A whispering gallery mode resonator based magnetometer using chip-scale glass microspherical shells is described. neodynium micro-magnet elastically coupled and integrated on top of the shell structure that enables transduction magnetic force experienced by magnet in external fields into an optical resonance frequency shift. High quality factor resonators with ultra-smooth surfaces have been successfully fabricated magnets to achieve Q-factors greater than 1.1 × 107 shown a shift 1.43 GHz/mT...

Abstract An amplitude-modulated laser can be used to generate false, yet coherent acoustic signals on the outputs of MEMS microphones. While this vulnerability has ramifications security cyber-physical systems that trust these microphones, physical explanation effect remained a mystery. Without an understanding phenomena contributing signal injection, it is difficult design effective and reliable defenses. In work, we show degree which mechanisms thermoelastic bending, thermal diffusion,...

We demonstrate a thermal infrared (IR) detector based on high quality-factor (Q) whispering gallery mode (WGM) borosilicate glass microspherical shell resonator and investigate its performance to detect IR radiation in 1 - 20 μm wavelength range. The exhibits temperature sensitivity of 1.17 GHz/K with Q-factor 3 million can be configured as sensor. sensor exhibited responsivity 7.88 kHz/nW achieved noise-equivalent-power (NEP) 19 nW/√Hz experimentally. A laser Doppler vibrometer (LDV) is...

We present a novel magnetometer consisting of chip-scale whispering gallery mode resonators with high-g factors (>10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">6</sup> ) realized using MEMs fabrication techniques. A permanent magnet is elastically coupled to borosilicate microbubble. Magnetic forces from applied external magnetic fields induce deformation in the microbubble which can be sensitively monitored through changes optical...

Novel biosensors employing whispering-gallery-mode microshell resonators are demonstrated. Thermo-optical biosensing detects urea, while refractive index-based show high sensitivity to gold coated nanoparticles, promising applications in biochemical sensing for medical, environmental, and food safety.

In this work, we demonstrate high Q-factor chip-scale whispering gallery mode (WGM) glass microshell optical resonators thermally coupled to a microfluidic system as sensitive calorimetric biosensors. Optical resonance is induced in spherical borosilicate shell structures released from silicon substrate using tapered fiber and 1550 nm laser. Temperature change highly selective enzymatic reactions induces thermal expansion thermorefractive changes the which manifest characteristics. As an...

All packaged MEMS sensors experience strain arising from CTE (Coefficient of Thermal Expansion) mismatches and assembly in the final product when deployed applications. The effect these stresses on based SMOx gas sensor performance has not been studied before can be a significant source error sensing In this paper, we have stress MOx by – (a) quantifying seen over typical operating temperature conditions (b) measuring materials under to quantify effect. We simulated thermomechanical package...

In this paper, we demonstrate the ability of identifying ppm level concentrations three volatile organic compounds using micromachined quartz resonators. 100 nm films functional polymers were deposited on resonators for identification ethanol, acetone, and toluene. Adsorption gas vapors by polymer results in resonance frequency shifts Principal component analysis (PCA) was performed raw shift data collected. PCA is able to determine components that allow species identification. Further...

We explore the feasibility of a volatile organic compounds (VOC) gas sensor based on an ultra-high quality-factor (Q) whispering-gallery-mode (WGM) microspherical glass (MSG) shell resonator coated with amino terminated poly(2-vinylpyridine).The change in local refractive index caused by polymer absorbing molecules was monitored MSG through shift its optical resonance frequency.The achieved sensitivity 4.91 kHz/ppm to acetone and 21.44 ethanol, detection down 0.375% ethanol is...

Chip-scale microspherical glass shell (MSG) whispering gallery mode (WGM) resonators offer a unique platform to configure high sensitivity calorimetric biosensor.The MSG optical resonator is realized using the chip-scale blowing technique.The backside silicon thinned 50 µm and attached 3D printed reaction chamber.The bio-reaction occurs directly on surface for highly effective coupling of heat from chamber result in sensitive thermal sensor.We present latest results quantify...

We present sub-picometer displacement measurement using a high quality-factor (Q) whispering gallery mode (WGM) borosilicate glass microspherical resonators. Calibrating the expansion of WGM resonator laser Doppler vibrometer (LDV) upon absorption thermal radiation, 3.7 pm dimensional change can be experimentally resolved 1 mm diameter and <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$8.4\ \mu \mathrm{m}$</tex> thick shell resonator. COMSOL...