- Advanced MEMS and NEMS Technologies
- Mechanical and Optical Resonators
- Force Microscopy Techniques and Applications
- Photonic and Optical Devices
- Microfluidic and Capillary Electrophoresis Applications
- Microfluidic and Bio-sensing Technologies
- Electrowetting and Microfluidic Technologies
- Nanofabrication and Lithography Techniques
- Advanced Sensor and Energy Harvesting Materials
- Adhesion, Friction, and Surface Interactions
- Advanced Surface Polishing Techniques
- Modular Robots and Swarm Intelligence
- Nanowire Synthesis and Applications
- Semiconductor Lasers and Optical Devices
- Acoustic Wave Resonator Technologies
- Micro and Nano Robotics
- Microtubule and mitosis dynamics
- Advanced Materials and Mechanics
- Physics of Superconductivity and Magnetism
- Innovative Energy Harvesting Technologies
- Molecular Junctions and Nanostructures
- Advanced biosensing and bioanalysis techniques
- Nanopore and Nanochannel Transport Studies
- Semiconductor materials and devices
- Neuroscience and Neural Engineering
Saiseikai Ibaraki Hospital
2025
Laboratory for Integrated Micro-Mechatronic Systems
2007-2024
Tokyo University of Science
2007-2024
Canon Medical Systems Corporation (Japan)
2020-2024
Canon (Japan)
2020-2024
The University of Tokyo
2013-2022
Canon (United States)
2022
Tokyo City University
2019-2022
Hitachi (Japan)
1990-2021
Yamato University
2020
Optically manipulating superconductors In superconductors, electrons of opposite momenta pair to form a highly correlated state that manages flow without encountering any resistance. Matsunaga et al. manipulated the wavefunction these pairs in superconductor NbN with an electromagnetic pulse they transmitted through thin layer material (see Perspective by Pashkin and Leitenstorfer). The superconducting gap, which is energy needed break apart, oscillated at twice frequency pulse's electric...
We have developed a new type of compact optical switch using silicon micromachining technique. Torsion mirrors (300 /spl mu/m/spl times/600 mu/m) supported by thin polysilicon beams (16 mu/m wide, 320 long, and 0.4 thick) are arranged in 2/spl times/2 matrix (total size 3 mm/spl times/5 mm, t 0.3 mm). The independently attracted electrostatic force applied bias voltage to redirect the incident light free space. Using collimated beam fibers for coupling, we obtained small insertion loss (/spl...
This paper presents an innovative high-frequency- based biosensor, which combines both microwave detection and microfluidic network for time-efficient accurate biological analysis. It is composed of a coplanar waveguide with channel placed on top. With the help appropriate de-embedding technique modeling measurements, relative effective permittivity human umbilical vein endothelial cells has been evaluated successfully. Furthermore, experiments have performed sensor various cell...
Abstract Many kinds of bioactive peptides which might prevent lifestyle‐related diseases are released from food proteins after enzymatic digestion. Inhibitory for angiotensin I‐converting enzyme (ACE) having anti‐hypertensive effect have been isolated digests various proteins. LKPNM, was the thermolysin digest dried bonito activated 8‐fold by ACE itself and showed a prolonged oral administration. Two vasorelaxing peptides, ovokinin ovokinin(2–7), showing antihypertensive administration were...
Abstract Monodisperse emulsions are of great significance in both scientific and industrial fields, since they have advantages such as their better stability simplified physical properties. A novel micromachined emulsification device has been developed for monodisperse emulsion droplets. It uniformly sized through‐holes, called straightthrough microchannel (MC), on a silicon microchip. An oblong MC successfully yielded oil‐in‐water (O/W) droplets with an average droplet diameter 32.5 μm...
In order to extract macroscopic mechanical work out of microelectromechanical systems, we have proposed the concept distributed micromotion systems (DMMS). The key idea DMMS is coordinate simple motions many microactuators in perform a task. Design, fabrication, and operation type DMMS, called ciliary motion system, are presented. A bimorph thermal actuator using two types polyimides with different expansion coefficients metallic microheater between them was fabricated. cantilever-shaped...
A 3D flexible multichannel microprobe array was designed, fabricated and tested. Since each probe had several recording pads, the could be used to measure neural activity at various depths in brain. They were batch with interconnections, using a specific folding process fold planar structures. This inserted into rat's brain without fracturing successfully signals.
