A5076338438- Photonic and Optical Devices
- Advanced MEMS and NEMS Technologies
- Mechanical and Optical Resonators
- Semiconductor Lasers and Optical Devices
- Photonic Crystals and Applications
- Optical Coatings and Gratings
- Optical Coherence Tomography Applications
- Force Microscopy Techniques and Applications
- Semiconductor materials and devices
- Nanowire Synthesis and Applications
- Advanced Surface Polishing Techniques
- Acoustic Wave Resonator Technologies
- Advanced Fiber Optic Sensors
- Analytical Chemistry and Sensors
- 3D IC and TSV technologies
- Photoacoustic and Ultrasonic Imaging
- Silicon Nanostructures and Photoluminescence
- Advanced Fluorescence Microscopy Techniques
- Gas Sensing Nanomaterials and Sensors
- Advanced Fiber Laser Technologies
- Adhesion, Friction, and Surface Interactions
- Microfluidic and Bio-sensing Technologies
- GaN-based semiconductor devices and materials
- Advancements in Semiconductor Devices and Circuit Design
- Electron and X-Ray Spectroscopy Techniques
Delft University of Technology
2012-2022
Istituto Nazionale di Fisica Nucleare, Trento Institute for Fundamental Physics And Applications
2015
Istituto Nazionale di Fisica Nucleare
2015
Utrecht University
2008
University of Twente
1999-2002
AM Technology (United Kingdom)
2000
Centre National de la Recherche Scientifique
1997-1999
Université Jean Monnet
1999
Laboratoire Traitement du Signal et de l'Image
1996
Nanopores—nanosized holes that can transport ions and molecules—are very promising devices for genomic screening, in particular DNA sequencing. Solid-state nanopores currently suffer from the drawback, however, channel constituting pore is long, ∼100 times distance between two bases a molecule (0.5 nm single-stranded DNA). This paper provides proof of concept it possible to realize use ultrathin fabricated graphene monolayers single-molecule translocation. The pores are obtained by placing...
In order to harvest the many promising properties of graphene in (electronic) applications, a technique is required cut, shape or sculpt material on nanoscale without damage its atomic structure, as this drastically influences electronic nanostructure. Here, we reveal temperature-dependent self-repair mechanism allowing damage-free atomic-scale sculpting using focused electron beam. We demonstrate that by at temperatures above 600 {\deg}C, an intrinsic keeps single-crystalline during...
Through the mechanism of "oriented attachment", small nanocrystals can fuse into a wide variety one- and two-dimensional nanostructures. This fusion phenomenon is investigated in detail by low-temperature annealing array 10 nm-sized PbSe nanocrystals, situ transmission electron microscope. We have revealed complex chain processes; after coalescence, connected undergo consecutive rotations three-dimensional space, followed drastic interfacial relaxations whereby full obtained.
A newly developed SiN microhotplate allows specimens to be studied at temperatures up 1000 K a resolution of 100 picometer. Aberration-corrected transmission electron microscopy has become commonplace tool investigate stable crystals; however, imaging transient nanocrystals is much more demanding. Morphological transformations in gold nanoparticles and layer-by-layer sublimation PbSe imaged with atomic resolution.
We realize a phase-sensitive closed-loop control scheme to engineer the fluctuations of pump field which drives an optomechanical system and show that corresponding cooling dynamics can be significantly improved. In particular, operating in counterintuitive "antisquashing" regime positive feedback increased fluctuations, sideband nanomechanical membrane within optical cavity improved by 7.5 dB with respect case without feedback. Close quantum reduced thermal noise, such feedback-controlled...
A vibrating membrane with discontinuities in the form of through holes is utilised to achieve millisecond mixing.
We report the experimental observation of two-mode squeezing in oscillation quadratures a thermal micro-oscillator. This effect is obtained by parametric modulation optical spring cavity optomechanical system. In addition to stationary variance measurements, we describe dynamic behavior regime pulsed excitation, showing an enhanced surpassing 3 dB limit. While present experiment classical regime, our technique can be exploited produce entangled, macroscopic quantum modes.
