Using surface micromachined samples, we demonstrate the accurate measurement of cantilever beam adhesion by using test structures which are adhered over long attachment lengths. We show that this configuration has a deep energy well, such fracture equilibrium is easily reached. When compared to commonly used method determining shortest attached beam, present much less sensitive variations in topography or details capillary drying.

▪ Abstract Polysilicon surface micromachining is advancing significantly and many new applications are moving beyond the prototyping phase. Recent technical successes leading to excitement concerning various uses of devices in optical, wireless, sensor, other areas. Incorporation state-of-the-art integrated circuit (IC) fabrication methods, such as planarization by chemical mechanical polishing (CMP), has enabled extension a five-level technology. This opened significant design space,...

Polymers are widely used in daily life, but exhibit low strength and thermal conductivity as compared to most structural materials. In this work, we develop crystalline polymer nanofibers that a superb combination of ultra-high (11 GPa) conductivity, exceeding any existing soft Specifically, demonstrate unique low-dimensionality phonon physics for transport the by measuring their broad temperature range from 20 320 K, where increases with increasing following an unusual ~T

Self-assembled monolayers (SAMs) are commonly produced by immersing substrates in organic solutions containing trichlorosilane coupling agents. Unfortunately, such deposition can also form alternate structures, including inverse micelles and lamellar phases. The formation of phases is one reason for the sensitivity SAM depositions to factors as water content solvent. If present, performance thin films used applications minimization friction stiction micromachines be seriously compromised....

This work demonstrates a polycrystalline silicon surface-micromachined inchworm actuator that exhibits high-performance characteristics such as large force (/spl plusmn/0.5 millinewtons), velocity range (0 to /spl plusmn/4.4 mm/sec), displacement plusmn/100 microns), small step size plusmn/10, plusmn/40 or nanometers), low power consumption (nanojoules per cycle), continuous bidirectional operation and relatively area (600 times/ 200/spl mu/m/sup 2/). An in situ load spring calibrated on...

We have developed a new process for applying hydrophobic, low adhesion energy coating to microelectromechanical (MEMS) devices. Monolayer films are synthesized from tridecafluoro-1,1,2,2- tetrahydrooctyltrichlorosilane (FOTS) and water vapor in low-pressure chemical deposition at room temperature. Film thickness is self-limiting by virtue of the inability precursors stick fluorocarbon surface film once it has formed. measured densities ∼3 molecules nm2 ∼1 nm. Films with contact angle...

By integrating interferometric deflection data from electrostatically actuated microcantilevers with a numerical finite difference model, we have developed step-by-step procedure to determine values of Young's modulus while simultaneously quantifying nonidealities. The central concept in the methodology is that nonidealities affect long-range deflections beams, which can be determined near nanometer accuracy. Beam take-off angle, curvature and support post compliance are systematically...

Objective To describe the development and validation of a scale for assessing openness to discuss cancer in family. Method: Two studies were conducted. Study 1 was cross-sectional study designed test factor structure scale. Four hundred ninety-eight patients with either breast or Hodgkin's disease interviewed. In 2, longitudinal study, 133 head neck tested at four points time: just before treatment, 6 weeks, 13 52 weeks after treatment. 2 aimed confirm established 1, construct validity new...

One of the most important issues facing continued development and application microelectromechanical systems (MEMS) is that adhesion friction between microstructures intended to transfer force. In this work, we develop modeling approaches for studying (i.e., stiction) using observed shape microcantilevers under electrostatic loading. Analytical models an idealized configuration are presented first. The solutions reveal regimes over which cantilever deflections sensitive versus applied Also,...

We designed, fabricated and measured the performance of nanoelectromechanical (NEMS) switches. Initial data are reported with one switch designs having a switching time 400 ns an operating voltage 5 V. The switches operated laterally unmeasurable leakage current in 'off' state. Surface micromachining techniques were used to fabricate All processing was CMOS compatible. A single metal layer, defined by mask step, as mechanical layer. details modeling, fabrication testing NEMS reported.

Abstract Objective To investigate the safety, tolerability, pharmacokinetics, and efficacy of apilimod mesylate, an oral interleukin‐12 (IL‐12)/IL‐23 inhibitor, in patients with rheumatoid arthritis (RA). Methods We performed a phase IIa, randomized, double‐blind, placebo‐controlled proof‐of‐concept study apilimod, combination methotrexate, 29 active RA (3:1 ratio apilimod‐treated to placebo‐treated patients) 3 stages. Patients received 100 mg/day or placebo for 4 weeks (stage 1) 8 2). In...

Capillary condensation of water can have a significant effect on rough surface adhesion. To explore this phenomenon between micromachined surfaces, the authors perform microcantilever experiments as function roughness and relative humidity (RH). Below threshold RH, adhesion is mainly due to van der Waals forces across extensive noncontacting areas. Above jumps capillary increases towards upper limit Γ=144mJ∕m2. A detailed model based measured topography qualitatively agrees with experimental...

Designing reliable MEMS structures presents numerous challenges. Polycrystalline silicon fractures in a brittle manner with considerable variability measured strength. Furthermore, it is not clear how to use tensile strength data predict the of complex structure. To address such issues, two recently developed high-throughput test techniques have been used estimate distribution tails by testing approximately 1500 bars. There strong evidence that micromachined polycrystalline was tested this...

An etch parameter study is conducted with the objective of achieving high anisotropy for tantalum thin films more than 1 μm in thickness. The gases explored are Ar, CF4 and O2. effects composition, flow, pressure, power investigated. Optical emission spectroscopy used to interpret results. While addition oxygen adversely affects anisotropy, it improved lower pressure. As increases, rate increases but there no enhancement anisotropy. -phase Ta exhibits a similar dependence on parameters as...

Metal amorphous nanocomposite (MANC) soft magnetic materials exhibit remarkably low iron loss and high saturation magnetization. However, they have not been widely used in electric motors largely due to a lack of demonstrated manufacturing processing methods an absence proven motor designs well suited for their use. Recent developments these two areas prompted the optimization study flux-switching with permanent magnet topology using MANCs presented here. This uses population-based...

Transition metal phosphides (TMPs) have aroused widespread research interest in the past decade due to their excellent electrical and mechanical properties. Nonetheless, application micro- nanoelectromechanical systems (MEMS NEMS) has not been investigated. Here, we use density functional theory (DFT) explore potential of four transition-metal act as contact materials MEMS/NEMS switches. Specifically, first investigate thermodynamic stability Ru2P, RuP, Rh2P, TiP under an oxygen environment....