectromechanical system (MEMS) gyroscope utilizing three-dimensional (3D) packaging techniques. Except two symmetrically decoupled proof masses (PM) with synchronization structures, lever structure is designed to force the antiparallel, antiphase drive mode motion eliminate low frequency spurious modes. Thermoelastic...

Tuning fork gyroscopes (TFGs) are promising for potential high-precision applications. This work proposes and experimentally demonstrates a novel high-Q dual mass tuning microelectro-mechanical system (MEMS) gyroscope utilizing three-dimensional (3D) packaging techniques. Except two symmetrically-decoupled proof masses (PM) with synchronization structures, lever structure is designed to force the antiparallel, antiphase drive-mode motion basically eliminate low-frequency spurious modes. The...

Using the two direction symmetrical alternating current pulse method, ceramic films were successfully electrodeposited simultaneously on anodic and cathodic AZ91D magnesium specimens by microarc oxidation. This process was named double electrode electrodeposition (DEME). The thickness, morphology composition of DEME studied using SEM X-ray diffraction patterns. rare earth element Ce detected in both when CeF 4 ·H 2 O added to film forming an electrolyte. improvement corrosion resistance...

A novel three-dimensional (3D) wafer-level sandwich packaging technology is here applied in the dual mass MEMS butterfly vibratory gyroscope (BFVG) to achieve ultra-high Q factor. GIS (glass silicon) composite substrate with glass as main body and low-resistance silicon column vertical lead processed by reflow technology, which effectively avoids air leakage caused thermal stress mismatch. Sputter getter material used on cap further improve vacuum degree. The Silicon-On-Insulator (SOI)...

Traditional inductance–capacitance (LC) wireless humidity sensors have the problem of serious leakage and low quality factor at high humidity. This paper presents an LC-type flexible sensor with electrospun polytetrafluoroethylene/polyvinylidene fluoride (PTFE/PVDF) isolation layer. The based on graphene oxide (GO) was fabricated a porous hydrophobic PTFE substrate. Measurements show sensitivity 6kHz/%RH hysteresis 15% over range 30-90% RH. response recovery time are 9s 5s, respectively....

Zero-rate output (ZRO) drift induces deteriorated micro-electromechanical system (MEMS) gy-roscope performances, severely limiting its practical applications. Hence, it is vital to explore an effective method toward ZRO reduction. In this work, we conduct elaborate investigation on the impacts of internal and packaging stresses at thermal start-up stage, propose a temperature-induced stress release reduce duration magnitude drift. Self-developed high-Q dual mass tuning fork gyroscopes (TFGs)...

Zero-rate output (ZRO) drift induces deteriorated micro-electromechanical system (MEMS) gyroscope performances, severely limiting its practical applications. Hence, it is vital to explore an effective method toward ZRO reduction. In this work, we conduct elaborate investigation on the impacts of internal and packaging stresses at thermal start-up stage propose a temperature-induced stress release reduce duration magnitude drift. Self-developed high-Q dual-mass tuning fork gyroscopes (TFGs)...

Abstract This paper reports a MEMS tuning fork gyroscope which can effectively reduce the acceleration output in both drive and sense directions. The structure adjusts order of mechanical vibration modes through design internal external lever coupling mechanism, moves spurious in‐phase mode frequency above antiphase operating frequency, provides large separation between two modes. It true rejection shocks accelerations. Two comparative gyroscopes (TFG) structures are designed, have...

An increasing number of studies have investigated the use osteotome sinus floor elevation (OSFE) with simultaneous implant placement for maxillary residual bone height (RBH) <4 mm. Many reported good clinical results, but very few complications related to this procedure. Here, case a 50-year-old female patient an RBH in left upper posterior region 1–4 mm, who underwent OSFE three Bicon short® implants, is described. One implants was found be displaced during second-stage surgery. The...

Abstract This paper proposes a new scheme of pendulum accelerometer with sandwich structure. In this scheme, the electrical signal on mass is connected to wafer surface through glass isolated through-silicon-via (TSV), so that basic characteristics can be obtained by wafer-level testing. Compared current commercial device process packaging and testing cost greatly reduced. The glass-in-silicon (GIS) encapsulation caps both sides are prepared TSV GIS reflow process. By designing shape size...

Abstract Background This study aims to evaluate the clinical outcomes of a new implant restoration strategy for patients with limited interocclusal space in posterior region. Materials and Methods A total 37 (19 females 18 males) were enrolled this received 62 implants. locking taper (Bicon) was used first stage procedure, which placed >2mm under bone. An extraoral cementation technique cement crown abutment. The survival success rate restorations evaluated using plaque index, modified...