Many different network types have been promoted for use in control systems. In this article, we compare three of them: the Ethernet bus, with carrier sense multiple access collision detection, token-passing bus (e.g., ControlNet), and controller area DeviceNet). We consider how each can be used as a communication backbone networked system connecting sensors, actuators, controllers. A detailed discussion medium sublayer protocol is provided. For protocol, study key parameters corresponding...

This paper discusses the impact of network architecture on control performance in a class distributed systems called networked (NCSs) and provides design considerations related to quality as well service. The integrated network-control system changes characteristics time delays between application devices. study first identifies several key components delay through an analysis protocols dynamics. parameters is used determine acceptable working range sampling periods NCS. A simulator...

Smart manufacturing (SM) is a term generally applied to the improvement in operations through integration of systems, linking physical and cyber capabilities, taking advantage information including leveraging big data evolution. SM adoption has been occurring unevenly across industries, thus there an opportunity look other industries determine solution roadmap paths for such as biochemistry or biology. The evolution affords managing significantly larger amounts acting on it with analytics...

Among the tenets of Smart Manufacturing (SM) or Industry 4.0 (I4.0), digital twin (DT), which represents capabilities virtual representations components and systems, has been cited as biggest technology trend disrupting engineering design today. DTs have in use for years areas such model-based process control predictive maintenance, however moving forward a framework is needed that will support expected pervasiveness DT evolution SM I4.0. A set requirements derived from analysis definitions,...

The most effective way to improve networked control systems (NCSs) performance is reduce network traffic. By adapting a system configuration, the communication medium more efficiently used and time-delays are minimized. Adjustable deadbands explored as solution traffic in NCSs. stability of deadband derived then verified via simulation. A method determine size presented that relies on metric takes into account response well effectiveness with different controllers studied effect disturbances...

The most notable trend in manufacturing over the past five years is probably move towards networks at all levels. At lower levels factory infrastructure, provide higher reliability, visibility, and diagnosability, enable capabilities such as distributed control, diagnostics, safety, device interoperability. levels, can leverage internet services to factory-wide automated scheduling, diagnostics; improve data storage visibility; open door e-manufacturing. This paper explores current trends...

Digital Twin (DT) is an emerging technology that has recently been cited as underpinning element of the digital transformation. DTs are commonly defined replicas components, systems, products, and services receive data from field to support intelligent decision-making. Although several frameworks for DT application in manufacturing have proposed, there no systematic methodology literature supports development scalable, reusable, interoperable, interchangeable, extensible solutions, while...

Smart manufacturing (SM) systems utilize run-time data to improve productivity via intelligent decision-making and analysis mechanisms on both machine system levels. The increased adoption of cyber-physical in SM leads the comprehensive framework (CPMS) where data-enabled are coupled with resources plant floor. Due their nature, CPMS susceptible cyber-attacks that may cause harm system, products, or even human workers involved this context. Therefore, detecting efficiently timely is a...

In this paper we discuss the modelling and control of networked systems (NCS) where sensors, actuators controllers are distributed interconnected by a common communication network. Multiple delays as well multiple inputs outputs (MIMO) considered in algorithm. addition, asynchronous sampling mechanisms sensors characterized to obtain actual time between controller. Due characteristics network architecture, piecewise constant plant assumed discrete-time models controller dynamics adopted...

In the semiconductor manufacturing industry, market demands and technology trends drive manufacturers towards increases in wafer size decreases device size. Application of factory-wide advanced process control (APC) techniques down to wafer-to-wafer (W2W) level capability is becoming only choice cope with demanding situation. However, one main limitations undertaking W2W nonavailability timely metrology data at level. Recently virtual (VM) have been proposed provide data; they potential be...

