Stepping motion principle has been widely applied for piezoelectric actuators. A stepping-motion actuator driven by a compliant mechanism is proposed in this paper. Two degrees of freedom exist the mechanism, which offer possibility multiple actuation modes including stick-slip mode, semi-inchworm and pseudo-ultrasonic mode. Actuation trajectories are planned according to geometric model proven efficient. The dynamic characteristics concerned its modal finite element analysis performed....

We present a new technique to produce liquid metal spheres with customized diameters using electromigration. The used is versatile material, which increasingly implemented in micromanipulation applications. theories of mass transport activated by electromigration are compared experimental results. knowledge gained from the theory optimize this method. Therefore, different tip designs at constant current used. measurement results presented characterize flow depending on certain density. These...

Micro- and nanosized objects aligned in specific spatial order are of great interest for applications photonics nanoelectronics. In particular, piezo-actuated robotic setups promising tools to arrange manipulate these individually. However, automated processing on the sub-micron scale remains challenging due force scaling laws limited possibilities terms control. This paper presents current progress fully-automated pick-and-place routines individual colloidal particles using a dedicated...

A fully automatic setup for on-wafer contact probing will be presented. This consists of six automatable nano positioning axes used as tool holder and a sample holder. With this one-port SOL calibration Vector Network Analyzer is done. Furthermore automated performed. Afterwards, the effects misalignment three tips GSG-probe are examined. Additionally error on calculated to determine its effect measurement. The results show, that probe has high impact measurement VNA. Hence presented in...

This paper presents a vision-based multi-target tracking method for automated on-wafer RF probing. First, visual servo control framework is introduced to automate the process of alignment Second, obtain accurate poses probes and pads needed during control, based on template matching proposed. Finally, experimental tests automatic are performed. The results demonstrate that proposed can accurately measure multiple targets even when overlapping occurs. Moreover, probe be successfully achieved...

The author reports on the concept and design of a hybrid microscope by embedding different microscopy systems in nanoautomation environment. A Scanning Microwave Microscope incorporated vacuum chamber Electron with Focused Ion Beam will be capable imaging topography, measuring electromagnetic properties at microwave frequencies manipulating "samples under test". By simultaneously detecting secondary electrons coming out probing area, observer get additionally live overview while Scattering...

A graphene-based transmission line with independent amplitude and phase variation capability is proposed. Variation of graphene's tunable conductivity by an applied DC bias exploited in designing attenuator a shifter. The shifter are separated from each other interdigitated capacitor to ensure control section through bias. designed optimizing lengths tapered open stub for maximum input reactance change graphene resistance. two pairs grounded vias connected the graphene. resistance controls...

Extracting simultaneously multimodal nanoscale specimen information, by an integrated microscopy technology, is in the focus of this report. The combination multiple imaging techniques allows for obtaining complementary and often unique datasets samples under test. An instrumental setup operating high-vacuum conditions inside chamber a scanning electron microscope (SEM), as platform fusing various methods, processes, illustrates potential such technology. atomic force based on compact...

A novel toolbox for hybrid nanoscale material characterization is presented. The system consists of a nanorobotic, compact and modular near-field scanning microwave microscope (NSMM) integrated into high resolution electron (SEM). instrument developed can perform characterizations by providing simultaneously atomic force, complex impedance microscopy images samples with nanometer spatial resolution. By combining the measured data, offers unprecedentable capabilities tackling issue between...

Combining Scanning Electron Microscopy (SEM) and Microwave is resulting in a hybrid microscope with multi-sensorial features. Parallelized measurements the micro- mm-wave region manipulation of nano-scaled objects will be possible. Nanorobotic positioning stages end-effectors inside vacuum chamber this are controlled by an open-source automation software framework which also obtained live data images Vector Network Analyzer (VNA) SEM.

This paper presents the design and implementation of a hardware/software controller system for combined atomic force microscopy (AFM) scanning microwave (SMM) measurements. The purpose is to connect control existing components (e. g. any AFM scanner vector network analyzer (VNA)), thus enhancing their functionality. Therefore, highly modular design. base board offers multiple slots with predefined piggy-back interface different I/O like digital-to-analog converters (DAC). Instead hardwiring...

