The transport, enrichment, and purification of nanoparticles are fundamental activities in the fields biology, chemistry, material science, medicine. Here, we demonstrate an approach for manipulating nanospecimens which a virtual channel with diameter that can be spontaneously self-adjusted from dozens to few micrometers based on concentration samples is formed by acoustic waves streams triggered stabilized gigahertz bulk resonator microfluidics, respectively. By combining specially designed...

This paper describes the detection and discrimination of volatile organic compounds (VOCs) using an e-nose system based on a multiparameter virtual sensor array (VSA), which consists single-chip temperature-compensated film bulk acoustic wave resonator (TC-FBAR) coated with 20-bilayer self-assembled poly(sodium 4-styrenesulfonate)/poly(diallyldimethylammonium chloride) thin films. The high-frequency microscale FBAR VSA was realized by temperature modulation, can greatly reduce cost...

We consider the probe absorption properties in a mechanically coupled optomechanical system which two nanomechanical oscillators are driven by time-dependent forces, respectively. It is found that mechanical interaction splits transparency window for usual single-mode into parts and then leads to appearance of double optomechanically induced transparency. The distance between positions (the frequency maximal transparency) determined amplitude. This can be explained using dressed-mode picture...

Abstract Cointegration and coupling a perfect metamaterial absorber (PMA) together with film bulk acoustic wave resonator (FBAR) in monolithic fashion is introduced for the purpose of producing ultracompact uncooled infrared sensors high sensitivity. An optimized ultrathin multilayer stack was implemented to realize proposed device. It experimentally demonstrated that resonance frequency FBAR can be used efficiently as sensor output it downshifts linearly intensity incident irradiation. The...

Electromagnetically induced transparency (EIT) and EIT-like effects have been investigated in a wide variety of coupled resonant systems. Here, classification the phase characteristics spectral responses is presented. Newly identified reveal unexplored operation regimes Taking advantage new regimes, one can obtain group delay, dispersion nonlinearity properties greatly enhanced by almost order magnitude, compared to traditionally constructed devices, which breaks fundamental limitation...

This letter introduces a micro-electromechanical system (MEMS) resonant pressure gauge based on aluminum nitride piezoelectric resonators that can operate in an atmospheric environment. The is measured terms of the change frequency double-ended tuning fork (DETF) resonator, where thin film serves as both layer and passive layer. resonator exhibits 719 kHz Q value 1764 air. To our knowledge, this surpasses those previously reported in-air MEMS DETF 100 range. electronic oscillator circuit for...

High-performance bulk acoustic wave (BAW) filters have been widely applied in the advanced radio frequency (RF) wireless communication systems past decade. However, demand for with large bandwidth, up to 10%, still puts a significant stress on typical aluminum nitride (AlN)-based BAW filters. In this work, modified lattice configuration is proposed achieve wideband filter response using AlN-based resonators. The single stage of novel topology comprises two auxiliary inductors paralleled...

This letter presents a piezoelectric tuning fork resonator vibrating in in-plane flexural mode with high quality factor (Q) and low motional impedance. A novel double-sided actuating design is implemented based on unimorph structure 2.5- <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> -thick AlN film as passive layer. The significantly improves the Q impedance...

Multi-mode mobile equipment requires efficient radio-frequency (RF) filtering solutions to solve interference problems in an UMTS system integrated with a television function. A RF solution comprising band-pass filter and band-stop based on temperature-stable bulk acoustic wave resonator (BAW) technology is proposed this letter. Both filters measurably demonstrate low insertion loss <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML"...

This paper demonstrates a novel micro-size (120 μm × 200 μm) piezoelectric gas sensor based on piezotransduced single-crystal silicon bulk acoustic resonator (PSBAR). The PSBARs operate at 102 MHz and possess high Q values (about 2000), ensuring the stability of measurement. A corresponding array is fabricated by integrating three different self-assembled monolayers (SAMs) modified PSBARs. limit detection (LOD) for ethanol vapor demonstrated to be as low 25 ppm with sensitivity about 1.5...