As requirements on data volumes, rates, quality, merging, and analytics increase exponentially in the digital universe, semiconductor manufacturers are faced with a need for new approaches to management use across Fab. These often termed “big data” challenges. In our industry big solutions will be key scaling advanced process control (APC) finer levels of diagnostics. However main impact better enable more effective predictive technologies such as maintenance (PdM), virtual metrology yield...

Digital Twin (DT) is one of the key enabling technologies for realizing promise Smart Manufacturing (SM) and Industry 4.0 to improve production systems operation. Driven by generation analysis high volume data coming from interconnected cyber physical spaces, DTs are real-time digital images systems, processes or products that help evaluate business performance. This paper proposes a novel DT architecture monitoring evaluation large-scale SM systems. An application manufacturing flow-shop...

An important issue in anomaly detection smart manufacturing systems is the lack of consistency formal definitions anomalies, faults, and attacks. The term used to cover a wide range situations that are addressed by different types solutions. In this letter, we categorize anomalies machines, controllers, networks along with their mechanisms, unify them under common framework aid identification potential main contribution proposed categorization it allows gaps systems.

Safety violations in programmable logic controllers (PLCs), caused either by faults or attacks, have recently garnered significant attention. However, prior efforts at PLC code vetting suffer from many drawbacks. Static analyses and verification cause false positives cannot reveal specific runtime contexts. Dynamic symbolic execution, on the other hand, fail due to their inability handle real-world programs that are event-driven timing sensitive. In this paper, we propose VetPLC, a temporal...

This paper discusses the modeling and analysis of networked control systems (NCS) where sensors, actuators, controllers are distributed interconnected by a common communication medium. Therefore, multiple delays as well inputs outputs considered in algorithm. In addition, asynchronous sampling mechanisms sensors axe characterized to obtain actual time between controller. Due characteristics network architecture, piecewise constant plant assumed discrete-time models controller dynamics...

A prototype hardware/software system has been developed and applied to the control of single wafer chemical-mechanical polishing (CMP) processes. The methodology consists experimental design build response surface linearized models process, use feedback change recipe parameters (machine settings) on a lot by basis. Acceptable regression were constructed for average removal rate nonuniformity, which are calculated based film thickness measurement at nine points 8" blanket oxide wafers. For...

A prototype hardware/software system has been developed and applied to the control of single wafer chemical-mechanical polishing (CMP) processes. The methodology consists experimental design build response surface linearized models process, use feedback change recipe parameters (machine settings) on a lot by basis. Acceptable regression for tool process were constructed average removal rate nonuniformity which are calculated based film thickness measurement at nine points 8-in blanket oxide...

When sensory and actuation devices in a control system are exchanging data through one common communication medium, the sharing of bandwidth will induce unavoidable latency might degrade performance. Hence, utilization resource requirement specification should be analyzed properly designed when implementing over network architecture. In this paper, we analyze performance information multiple cooperative agents network, propose design methodologies guaranteeing acceptable networked system....

This paper describes the development of real-time control technology for improvement manufacturing characteristics reactive ion etchers. A general strategy is presented. The principal ideas are to sense key plasma parameters, develop a dynamic input-output model subsystem connecting equipment inputs variables, and design implement multivariable system these variables. Experimental results show that this approach closed-loop leads much more stable etch rate in presence variety disturbances as...

This paper compares 3 different control schemes to regulate temperature and humidity in facilities the energy consumption each of cases. The first method is a traditional ON/OFF controller with dead band region. second scheme an intelligent where system for heater humidifier predicts time takes reach set point value supplied based on these predictions. last optimal thermal comfort building maintained by tracking PMV (predicted mean value), which function accepted levels from psychometric...

An adaptive control method is proposed for applying "peak shaving" to the grid electrical demand of a single building, using battery energy storage system reduce maximum demand. The objective save cost by reducing monthly "demand charges" commonly levied on commercial power customers. Multiple forecasts are evaluated at every time step during each day, and combined calculate limit which controlled. Whereas prior methods apply peak shaving day alike, our does not attempt below reached in same...