We present the results of an optical and chemical, depth surface study Al/Mo/SiC periodic multilayers, designed as high reflectivity coatings for extreme ultra-violet (EUV) range. In comparison to previously studied Al/SiC system, introduction Mo a third material in multilayer structure allows us decrease system with reflectance 37% at near normal incidence around 17 nm, interfacial roughness achieve EUV 53.4%, measured synchrotron radiation. This is first report higher than 50% nm....

Two kinds of Al/Zr (Al(1%wtSi)/Zr and Al(Pure)/Zr) multilayers for extreme ultraviolet (EUV) optics were deposited on fluorine doped tin oxide coated glass by using direct-current magnetron sputtering technology. The comparison the two systems shows that Al(1%wtSi)/Zr have lowest interfacial roughness highest reflectivity. Based X-ray diffraction, performance is determined crystallization Al layer. To fully understand multilayer, we built up a two-layer model to fit situation AFM images,...

Mg-based multilayers, including SiC/Mg, Co/Mg, B4C/Mg, and Si/Mg, are investigated for solar imaging a He II calibration lamp at 30.4 nm wavelength. These multilayers were fabricated by magnetron sputtering method characterized x-ray reflection. The reflectivities of these measured synchrotron radiation. Near-normal-incidence Co/Mg SiC/Mg multilayer mirrors as high 40.3% 44.6%, respectively, while those B4C/Mg Si/Mg too low application. results suggest that promising

We propose a new system, namely the periodic Co/Mg multilayer for optics applications in EUV range. Close to Mg L edge, i.e., around wavelength of 25 nm or photon energy 50 eV, reflectivity about 43% is measured at 45° s-polarized radiation. Moreover, it appears that this system stable over period time three months. The introduction thin boron carbide interfacial layers proves disastrous contrary simulations show could be beneficial. combine X-ray hard range, emission spectroscopy, and...

A four-element conical electron lens has been developed in view of its integration to a double toroidal energy analyzer (DTA) dedicated Auger electron–ion coincidence measurements. The design, using trajectory numerical simulations, was entirely guided by the perspective analyzing energetic electrons with high resolution multicoincidence regime. construction, and experimental characterization stages this optics system are described article. Emphasis is put on importance third generation...

We have studied the adsorption geometries of benzonitrile $({\mathrm{C}}_{6}{\mathrm{H}}_{5}\text{\ensuremath{-}}\mathrm{C}\mathrm{N})$ deposited on $\mathrm{Si}(001)\text{\ensuremath{-}}2\ifmmode\times\else\texttimes\fi{}1$ at 300 K, using synchrotron radiation x-ray photoemission spectroscopy and absorption spectroscopy. The experimental data are interpreted through density functional theory calculations ground excited states. It is shown that molecule chemisorbs under multiple forms....

The reflectivity of Al/Zr multilayers is enhanced by the use a novel structure. Al layers are divided insertion Si layers. In addition, barrier inserted at interfaces (Zr-on-Al and Al-on-Zr). As result, crystallization layer inhibited that Zr enhanced. grazing incidence x-ray reflectometry, diffraction, extreme ultraviolet measurements, exhibit lower interfacial roughness compared with traditional multilayer structures, their increased from 48.2% to 50.0% 5° angle incidence. These also have...

The first measurements of the angular distribution Auger electrons from fixed-in-space molecules have been performed in C $K$-shell ionization region $\mathrm{CO}$, for both parallel and perpendicular orientations molecular axis with respect to light polarization vector. distributions obtained ${\mathrm{CO}}^{2+}{B}^{1}\ensuremath{\Sigma}$ final state show dramatic spectral variations, which also depend on initial channels, $\ensuremath{\Sigma}$ or $\ensuremath{\Pi}$, photon energy. This...

