This paper presents a systematic approach to transduction optimization of resonant piezo-based MEMS devices. The method is based on inverse design using direct piezoelectric effect and exploits mechanical action desired mode calculate the polarization map ceramics. Optimal achieved by matching excited electric field distribution inversely retrieved electrode segmentation topology technique. proposed was applied improve existing state-of-the-art mirrors. optimized devices feature 70% increase...

.We report the use of digital holographic microscopy to study harmonic evolution dynamic deformation two orthogonal modes resonating piezoelectric MEMS mirror with a gimbal frame suspension. For bending mode, results show linear relationship between and optical scan angle. torsional hysteretic behavior is observed, showing significant difference depending on direction. The was measured be 45 nm, representing 18% total this mode. To investigate effect, point-by-point Fourier expansion method...

In this paper, we report the design, microfabrication and characterizations of a dual-axis MEMS mirror based on an unconventional Ba-doped PZT piezo thin-film produced using pulsed laser deposition. The features three resonant modes: one low frequency bending mode at 490 Hz two high torsional modes 9 kHz 25 both excited with dog-bone shaped actuator. Excited 2Vpp 5Vpp, optical scan angle 15.5° 6° was measured for slow fast axis respectively. We show that obtained results are comparable to...

We report a resonant torsional micro-mirror with all-piezoelectric driving and tunable spring stiffness. Stiffness modulation finds two practical applications. First is tuning of the resonance frequency, achieved by applying DC bias voltage to stiffness modulating structures. A rate was found be 0.95 Hz V−1 up 20 usable frequency range. Second, when direct excitation mode combined harmonic stiffness, an optical scan angle shown increased more than 4° through 2:1 degenerate parametric...

This Letter introduces a novel principle to the confocal profilometry for simultaneous measurement of surface position and tilt. The relies on an angle-dependent coding illumination surface-under-test, achieved by dividing pupil into several subapertures. reflected light is decoded perform angle-resolved analysis measuring intensity contributions each individual subaperture. By comparing their contributions, additional information tilt can be inferred. For our demonstration experiment...

We report the design, fabrication, and characterization of a resonant varifocal micromirror excited with thin-film piezoelectric actuators. The mirror features spiral suspension allowing both in-plane out-of-plane motion which reduces stress build up upon membrane deformation hence high shape fidelity. Driven at resonance, reaches an optical power more than 27.5 diopters 197 kHz 7 VP-P excitation. unique feature is combination large integration binary Fresnel zone plate (BFZP) onto flexible...

This study addresses the problem of low-cost microlens fabrication and outlines development a novel microforging apparatus for mold fabrication. The consists an electromagnetic impact tool which strikes piston with hardened steel ball into workpiece. creates spherical indentation serves as lens cavity. is controlled by microprocessor control unit communicating personal computer enables on-the-fly variation excitation to process. We studied effects process parameters on diameter fabricated...

This study shows how unimorph deformable mirrors can be effectively fabricated out of commercially available piezo-buzzers without any high-tech equipment. Our design involves a quad-channel mirror with monolithically integrated flexures. The is controlled by custom high-voltage driver unit, capable 93 Vp-p and 75 kpps performance. system exhibits 16-bit resolution over the angular working range ±1.85 mrad, 0.04 mrad V−1 sensitivity 14% hysteresis. We demonstrate performance for focus...

We report a transduction optimization method of piezo-based MEMS structures using segmentation the excitation electrodes. Optimal is achieved by matching electric field distribution to polarization including direct piezoelectric action caused mechanical motion desired mode. Next, topological electrodes custom Matlab scripts applied segment Method was improve design existing state-of-the art resonant mirrors. The optimized mirrors were fabricated and feature an 80% increase in optical scan...

A high-speed large-amplitude piezoelectric varifocal MEMS micromirror is reported. The mirror capable of both quasistatic and resonant actuation. In quasi-static mode, the shape can be tuned to aspherical shapes by adjusting excitation individual electrodes using a superposition principle. was shown achieve total optical power +/− 100 m <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">−1</sup> at 90kHz. novel figure merit for mirrors introduced...

To improve current methods for the experimental validation of numerical simulations in corrugated-plate heat exchangers (CPHEs), a full-field quantitative velocimetry fluid flow is required.This paper investigates application particle-tracking (PTV) to modified CPHEs.For this, an CPHE unit with transparent, corrugated upper plate was built.We show that by viewing through corrugated, refractive interface, complex periodic optical distortion introduced, affects and corrupts estimated particle...

An increasing need for portable personal time- and size-resolved monitoring of the fine airborne particulate matter drives development towards miniaturization cost reduction optical particle counters. In an integrated design counters, confinement air is becoming more critical, since variations in positions are getting bigger relative to dimensions sensor. Variations position directly affect light collection angle hence induce sizing error. We have developed a 3D simulation framework based on...

Detecting and classifying particles over a wide range of types sizes is essential for precise air quality determination. In this study the use optical waveguide-based particle detection examined using finite element method (FEM) based simulations. The simulation model assumes silicon nitride strip waveguide built up in 3D Comsol Multiphysics platform. geometry parameters were varied to identify suitable geometries single-mode wave guidance fundamental quasi-TE quasi-TM modes. with their...

Spontaneous optical emission properties of laser-produced plasma during laser damage events at input and exit surfaces fused silica were retrieved compared. We show that the surface is much larger in size exhibits significantly higher electron number density excitation temperature, even when smaller energy was used. This effect attributed to stronger laser–plasma coupling surface. In addition, a strong continuum background containing three peaks 1.3 eV, 1.9 2.2 eV observed surface, possible...

We report a novel micromirror design with transduction system featuring heavy frame, supported soft suspension springs for quality factor enhancement. Compared mirror without suspended structure reveals substantial increase of factor. A 220 % enhancement is experimentally observed, 4000 at 35 kHz and atmospheric pressures. This work highlights new freedom next-generation micromirrors.

In light-field microscopy, a single point emitter gives rise to complex diffraction pattern, which varies with the position of in object space. order use deconvolution-based wave-optical reconstruction schemes for imaging systems, established methods rely on theoretical estimation such patterns. this paper we propose novel method direct experimental spread function. Our approach relies modified reversed micro-Hartmann test acquire composite function several thousand emitters plane...

This work reports a resonant piezoelectric mirror driven by rotated directional interdigitated electrodes exploiting the d <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">33</inf> mode. expands prior on IDEs where only small angle, quasistatic devices were reported. We, for first time combine this actuation principle with mechanical amplification and demonstrate that it can be used to excite high-speed high amplitude scanning mirrors. A...

In this paper we propose the selective adhesive bonding technique using contact imprinting from thin layers spin-coated on sacrificial polymer foils. The process is assisted with vacuum. We three different methods in order to improve selectivity of application, control thickness and reduce pull-off force prevent die sticking. apply these assembly a miniaturized optical particle counter confronted several strict requirements, such as small feature size (<; 200 μm), minimal 1 precise out-of...

In addition to the two-dimensional intensity distribution in image plane, light field microscopes capture information about angle of incident radiation. This can be used extract depth object, calculate all-in-focus images and perform three-dimensional reconstructions from a single exposure. combination with automated microscopy setups, this makes technique promising tool for high-throughput, cell assay evaluation which could substantially improve drug development screening. To end, we have...

Evanescent field particle scattering is a promising tool for single detection. Here we performed detailed analysis to predict feasibility, potential and limitations of this sensing mechanism. First results from analytic estimations as well 2D-simulations the feasibility detection but also highly non-trivial dependence signals on size, shape number particles.