In this paper, the fabrication and characterization of PDMS 2D-optical lenses are reported. These designed in order to improve performance fluorescent spectroscopy detection performed on a portable chip using optical fibers. The process layer is first detailed, patterns then checked with SEM. By comparing various interfacial structures, it shown that beam properties light coming out from fiber can be modified depending lens curvature radius. As consequence, for constant dye concentration,...
The self-assembling of three-dimensional (3-D) MEMS from polysilicon surface micromachined part is very attractive. To avoid risky external manipulation, the practical use integrated actuator to perform assembling task required. that goal, this paper presents detailed characteristics electrostatic scratch drive (SDA). First, numerous SDA tests, it shown able produce a threshold force 30 /spl mu/N, with yield above 60%. With devices consisting mechanically linked buckling beam, horizontal 63...
A microactuator array for a planar conveyance system on plane has been designed and fabricated by micro-machining. Though typical accomplishes only simple motion, the coordination of motions makes it possible to perform more complicated task. Therefore, we propose composed distributed microactuators. An object is levitated carried controlled air flow from many microactuators in system. We fluidic which two on-off nozzles an these SOI (Silicon On Insulator) substrate. The dimension each...
ADVERTISEMENT RETURN TO ISSUEPREVArticleNEXTExcluded-Volume Effects in Dilute Polymer Solutions. 7. Very High Molecular Weight Polystyrene Benzene and CyclohexaneY. Miyaki, Y. Einaga, H. FujitaCite this: Macromolecules 1978, 11, 6, 1180–1186Publication Date (Print):November 1, 1978Publication History Published online1 May 2002Published inissue 1 November 1978https://pubs.acs.org/doi/10.1021/ma60066a022https://doi.org/10.1021/ma60066a022research-articleACS PublicationsRequest reuse...
Making submicron interelectrode gaps is the key to reducing driving voltage of a micro comb-drive electrostatic actuator. Two new fabrication technologies, oxidation machining and post-release positioning method, are proposed realize gaps. types actuator (a resonant type nonresonant type) with were successfully fabricated their operational characteristics tested experimentally. The drive was found be lower than that existing actuators. stability actuators discussed.< <ETX...
We present a micromechanical device designed to be used as non-volatile mechanical memory. The structure is composed of suspended slender nanowire (width: 100 nm, thickness: 430 length: 8 30 µm) clamped at both ends. Electrodes are placed on each side the (1) actuate during data writing and erasing mode (2) determine its position by measuring capacitive bridge in reading mode. patterned electron beam lithography pre-stressed thermally grown silicon dioxide layer. When later released plasma...
Controlling electric and magnetic properties of matter by laser beams is actively explored in the broad region condensed physics, including spintronics magneto-optics. Here we theoretically propose an application optical electron vortex carrying intrinsic orbital angular momentum to chiral ferro- antiferro- magnets. We analyze time evolution spins magnets under irradiation beams, using stochastic Landau-Lifshitz-Gilbert equation. show that beam-driven nonuniform temperature lead a class...
We demonstrate a reconfigurable metamaterial developed by surface micromachining technique on low loss quartz substrate for tunable terahertz filter application. The device implements RF-MEMS (radio frequency - micro electro mechanical systems) capacitor within split-ring resonator (SRR). Time-domain spectroscopy confirms that the tunability of SRR resonance and thus transmittance are electrostatically controlled capacitor. Due to high transparency used as substrate, exhibits contrast...
A pure quantum state can fully describe thermal equilibrium as long one focuses on local observables. The thermodynamic entropy also be recovered the entanglement of small subsystems. When size subsystem increases, however, correlations break correspondence and mandate a correction to this simple volume law. elucidation dependence is thus essentially important in linking physics with thermodynamics. Here we derive an analytic formula for class states called cTPQ representing equilibrium. We...
We report the design, fabrication, and successful demonstration of microelectromechanical variable optical attenuator (VOA) using an electrostatic microtorsion mirror (0.6 mm in diameter) combined with a fiber-optic collimator. The VOA operates at low voltages (dc 5 V or less) for large attenuation (40 dB, corresponding to angle 0.3/spl deg/) fast response time (5 ms faster). made bulk-micromachined silicon-on-insulator wafer has been designed be shock resistant up 500 G without any...
Research and development in microelectromechanical systems (MEMS) have made remarkable progress since 1988, when an electrostatic micromotor the size of a human hair was first operated successfully. Since then, many types microactuators utilizing various driving forces mechanisms been developed. Distinctive features MEMS (miniaturization, multiplicity components, integration microelectronics) led to promising application areas such as fluidic microsystems. In future, promises make...