The first 24 and 30 GHz band thin-film bulk acoustic resonator (FBAR) filters are reported in this paper. were configured with air-gap-type FBARs on a flat silicon substrate. They designed using Butterworth–Van-Dyke (BVD) equivalent circuit considering the linear relationship between resonant frequency, capacitance ratio, loss FBAR. measured characteristics corresponded those of simulation pass-band. center fractional bandwidth, minimum insertion loss, out-of-band suppression 23.8 GHz, 3.4%,...

We have developed a new electrode material, suitable for AlN-based FBARs. The necessary conditions FBAR materials are low density, resistivity, and high acoustic impedance. investigated the influence of on resonant characteristics in FEM simulations experiments. found properties ruthenium (Ru) to be use as In addition, by smoothing surface electrodes, full width at half-maximum (FWHM) X-ray rocking curves AlN films is 2.9/spl deg/ Ru electrodes. using electrodes were an unloaded quality...

This paper describes a circuit model for the analysis of nonlinearity in filters based on radio- frequency (RF) bulk acoustic wave (BAW) resonators. The nonlinear output is expressed by current source connected parallel to linear resonator. Amplitude programmed proportional product currents flowing Thus, performed common analysis, even complex device structures. applied ladder-type RF BAW filter, and dependence discussed. Furthermore, this verified through comparison with experiments.

This paper proposes simple and precise nonlinear simulation techniques for surface acoustic wave (SAW) duplexers, especially the in-band 3rd order distortion, so-called 'triple beat'. The model is based on nonlinearity of SAW stress vs. strain (nonlinear elasticity SAW), needs just one parameter, which represents coefficient elastic constant. results triple beat 1.9 GHz Personal Communications Service (PCS) duplexers demonstrate fairly good agreement with measurements an accuracy less than 1 dB.

We describe the development of an air-gap type film bulk acoustic resonator (FBAR) filter fabricated using a thin sacrificed layer on flat substrate. In process we focused reducing cost wafer process. Results from both simulations and experiments demonstrate that dome- shaped air gap was formed between substrate surface bottom electrode FBAR structure possible. Even if is used, can be stress control. Consequently, Q-factor at resonance anti-resonance effective k <sup...

In this paper, we discuss the nonlinear performance difference between surface acoustic wave (SAW) and bulk (BAW) resonators, which are inter-modulation-distortion (IMD) triple-beat (TB) products, indicate importance to reduce even-order nonlinearity of BAW resonator. Then, were able validate accuracy efficiency our proposed simulation technique on devices by comparing with experimental data. We verified that circuit model is a high-performance tool can be used predict device nonlinearities....

In this paper, we discuss the nonlinear performance difference between surface acoustic wave (SAW) and bulk (BAW) resonators, which include intermodulation distortion (IMD) or triple-beat (TB) products, indicate importance of reducing even-order nonlinearities BAW resonators. We were able to validate accuracy efficiency our proposed simulation technique for devices by comparing results with experimental data. verified that circuit model is a high-performance tool can be used predict device...

A bulk acoustic wave filter composed of piezoelectric thin-film resonators has many features superior to those other small filters such as a surface (SAW) and ceramic filter. high-Q factor low loss are big advantages for film resonator (FBAR). The electrode material that is selected very important maintaining appropriate coupling factor. An analysis the effects impedance on AlN-based FBAR performance described. electromechanical (k2) were found be influenced by mainly dominated Young's...

This paper describes a design technique to enhance isolation of acoustic duplexers in the single-ended and differential modes for so-called "inter-stage SAW-less" radio frequency (RF) front-end cellular phones. The leakage signal from Tx Rx ports existing inside duplexer, which degrades characteristics, is cancelled out by utilizing proposed circuit topology performing careful whole duplexer structure. principle directly enhances isolation, but it also contributes improve mode isolation....

This paper describes a 3.0 ° 2.5 0.7 mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> wideband code division multiple access (WCDMA) Band I duplexer with receiver (Rx) balanced output we developed. The low-loss and power-durable film bulk acoustic resonator (FBAR) the single-to-balanced double mode SAW (DMS) were utilized for transmitter (Tx) Rx filter respectively. It was experimentally confirmed that 2...

