On-chip spectrometers using silicon photonics offer a compact, energy-efficient, and cost-effective solution to biochemical spectroscopy hyperspectral imaging in integrated portable application scenarios. The mid-infrared (MIR) spectral band is critical spectroscopic sensing. However, the existing on-chip spectrometer approaches are limited MIR. Here, we present an computational MIR (3.7–4.05 μm) MEMS-enabled photonic device, which realized via time-domain modulation of reconfigurable...

A new class of hybrid systems that couple optical and mechanical nanoscale devices is under development. According to their interaction concepts, two groups opto-mechanical are summarized as mechanically tunable radiation pressure-driven resonators. On account high-quality factors small mode volumes well good on-chip integrability with waveguides/circuits, photonic crystal (PhC) cavities have attracted great attention in sensing applications. Benefitting from the interaction, a PhC cavity...

Long-wave infrared (LWIR, 6–14 µm) is an important wavelength range as it covers abundant vibrational molecular fingerprints that can be used for gas/liquid sensing and absorption spectroscopy. Silicon waveguide-based passive photonic devices offer advantages toward chip-scale miniaturization of integrated circuits (PIC) sensors in LWIR have been explored. However, the modulation Si-based guided-wave propagation remains less reported. Here, we demonstrate a MEMS tunable directional coupler...

We demonstrate a multifunctional photonic switch on silicon-on-insulator platform operating at the mid-infrared wavelength range (3.85–4.05 µm) using suspended waveguides with sub-wavelength cladding and micro-electro-mechanical systems (MEMS) tunable waveguide coupler. Leveraging flip-chip bonding technology, top wafer acting as electrode is assembled above silicon-on-insular to enable electrostatic actuation. Experimental characterizations for functions of proposed device include (1) an...

Abstract Photonic integrated circuits (PICs) provide a promising platform for miniaturized on‐chip optical systems communication, computation, and sensing applications. The dense integration of photonic components is one the keys to exploit advantages PIC. Although light focusing fundamental indispensable function in PICs, at micro/nanometer‐scale challenging. Here, bigradient metalens (BOML) proposed achieve ultrasmall focal lengths spot sizes subwavelength scale PICs. design BOML combines...

Miniaturized spectrometers are attracting widespread interest due to the rising demand for portable spectroscopic applications. While chip-scale widely investigated using silicon photonics technology, few research have addressed need a mid-infrared (MIR) integrated spectrometer lack of an effective reconfigurable approach. In this paper, we present novel solution MEMS technology in MIR region (3.6~5 μm wavelength range). We adopt computational spectrometry scheme digitalized control cascaded...

Mid-infrared (MIR) photonics are generating considerable interest because of the potential applications in spectroscopic sensing, thermal imaging, and remote sensing. Silicon is believed to be a promising solution realize MIR photonic integrated circuits (PICs). The past decade has seen huge growth PIC building blocks. However, there still need for development reconfigurable enable powerful on-chip optical systems new functionalities. In this paper, we present an (3.7~4.1 μm wavelength...

Mid-infrared (MIR) photonic integrated circuits have generated considerable interest, owing to their potential applications, such as thermal imaging and biochemical sensing. A challenging area in the field is development of reconfigurable approaches for enhancement on-chip functions, where a phase shifter plays an important role. Here, we demonstrate MIR microelectromechanical system (MEMS) by utilizing asymmetric slot waveguide with subwavelength grating (SWG) claddings. The MEMS-enabled...

Abstract Mode‐division‐multiplexing (MDM) recently attracted much interest due to its ability enhance the capacity for optical information communication. To meet growing data transmission demands and enable flexible on‐chip mode manipulation, programmable converter switches are essential. This work introduces a micro‐electromechanical‐system (MEMS)‐enabled arbitrary order switch, capitalizing on benefits of MEMS technology such as low power consumption, robust modulation capabilities,...

This work presents a MEMS fast steering mirror fabricated by an 8-inch AlScN platform, with large optical aperture of up to 10 mm and high surface quality (RMS < 20 nm, PV 120 nm), intended for free-space communication. The device comprises reflective plate, pillar four cantilever beams thin films. is prepared wafer-level eutectic bonding process. A reinforcement structure proposed increase the resonant frequency resistance deformation. mechanical performance, including frequency, step...

Abstract Silicon photonics enables the construction of chip-scale spectrometers, in which those using a single tunable interferometer provide simple and cost-effective solution. Among various tuning mechanisms, electrostatic MEMS reconfiguration stands out as an ideal candidate, given its high efficiency ultra-low power consumption. Nonetheless, devices face significant noise challenges arising from their susceptible minuscule components, adversely impacting spectral resolution. Here, we...

We present an ultra-small photonic crystal-based test tool for gas permeability of polymers. It features a fully-etched crystal (PhC) structure occupying area 20 µm × 800 on silicon-on-insulator wafer. The light-matter interaction in the PhC cavity with deformed Polydimethylsiloxane (PDMS) under pressure difference was investigated finite element method and finite-difference time-domain numerically. Next, three PDMS membranes different mixing ratios were utilized characterization permeation...

A novel concept of on-chip Fourier transform spectrometer is proposed. It consists semiconductor waveguide directional couplers and NEMS actuators. The optical path difference can be tuned by controlling the actuators to couple or decouple couplers. With 9 stages couplers, we demonstrate numerically that spectral resolution reach up 4 nm in 1.5 μm 1.8 wavelength range. Further enhancement achieved increasing number integrated driven This design meets requirement small size, weight power may...

In this study, we propose and experimentally demonstrate a design of silicon metasurface that integrates the functions grating, polarizer, band-pass filter in near infrared regime. This metagrating device features double periodicity one direction, which enables near-field Moire effect to generate diffraction far field. Based on high contrast two-dimensional utilizes guided-mode resonance enhance coupling evanescent waves. Our results strong only occurs certain wavelength range is...

High-precision detection of electric charge is critical for physical, chemical, and biological measurements. Nanophotonic optomechanical system confines the optical field at nanoscale enables a strong interaction between cavity mechanical resonator. Its high quality factor coupling are promising precision sensing applications. Here an integrated electrometer proposed using zipper with suspended photonic crystal nanobeam (PCN) acting as movable As electrostatic force arising from voltage to...

This paper presents the design of a novel 3×3 piezoelectric micromirror array (PMMA) with an 84.6% fill factor and describes three-dimensional hidden fabrication platform. The fabricated device operates quasi-static mode in 3-degree-of-freedom, namely tip, tilt, piston. In order to achieve high factor, structure is introduced, realized through multi-layer bonding. addition, double-stop-layer’s glass cover for optical was employed realize transparent wafer-level packaging. testing result...

We theoretically study photon transmission and mechanical ground state cooling in a two-dimensional optomechanical system that is formed of suspended graphene sheet on an one-dimensional crystal. When the frequencies resonator nanobeam resonator(phononic mode crystal) are approximately same, $\Lambda$-type degenerate four-level optomechanics shows two-color optomechanically-induced transparency , window could be switched among probe signal's absorption, transparency, amplification. According...

This paper reports a waveguide-integrated bigradient dielectric metalens with footprint of only 16.8×10 µm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> . In mid-infrared wavelengths 3.65-3.8 um, the achieves high-efficiency in-plane focusing highest ratio wavelength to focal length/spot size (0.268 & 2.83). After subsequent optimization and design, total area has been further compressed 55.1% demonstrated mode conversion applications...