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Piezoelectric properties of the c-axis oriented Pb(Zr,Ti)O3 (PZT) thin films were investigated. The PZT with a composition near morphotropic phase boundary epitaxially grown on (100)Pt-coated MgO substrates by rf-magnetron sputtering. exhibited excellent ferroelectricity remanent polarization more than 50 μC/cm2. In order to examine intrinsic piezoelectric properties, cantilever structures microfabricated films. coefficient d31 films, which not subjected poling treatments, was measured...

In recent years, piezoelectric microelectromechanical systems (MEMS) have attracted attention as next-generation functional microdevices. Typical applications of MEMS are micropumps for inkjet heads or micro-gyrosensors, which composed Pb(Zr,Ti)O3 (PZT) thin films and already been commercialized. addition, vibration energy harvesters (PVEHs), regarded one the key devices Internet Things (IoT)-related technologies, promising future MEMS. Significant features their simple structure high...

Artificial superlattices consisting of antiferroelectric PbZrO3 (PZO) and ferroelectric PbTiO3 (PTO) have been fabricated by a multi-ion-beam sputtering technique. The epitaxial PZO PTO layers were sequentially grown on (100)Pt/MgO substrates at low substrate temperature 415 °C with periodicity from 5 to 100 perovskite unit cells. X-ray diffraction studies revealed the superlattice structures a-axis oriented layers. dielectric properties films enhanced increasing periodicity.

High-piezoelectricity lead-free films of (K,Na)NbO3 (KNN) were successfully deposited on Pt/MgO and Pt/Ti/SiO2/Si substrates by RF magnetron sputtering. The KNN film was epitaxially grown with a high <001> orientation in the pseudo-cubic perovskite structure. polycrystalline preferential piezoelectric properties determined from tip displacement KNN/Pt/MgO or KNN/Pt/Ti/SiO2/Si unimorph cantilevers. transverse coefficients e31* (d31/s11E) calculated to be -3.6 -5.5 C/m2, respectively, which...

We evaluated the effective transverse piezoelectric coefficients (e31,f) of Pb(Zr,Ti)O3 (PZT) thin films from both direct and converse effects unimorph cantilevers. (001) preferentially oriented polycrystalline PZT (001)/(100) epitaxial were deposited on (111)Pt/Ti/Si (001)Pt/MgO substrates, respectively, by rf-magnetron sputtering, their responses owing to intrinsic extrinsic examined. The |e31,f| values calculated as 6.4 11.5–15.0 C/m2, whereas those 3.4 4.6–4.8 respectively. large...

The wafer flexure technique was used to characterize the d31 coefficient of a number sol–gel and radio frequency (rf) sputtered lead zirconate titanate (PZT) thin films with thicknesses between 0.6 3 μm. Typical values for well-poled 52/48 were found be −50 −60 pC/N. rf possessed large as-deposited polarizations which produced coefficients on order −70 pC/N in some unpoled films. subsequent poling material, direction parallel preferred increased about −85 aging behavior also investigated....

This paper presents a polymer-based micropump addressing the cost, performance, and system compatibility issues that have limited integration of on-chip micropumps into microanalysis systems. pump uses dielectric elastomer actuation to periodically displace fluid, pair elastomeric check valves rectify fluid's resulting movement. Its significant features include use transparent substrate, self-priming capability, insensitivity gas bubbles, ability admit particles. A occupying less than 10 mm2...

High-quality (K,Na)NbO 3 thin films were successfully deposited on a (100) SrTiO (STO) substrate by pulsed laser deposition. High-density KNbO (KN), (K 0.5 Na )NbO (KNN) and NaNbO (NN) ceramic targets prepared spark plasma sintering (SPS). The crystallographic analyses of the film performed conventional X-ray diffraction (XRD) analysis rocking curve measurement. XRD reciprocal space map was also measured to determine lattice constants analyze relationship between grown STO substrate....

<para xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> In this paper, we report a piezoelectric deformable mirror composed of thin films for low-voltage adaptive optics (AO). A 2-<formula formulatype="inline"><tex>$\mu$</tex></formula>m-thick Pb(Zr,Ti)O<formula formulatype="inline"><tex>$_{3}$</tex></formula> (PZT) film was deposited on Pt-coated silicon-on-insulator (SOI) substrate, and diaphragm structure 15 mm in diameter fabricated by etching Si...

Ferroelectric PZT-based perovskite thin films are widely studied for fabrication of compact piezoelectric energy harvesting (EH) power microelectromechanical systems (MEMS) due to their large coefficients. Output the EH MEMS is chiefly governed by conversion rate, κ <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> and/or (e /ε), where e and ε denote coefficient dielectric constant. The values /ε) considered as figures merit (FOM) MEMS. At...

Crystallographic structure of as-grown epitaxial Pb(Zr,Ti)O3 (PZT) films was investigated with regard to the Zr/Ti ratio and crystalline orientation. PZT (001) (111) orientation were epitaxially grown on (100) (111)SrTiO3 substrates respectively using radio-frequency (rf) sputtering. Four circle x-ray diffraction measurements revealed that crystallographic dependence composition in much different from bulk PZT. In particular, (001)-oriented showed tetragonal even 70/30 where ceramics are...

We fabricated piezoelectric MEMS energy harvesters (EHs) of lead-free (K,Na)NbO 3 (KNN) thin films on microfabricated stainless steel cantilevers. The use metal substrates makes it possible to fabricate cantilevers owing a large fracture toughness compared with Si substrates. KNN were directly deposited onto Pt-coated by rf-magnetron sputtering, thereby simplifying the fabrication process EHs. From XRD measurement, we confirmed that had perovskite structure preferential (001) orientation....

The field of microfluidics has drastically contributed to downscale the size benchtop experiments dimensions a chip without compromising results. However, further miniaturization and ability directly manipulate individual molecules require platform that permits organized molecular transport. motor proteins microtubules carry out orderly intracellular transport are ideal for driving in vitro nanotransport. Here, we demonstrate reconstruction cellular kinesin/dynein-microtubule system...

Recently, piezoelectric MEMS have been intensively investigated to create new functional microdevices, and some of them already commercialized such as gyrosensors or miropumps inkjet printer head. Piezoelectric energy harvesting is considered be one the promising future applications MEMS. In this report, we introduce deposition PZT thin films well lead-free KNN films. We fabricated harvesters deposited on stainless steel cantilevers compared their power generation performance.

Abstract We report on the correlated investigation between macroscopic piezoelectric properties and microscopic deformation of crystal structures both epitaxial polycrystalline Pb(Zr,Ti)O 3 (PZT) thin films grown MgO Si substrates, respectively. observed reversible elongation contraction lattice parameter under an applied electric field using synchrotron X-ray diffraction. The effective coefficients were estimated from relationship field-induced strain, compared with those characterized by...