Normal--mode splitting is the most evident signature of strong coupling between two interacting subsystems. It occurs when subsystems exchange energy themselves faster than they dissipate it to environment. Here we experimentally show that a weakly coupled optomechanical system at room temperature can manifest normal--mode pump field fluctuations are anti-squashed by phase-sensitive feedback loop operating close its instability threshold. Under these conditions optical cavity exhibits an...
TiO2 is an interesting and promising material for micro-/nanoelectromechanical systems (MEMS/NEMS). For high performance reliable MEMS/NEMS, optimization of the optical characteristics, mechanical stress, especially surface smoothness required. To overcome roughness issue films due to crystallization during deposition at temperatures (above 250 °C), low temperature (80–120 °C) atomic layer (ALD) investigated. By lowering temperature, significantly decreases from 3.64 nm 300 °C deposited...
In view of the integration membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiNx membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress were fabricated used as optomechanical in Michelson interferometer, where Q values up to 1.3 × 106 measured at cryogenic temperatures, Fabry-Pérot cavity, an optical finesse 50000 has been observed.
New methodologies in anisotropic wet-chemical etching of <111>-oriented silicon, allowing useful process designs combined with smart mask-to-crystal-orientation-alignment are presented this paper. The described methods yield smooth surfaces as well high-quality plan-parallel beams and membranes. With a combination pre-etching wall passivation, structures can be etched at different depths wafer. Designs, using the <111>-crystal orientation, supplemented pictures fabricated devices,...
Transmission electron microscopy (TEM) of (de-)hydrogenation reactions is crucial to characterize efficiency hydrogen storage materials. The nanoreactor, a micromachined channel with 15-nm-thick windows, effectively confines the gas flow an electron-transparent chamber during TEM reactions. Realistic experiments require very high pressures be sustained by device. Nanomechanical bulge tests and simulations show that due strong size effect, ultra-thin device components can reliably withstand...
This article presents electrically-based sensors made of high quality silicon nanowire field effect transistors (SiNW-FETs) for sensitive detection vascular endothelial growth factor (VEGF) molecules. SiNW-FET devices, fabricated through an IC/CMOS compatible top-down approach, are covalently functionalized with VEGF monoclonal antibodies in order to sense VEGF. Increasing concentrations the femto molar range determine increasing conductance values as proof occurring immuno-reactions at (NW)...
The sensitive analysis of proteins is central to disease diagnosis. detection and investigation angiogenic inflammatory ligands in the tumor tissue can further improve level knowledge cancer by capturing heterogeneity complexity microenvironment. In previous works, we demonstrated that high-quality silicon nanowire field-effect transistors (SiNW-FETs) be used sense very low concentration (fM) pathogenic factors controlled phosphate buffered saline. this paper, show SiNW-FETs as biosensors...
Sensing and stimulating microstructures are necessary to develop more specialized highly accurate Organ-on-Chip (OOC) platforms. In this paper, we present the integration of a conductive polymer, poly (3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS), on stretchable membrane, core element an Heart-on-Chip. The electrical conductivity along with its biocompatibility, high transparency (≈88%) mechanical elasticity (≈1.2 GPa) make material candidate novel for monitoring stimulation...
We present a new MEMS nanoreactor fully integrated on single die. It enables atomic-scale imaging of nanostructured materials under the high pressures and temperatures that are typical for many industrial applications (14 bar 660°C). The reactor can therefore be used to study behavior e.g. catalysts in transmission electron microscope (TEM). has shallow channel (0.5 μm), which is made with surface micromachining techniques contains pillars prevent bulging. Integrated very thin windows (15...
In the context of a recoil damping analysis, we have designed and produced membrane resonator equipped with specific on-chip structure working as "loss shield" for circular membrane. this device vibrations membrane, quality factor $10^7$, reach limit set by intrinsic dissipation in silicon nitride, all modes regardless modal shape, also at low frequency. Guided our theoretical model loss shield, describe design rationale device, which can be used effective replacement commercial resonators...
In this paper, we propose a novel vertical SU-8 waveguide for evanescent analyte sensing. The is designed to possess and narrow structure generate waves on both sides of the waveguide's surface, aimed at increasing sensitivity by enlarging sensing areas. We performed simulations monitor influence different parameters performance, including its height width. E-beam lithography was used fabricate structure, as one-step direct writing process enables easy, fast, high-resolution fabrication....