Over the last decades, atomic force microscopy (AFM) became one of most important measuring instruments in various disciplines covering life science, biology, material semiconductor industries, and micro- nanotechnology. Conventional AFM scanning techniques are limited to a 2.5D image acquisition, resulting simple 2D high-map surface. Due ongoing miniaturization nanomanufacturing measurements on critical dimensions growing importance. Additionally, novel measurement tasks as determination...

The design, fabrication and experimental validation of a novel near-field scanning millimeter-wave microscope (NSMM) built inside electron (SEM) is presented. instrument developed can perform hybrid characterizations by providing simultaneously atomic force, complex microwave impedance microscopy images sample with nanometer spatial resolution. By combining the measured data, system offers unprecedentable capabilities for tackling issue between resolution high frequency quantitative measurements.

The RF probing is a common task in the semiconductor industry for electrical parameters. In this paper an FEM simulation will be presented to evaluate influences of probe misalignment on measurement results during on-wafer probing. main aspect investigation effects distorted measurements through imprecise positioned tips. virtual setup includes GSG and different calibration structures. reveals significant influence alignment shows unbalance resulting electric field.

Abstract In order to modify both chemical and electrical properties of graphene-based nanomaterials, we conducted the modification graphene oxide (GO) quantum dots (GQDs). The reaction reduction with nascent hydrogen was on materials. structure morphology produced chemically reduced GO GQDs were analyzed. While composition GQD changed significantly, showed also significant changes in as opposite where morphological not observed.

We report on a test standard for different microscopic techniques combined onto one substrate. The patterns of the are recognizable by image processing routines to provide robotic navigation inside Scanning Electron Microscopes. Here it can be used high-resolution and astigmatism testing. In center this is pattern three micro capacitance values. This enables high frequency calibration with Vector Network Analyzer (VNA), core element Microwave

Near-field scanning microwave microscopy (NSMM) is a probe (SPM) technique that measures the local interaction of evanescent microwaves with sample using sharp tip probe. The traceability in NSMM still challenging as distribution electrical fields affected by several parameters. In this effort, finite element method (FEM) based electromagnetic modeling methods are used to study effects wavelength operation and humidity on spatial resolutions respectively. From simulated data, it demonstrated...

Automated robot-based manipulation and characterization at the nanoscale constitutes a major challenge due to large special force uncertainties limited control options lack of adequate sensor feedback information. This paper is short introduction this new research field industrial robotics, highlighting advantages limits upcoming technology. It presents several examples from current industry-driven projects in our Division, which deal with fabrication, measurement, inside scanning electron...

The ongoing miniaturization in micro- and nanotechnology requires multi-physical characterization methods on the same small scale as materials components are. Although many characterizations systems exist, only few approaches allow to gather several different types of information collaboratively. Furthermore, functional building blocks devices working nanoscale, have be characterized tuned during manufacturing process. This can done with combined microscopic processing systems. A software...

Scanning Microwave Microscopy (SMM) is a tool with high potential to analyze and characterize nanomaterials. A disadvantage of this technique the scanning speed when using Vector Network Analyzer (VNA) compared other Probe methods that already have fast approaches. With paper we present method up SMM scan without changing components measurement setup. All done by software, proposed undersamples device under test calculates missing pixels afterwards different inpainting methods. This achieved...

Research studies in medicine, genetics and process monitoring technology generally go together with advances nano-engineering. Furthermore, engineering, control automation on the nano scale first enable so far impossible molecular cellular biology. This fruitful interaction leads to design development of new setups methods, which push boundaries for possible experiments area handling manipulation biomaterials. In our paper latest work two areas this research focus is shown. 1) Within last...

We are presenting an study of the calibration error related to in-situ procedure, that combines simulation and characterization, for quantitative measurement in scanning microwave microscopy (SMM). Following a description calibrated SMM is tested self-established load permitting report possible capacitance evaluation with signal noise ratio above 10 over several tens attofarad.