A5046829064- Advanced MEMS and NEMS Technologies
- Photonic and Optical Devices
- Advanced Measurement and Metrology Techniques
- Optical measurement and interference techniques
- Semiconductor Lasers and Optical Devices
- Optical Wireless Communication Technologies
- Acoustic Wave Resonator Technologies
- Mechanical and Optical Resonators
- Advanced optical system design
- Advanced Sensor Technologies Research
- Adaptive optics and wavefront sensing
- Force Microscopy Techniques and Applications
- Advanced Optical Sensing Technologies
- Advanced Sensor and Energy Harvesting Materials
- Photoacoustic and Ultrasonic Imaging
- Optical Systems and Laser Technology
- Diamond and Carbon-based Materials Research
- Advanced Surface Polishing Techniques
- Analytical Chemistry and Sensors
- Advanced machining processes and optimization
- Surface Roughness and Optical Measurements
- Microfluidic and Bio-sensing Technologies
- Atomic and Subatomic Physics Research
Shanghai Institute of Microsystem and Information Technology
2022-2025
State Key Laboratory of Transducer Technology
2022-2025
Chinese Academy of Sciences
2022-2025
Shanghai University
2022-2024
Shanghai Industrial Technology Institute
2022-2024
ITRI International
2022
Industrial Technology Research Institute
2022
This paper presents AlScN piezoelectric two-axis MEMS mirrors with gimbal-less and gimbaled designs fabricated in a CMOS-compatible manner. Integrated sensors provided feedback signals of the actual mirror positions. The diameter 1.5 mm possessed adjustable optical tilt angles up to 22.6° @ 30 V, high resonance frequency about 8.2 kHz, while 3 reached 48.5° 41 V. structure exhibited an excellent field view good mechanical decoupling. Additionally, significant improvement scanning performance...
This paper presents a two-axis AlScN-based water-immersible MEMS mirror fabricated in an 8-inch process. Compared with other studies, this device has larger optical aperture 10 mm diameter. The resonant frequencies of the are 1011 Hz air and 342 water. scanning angle reaches ±5° ±2° at water, respectively. cavitation phenomenon is observed when operating which leads to electrical failure. To address issue, reduced frequencies-246 152 water-is characterized, through bubbles can be effectively...
Nitrogen vacancy (NV) centers in diamonds have emerged as one of the most promising candidates for magnetic field sensing. However, laser intensity fluctuation is coupled to diamond fluorescence; thus, sensitivity severely affected by noise and stability laser. Integrating both quantum sensor suppression device a crucial step toward miniaturization practical applications. Here, we present piezoelectric-driven dynamically adjust cancelation with dimensions 5 × 1.5 mm3 based on grating...
This paper reports a novel piezoelectric MEMS micromirror with high fill factor (19.6%) and large optical aperture (5 mm) based on CMOS-compatible Al(Sc)N. The 5 mm can obtain smaller laser divergence angle achieve longer detection distance. Different from the gimbal-less which is prone to biaxial crosstalk, double circular arc beam structure nested inside outside efficiency actuation scanning low stress crosstalk. In vacuum, mirror shows scan of 52.5° (Horizontal, H) ×42.1° (Vertical, V)...
This paper presents a 10mm piezoelectric MEMS fast steering mirror that integrates piezoresistive sensors. The device is fabricated using an 8-inch CMOS-compatible process, packaged into volume of 35×35×5 mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> , weighing 22 g, which meets the miniaturization and mass production requirements for free-space optical communication. FSM operates in double quasi-static scanning mode, with tilting...
This work presents a MEMS fast steering mirror fabricated by an 8-inch AlScN platform, with large optical aperture of up to 10 mm and high surface quality (RMS < 20 nm, PV 120 nm), intended for free-space communication. The device comprises reflective plate, pillar four cantilever beams thin films. is prepared wafer-level eutectic bonding process. A reinforcement structure proposed increase the resonant frequency resistance deformation. mechanical performance, including frequency, step...
We previously designed a dual-axis piezoelectric MEMS mirror with low crosstalk gimbal structure, which is utilized as the key device for further research laser beam scanning. This paper mainly focuses on studying Lissajous scanning resolution of this frequency ratio and phase modulation. For accurately evaluating resolution, center angular redefined by theoretical calculation verified experimental measurement. Meanwhile, nonlinearity studied carefully. Finally, works at state...
This paper presents the design of a novel 3×3 piezoelectric micromirror array (PMMA) with an 84.6% fill factor and describes three-dimensional hidden fabrication platform. The fabricated device operates quasi-static mode in 3-degree-of-freedom, namely tip, tilt, piston. In order to achieve high factor, structure is introduced, realized through multi-layer bonding. addition, double-stop-layer’s glass cover for optical was employed realize transparent wafer-level packaging. testing result...
<title>Abstract</title> MEMS micromirrors typically require the use of elongated torsion beams to achieve optical scanning angles in excess 90°, but beam structures usually lead problems such as larger chip areas and lower reliability. This paper designs a biaxial Lissajous piezoelectric AlScN-driven micromirror driven by circular arc actuators, featuring large mirror with diameter 5 mm. To large-angle scanning, optimizations are made following four aspects: 1) stress dispersion adopted...
<title>Abstract</title> This paper presents a compact and high-performance piezoelectric Micro-Electro-Mechanical System (MEMS) Fast Steering Mirror (FSM) designed for use in laser Inter-Satellite Links (ISLs). The FSM features large optical aperture of 10 mm is batch fabricated using an 8-inch wafer-level eutectic bonding process, packaged into volume 26 × 22 3 mm<sup>3</sup>. Notably, the piezoresistive (PZR) sensor integrated on spring to facilitate precise beam control. Furthermore,...
Reliability is a critical characteristic of aerospace-grade components, particularly fast steering mirror (FSM), which one the key devices in Free-Space laser communication terminals. The previous long-term work FSM exposes noteworthy reliability issues about degradation this device. This paper first demonstrates electrical aging effect that occurs piezoelectric-driven micro electro mechanical system (MEMS) during prolonged operation. significant issue as it causes decay angle MEMS FSM,...