This paper describes the development of a miniaturized antenna duplexer for W-CDMA application. As required insertion loss in system is severe even film bulk acoustic resonator (FBAR) technology, we propose modified FBAR structure, which called an AlN just-etched FBAR, to reduce losses. The characteristics proposed are verified by both simulation and experimental data it confirmed that lateral-leakage waves successfully decreased. results, Q-factor at anti-resonance effective k 2 improved...

In general, surface acoustic wave (SAW) duplexers have the lower 3rd order linearity compared to bulk (BAW) duplexers. Actually, specification for inband nonlinear distortion, triple beat, required 1.9 GHz Personal Communications Service (PCS) band in CDMA2000 can be satisfied only by BAW The objective of this work is propose design methodology extremely high-linear SAW and develop triplebeat-free PCS elastic model, which we proposed last year predicting applied highly linear developed...

This paper describes a circuit model for the analysis of nonlinearity in filters based on radio-frequency (RF) bulk acoustic wave (BAW) resonators. The non-linear output is expressed by current source connected parallel to linear resonator. Amplitude programmed proportional product currents flowing Thus performed common even complex device structures. applied ladder-type RF BAW filter, and frequency dependence discussed. Furthermore, this verified through comparison with experiments.

A multi-step DRIE process for fabricating a vertical comb-driven micromirror array with five different heights was developed. This used to fabricate dual-axis 128 /spl times/ high resonance frequency.

This paper presents the design consideration on a converged Rx surface acoustic wave (SAW) duplexer module for integrated RF front end. Two different matching-circuit and notch-circuit configurations were examined with importance placed electrical characteristics (insertion loss isolation of duplexer) simplification module, respectively. From circuit simulations examinations, we verified that simplified was best in terms both space case finite inductor's Q. We also fabricate quad-band (Band...

This article describes the simulation analysis and experimental verification of a new type high-isolation surface-acoustic wave (SAW) duplexer by using an SAW on-chip compensation circuit designed to cancel leakage signal main at multiple frequency bands. First, amplitude phase change consists ladder-type transmitter (Tx) filter, double-mode (DMS) receiver (Rx) filter is applied clarify cancellation conditions. Then, feasibility three-interdigital transducer (IDT) DMS resonator specially...

A novel surface acoustic wave (SAW) duplexer module called a converged Rx is proposed. The ports of two duplexers for different frequency bands are combined using passive matching components in the module, which reduces number pins by half. feasibility study including issue isolation between discussed and prototype composed four (two converged-Rx ports) fabricated stacked-duplexer layout. features reduced Pins, an area about 40%, sufficient 55 dB bands.

The co-design of a SAW duplexer and low-noise amplifier (LNA) for reducing the total noise figure Rx chain in RF front-end current multi-band cellular handsets is presented this paper. procedure proposed one case study UMTS Band2 demonstrated. key point designing an LNA at optimum impedance, instead standard 50 Ω impedance interface, while taking matching circuit loss into account. possibility shown simulation.

High isolation surface acoustic wave (SAW)duplexer and bulk (BAW)duplexers are in high demand. To satisfy the requirements, we have developed a method of improvement at multiple isolated frequency bands an RF SAW duplexer. These duplexers leakage signal paths between terminals due to stray elements. By fixing using on-chip compensation path with proper phase amplitude, can be achieved arbitrary frequency. We analyzed this concept detail for long-term-evolution (LTE)Band-I duplexer...

This paper describes a spurious noise measurement arising from radio frequency integrated circuit (RFIC) and an analysis of its impact on receiver 4G cellular mobile handset. In systems, there are two types unwanted signals that degrade the sensitivity: phase clock RFIC. The former is observed by band power measurement. However, latter one not easily same way because it tone signal with varying noise. To detect noise, system combination active probe, inter-stage filter high attenuation (80...

This paper describes the theoretical analysis and experimental verification of a new type high-isolation surface-acoustic-wave (SAW) duplexer by using SAW on-chip compensation circuit designed to cancel signal main filter at an attenuation frequency band. First, numerical based on interference waves propagating parallel waveguides is applied clarify relation between absolute improvement value filter's level conditions. Then, feasibility double mode (DMS) resonator are studied in both...