A5019519892- Ion-surface interactions and analysis
- Atomic and Molecular Physics
- X-ray Spectroscopy and Fluorescence Analysis
- Laser-induced spectroscopy and plasma
- Electron and X-Ray Spectroscopy Techniques
- Nuclear Physics and Applications
- Mass Spectrometry Techniques and Applications
- Vector-Borne Animal Diseases
- Laser-Matter Interactions and Applications
- Insect and Pesticide Research
- Insect Pest Control Strategies
- Diamond and Carbon-based Materials Research
Advanced Research Center for Nanolithography (Netherlands)
2020-2023
University of Groningen
2020-2023
Abstract Charge-state-resolved kinetic energy spectra of Sn ions ejected from a laser-produced plasma (LPP) have been measured at different densities the H 2 buffer gas surrounding micro-droplet LPP. In absence , energetic keV with charge states ranging 4+ to 8+ are measured. For used in experiments no appreciable stopping or loss is observed. However, electron capture by results rapid shift toward lower states. At highest pressure <?CDATA $6\times10^{-4}$?> <mml:math...
Absolute cross sections for single electron capture by ${\mathrm{Sn}}^{3+}$ colliding with ${\mathrm{H}}_{2}$ and ${\mathrm{D}}_{2}$ have been measured calculated in the energy range of 1--100 keV. The are determined measuring change ion beam current varying target density yields charged fragments means a time-of-flight spectrometer. results show good agreement our seven-state semiclassical calculations, while experimental increase more strongly than calculations toward lower energies. This...
We present experimental and simulation data on the oblique angle scattering of heavy Sn ions at 14 keV energy from a Mo surface. The simulations are performed with binary collision approximation codes TRIM, TRIDYN, TRI3DYN, SDTrimSP, IMSIL. Additional were in molecular dynamics framework LAMMPS. Our key finding is absence an expected peak spectrum backscattered associated pure single regime. In sharp contrast to this, however, all we applied do show prominent signature both angular scatter...
In the keV-energy regime, scattering of krypton ions off a copper sample has been studied. addition to broad energy spectrum arising from multiple-collision scattering, distributions backscattered exhibit prominent peaks at energies where single-collision (SC) are expected. Such SC were shown be absent in Sn – Mo/Ru systems similar mass ratio and thus kinetics. The present Kr on Cu results allow for comparison simulation package as SRIM. An important difference found between experiment...
Synopsis We report the absence of single-scattering peaks in collisions tin ions on Mo and Ru targets. For these systems standard simulation packages as e.g. SRIM predict prominent peaks. To identify potential cause peak missing, we changed charge state, energy, species projectiles, detected neutrals separately studied Kr Cu which has a similar mass ratio projectie target particles.
Synopsis Highly charged tin ions are the sources of extreme ultraviolet (EUV) light at 13.5-nm wavelength in laser-produced transient plasmas for next-generation nanolithography. Generating this EUV required power, reliability, and stability however presents a formidable task that combines industrial innovations with challenging scientific questions. We will present work on spectroscopy out YAG-laser-driven plasma surprising answer to key question: what makes light?