Combining synchrotron radiation N $1s$ x-ray photoemission and absorption spectroscopy to density functional theory calculations of electron transition energies cross sections performed on silicon clusters, we have re-examined the issue acetonitrile adsorption single- two-domain $\mathrm{Si}(001)\text{\ensuremath{-}}2\ifmmode\times\else\texttimes\fi{}1$ surfaces, taking into consideration various models proposed in recent theoretical works. It is shown that at 300 K saturation coverage,...

We present the characterization of Mg-Co-Zr tri-layer stacks by using x-ray fluorescence induced standing waves, both in grazing incidence (GI) and exit (GE) modes. The introduction a slit direction detector improves angular resolution factor 2 significantly sensitivity technique for chemical buried interfaces. By observing intensity variations Mg Kalpha Co Lalpha characteristic emissions as function incident (GI mode) or detection (GE angle, we show that interfaces Si/[Mg/Co/Zr] x30...

Abstract Nanometer‐thick Al/SiC periodic multilayers, designed for the Extreme Ultra Violet (EUV) range, have been characterized by different techniques dedicated to such thin multilayers (each between 4 and 10 nm thick). In order decrease roughness improve optical performances of stacks, an ultrathin (2 nm) refractory metal layer has also introduced, thus making Al/W/SiC Al/Mo/SiC multilayer systems with three layers in period. The samples are deposited magnetron sputtering. stacks a period...

Zr/Mg multilayer mirror was proposed for extreme ultraviolet (EUV) spectral range and deposited by magnetron sputtering. Its thermal stability during annealing up to 600 °C evaluated EUV reflection measurements, x-ray analyses, transmission electron microscopy found superior that of Y2O3/Mg, SiC/Mg, Co/Mg. The reflectance as-deposited is 30.6% at wavelength 30.4 nm. slightly decreases with temperature when not above 500 eventually drops 15.1% °C. degradation performance attributed roughening...

The composition and structure properties of the CrOxNy films deposited by RF reactive magnetron sputtering were investigated correlated with their optical properties. Two kinds targets Cr2O3 CrN compounds variation N2 O2 gas flow used to prepare two series samples. phase structure, chemical characterised X-ray diffraction, photoelectron spectroscopy ultraviolet–visible near-infrared spectrophotometer, respectively. mainly consist Cr2N CrO3 phases. Cr/ON ratio derived XPS varies nitrogen...

A new experimental setup for measurement of the angular distributions energy selected Auger electrons emitted from fixed in space molecules is presented. The system based on two identical ion detectors with a small acceptance placed at 0° and 90° relative to polarization axis incident radiation, high luminosity double-toroidal electron analyzer combined position sensitive detection. This allows selection molecular alignment σ π ionization channels simultaneously provides an ejection angle...

The first indication of nondipole effects in the azimuthal dependence photoelectron angular distributions emitted from fixed-in-space molecules is demonstrated $\mathrm{N}{}_{2}$. Comparison results with observed for randomly oriented and theoretical derivations correction order photon momentum suggests that higher orders will be needed to describe measured molecular frame.

Using scanning tunnelling microscopy (STM), photoelectron and photoabsorption spectroscopies, we have examined how acrylonitrile $({\mathrm{H}}_{2}\mathrm{C}\mathrm{C}\mathrm{H}\text{\ensuremath{-}}\mathrm{C}\mathrm{N})$ reacts with the $\mathrm{Si}(001)\text{\ensuremath{-}}2\ifmmode\times\else\texttimes\fi{}1$ surface for coverages ranging from...

We present the characterization of Al/SiC periodic multilayers designed for optical applications. In some samples, a thin layer W or Mo is added at SiC-on-Al interfaces. use x-ray reflectivity (XRR) in order to determine parameters stacks, i.e. thickness and roughness all layers. have performed emission spectroscopy (XES) identify chemical state Al Si atoms within structure from an analysis shape Kβ bands. Finally, time flight secondary ion mass spectrometry (ToF-SIMS) used obtain depth...