A5071752083- Semiconductor materials and devices
- Silicon and Solar Cell Technologies
- Gas Sensing Nanomaterials and Sensors
- Silicon Nanostructures and Photoluminescence
- Advancements in Semiconductor Devices and Circuit Design
- Semiconductor materials and interfaces
- Integrated Circuits and Semiconductor Failure Analysis
- Advanced Sensor and Energy Harvesting Materials
- ZnO doping and properties
- Nanowire Synthesis and Applications
- Analytical Chemistry and Sensors
- Conducting polymers and applications
- Advanced Chemical Sensor Technologies
- Advanced MEMS and NEMS Technologies
- Acoustic Wave Resonator Technologies
- Electronic and Structural Properties of Oxides
- Thin-Film Transistor Technologies
- Transition Metal Oxide Nanomaterials
- Tactile and Sensory Interactions
- Advanced Surface Polishing Techniques
- Carbon and Quantum Dots Applications
- Muscle activation and electromyography studies
- Ion-surface interactions and analysis
- Innovative Energy Harvesting Technologies
- Anodic Oxide Films and Nanostructures
National Centre of Scientific Research "Demokritos"
2014-2024
Centre National de la Recherche Scientifique
1991
Aristotle University of Thessaloniki
1991
CEA Grenoble
1991
In this paper, we investigated the effect of humidity on paper substrates and propose a simple low-cost method for their passivation using ZnO nanoparticles. To end, built paper-based microdevices based an interdigitated electrode (IDE) configuration by means mask-less laser patterning commercial printing papers. Initial resistive measurements indicate that substrate with porous surface can be used as cost-effective, sensitive disposable sensor in 20% to 70% relative (RH) range. Successive...
This paper describes the fabrication and characterization of an original example a miniaturized resistive-type humidity sensor, printed on flexible substrate in large-scale manner. The process involves laser ablation for design interdigitated electrodes PET (Poly-Ethylene Terephthalate) screen-printing deposition sensitive material, which is based TiO₂ nanoparticles. was carefully optimized to obtain micro-scale well-resolved substrate. A functional paste cellulose prepared order allow...
Addressing the increasing development of IoT networks and associated energy requirements, rotating triboelectric nanogenerators (R-TENGs) are proving to be strong candidates in field harvesting, as well that self-powered devices autonomous sensors. In this work, we review theoretical framework surrounding operating principles key design parameters R-TENGs, while also associating them with their output characteristics. Furthermore, present an overview core designs used by research community...
Additive manufacturing, also known as 3D printing or digital fabrication technology, is emerging a fast-expanding technology for the of prototypes and products in variety applications. This mainly due to advantages including ease use reduced material quantities minimizing waste, low-cost mass production well energy efficiency. Polylactic acid (PLA) natural thermoplastic polyester that produced from renewable resources routinely used produce 3D-printed structures. One important feature makes...
We report measurement of the silicon diffusion coefficient in dioxide films using isotopically enriched Si28 layers that enable relatively low Si30 concentration measurements to be performed secondary ion mass spectrometry. Two types experiments are made. atoms introduced excess a stoichiometric pure layer either by implantation or predeposition technique. These representative any physical situation which into during processing. The estimated diffusivity values significantly higher than...
In this work we demonstrate germanium loss from uncapped substrates during low temperature drive-in annealing in inert ambient. An Arrhenius law with an activation energy of 2.03 eV describes the measured rate as a function temperature. Accurate simulations implanted phosphorous profiles nonpassivated have been performed considering extracted rate. A capping layer on surface reduces dose loss, Si3N4 being more efficient than SiO2. The material also affects extent dopant...
Smart food packaging (SP) is an innovative system that can extend the shelf life of product and reduce waste. The objective study estimation environmental economic sustainability overall cycle a SP including chemical sensor able to detect modifications in concentration CO2, which indicator spoilage, encapsulated oregano essential oil (OEO), capable inhibiting microbial growth. For this purpose, assessment (LCA), following ISO 14040 series ReCiPe methodology, evaluation SP, were performed....
Polylactic acid (PLA) is one of the most widely used materials for fused deposition modeling (FDM) 3D printing. It a biodegradable thermoplastic polyester, derived from natural resources such as corn starch or sugarcane, with low environmental impact and good mechanical properties. One important feature PLA that its properties can be modulated by inclusion nanofillers. In this work, we investigate influence SiC ZnO doping on triboelectric performance PLA-based tribogenerators. Our results...
The efficiency of Pd-doped porous silicon (PS) as a catalytic material for hydrogen sensing is studied. Pd deposited by an electroless process on the internal surface silicon. behavior PS samples estimated and parameters that influence kinetics chemical reaction are evaluated. activity examined through reaction, which occurs in low content mixtures with air (up to 1% v/v air), far below mixture flammability limit. It was found at 160/spl deg/C significantly higher than planar covered Pd....
The silicon wafer bonding technique of implanted with oxygen (SIMOX) wafers is used to investigate the interstitial reactions a thin thermal oxide layer formed on surface one before bonding. interstitials are generated by oxidation selectively thinned bonded samples that form insulator structure top SIMOX wafer. By monitoring length pregrown stacking faults we can calculate diffusivity transport vehicle in film for temperature range widely technology.
Isotopic exchange is used to measure the silicon self-diffusivity in thermal dioxide. The experiments, using an isotopically enriched Si28 oxide layer, are specially designed obtain actual equilibrium diffusivity oxide. A simple Arrhenius law, with activation energy of 5.34 eV, very nicely describes measured diffusivities as a function temperature. Our values compared literature data, and we discuss possible origin observed differences.
Carbon dot-based fluorescent nanocomposite compounds were obtained following microwave assisted thermal treatment of an aqueous mixture consisting citric acid and urea. Thin film deposition nanocomposites on SiO2 (100) substrates is followed by annealing, in order to render the films dissolution-resistant processable. Optical lithography O2 plasma etching are utilized pattern deposited desired shapes dimensions a solid-state relative humidity sensor fabricated substrate. Spectroscopy...
We describe a frontside Si micromachining process for the fabrication of suspended silicon oxide or nitride membranes thermal sensors. Membrane release is achieved by means lateral nearly isotropic dry etching bulk substrate, being optimized high rates and selectivity with respect to photoresist used protect device membrane material. Lateral etch order 6–7 μm min−1 have been in high-density F-based plasma, which permit reasonable time simultaneous formation cavity underneath ensuring...