The heartbeat is one of the main human physiological activities and closely related to psychological states. Since limited solutions exist for convenient heart rate measurements at fingertip, such as photoplethysmography, this article provides an alternative solution enabled by a piezoelectric micromachined ultrasonic transducer (PMUT). With fingertip vascular expansion retraction, change in ultrasound time-of-flight (TOF) between PMUT phalanx used extract data. A with resonant frequency 4.3...

A compact RF dual-passband filter based on bulk acoustic wave (BAW) technology is designed and fabricated for wireless applications. Such a has promising uses in handheld devices where dual-standard systems would be used. The achieved by two band-pass BAW filters with shared input output ports. simple matching network used to provide high performance response little mutual degeneration. measured insertion loss around 2.0 dB typically both the lower upper passbands, rejections out of...

This paper demonstrates a novel electronic nose (e-nose) system for volatile organic compounds (VOCs) detections which is composed of three high-Q piezotransduced single-crystal silicon bulk acoustic resonators (PSBARs) and functionalized with different self-assembled monolayers (SAMs). The sensitivities the PSBARs to VOCs are utilized constitute unique identification codes IPA, ethanol, hexane heptane detections, successfully realizing discriminations VOCs. Besides, ethanol vapor...

Abstract This paper investigates the impact of base and anchor on quality factor ( Q ) piezoelectric microelectromechanical system (MEMS) tuning fork resonators vibrating in in-plane flexural mode, proposes a new strategy to improve significantly. Finite element method simulation measured results reveal that geometries have significant thermoelastic damping (TED) which dominates overall resonator factor. For first time, we accurately extract value related TED by cryogenic temperature...

This paper presents the design, fabrication, and characterization of cantilever-type resonators with a novel stacked structure. Aluminum nitride is adopted as material for both structural layer piezoelectric layer; this simplifies fabrication process improves quality factor resonator. Both in-plane out-of-plane flexural modes were investigated. The effect dimensions electrode patterns on resonator’s performance also studied. Finite-element simulations experiments examining anchor loss...

This paper proposes a modified lattice configuration of aluminum nitride (AlN) based bulk acoustic wave bandpass filter, which effectively broadens the pass band width without sacrificing insertion loss and out-of-band rejection. The novel topology comprises two auxiliary inductors paralleled in balanced input output conventional topology. performance filter is evaluated theoretically as well experimentally. It found that, multistage configuration, number decreases exponentially, enabling...

Acoustic methods based on lamb waves are expected to be a promising tool for the manipulation of bio-particles, by virtue miniaturization and low-power consumption wave resonators (LWRs). We utilize streaming effects induced acoustic propagating in fluid concentrate particles circular trajectory. However, multiple vortices which gather can generated normal L WR, reducing capture efficiency. In this device, WR was optimized into novel structure with reflection gratings one side, preventing...

Blau syndrome (BS) is a rare genetic immune disease which commonly presents in childhood. Currently, the miss-rate of BS diagnosis very high, and an effective clinical management has not been well established. This case report depicts 54-year-old male Chinese patient presenting with hand malformation, fever, skin rash joint pain. His was ultimately confirmed according to typical medical history analysis. will further help clinicians be aware this entity for correct proper treatment.

It is a longstanding issue that high-order width-extensional (WE) piezoelectric microelectromechanical system (MEMS) resonators suffer low quality factors (Q-factors). In this study, it observed the mode distortion occurs in each unit when couples with other to constitute WE-mode resonator, leading decreased Q-factor. Based on finding, we propose new Q-factor boost strategy by improving matching degree between adjacent units from view of dividing resonator into units. Both simulation and...

Microelectromechanical system (MEMS) cantilever resonators suffer from high motional impedance (Rm). This paper investigates the use of mechanically coupled multi-cantilever piezoelectric MEMS in resolution this issue. A double-sided actuating design, which utilizes a resonator with 2.5 μm thick AlN film as passive layer, is employed to reduce Rm. The results experimental and finite element analysis (FEA) show agreement regarding single- sextuple-cantilever resonators. Compared standalone...