Abstract Precise measurement of variations in the local gravitational acceleration is valuable for natural hazard forecasting, prospecting, and geophysical studies. Common issues present gravimetry technologies include their high cost, mass, large volume, which can potentially be solved by micro-electromechanical-system (MEMS) technology. However, reported MEMS gravimeter does not have a sensitivity dynamic range comparable with those commercial gravimeters, lowering its practicability...

Abstract Phototropism and self‐oscillation are both self‐regulating intelligent movements of biological organisms. However, realizing these in one same artificial actuation system remains a great challenge. Here, by introducing dynamic light‐mechanical interaction, MXene‐based actuator is designed fabricated that can generate unique self‐adaptive light‐driven from the equilibrium state phototropic deformation to self‐oscillation. The autonomously track incident light, showing sunflower‐like...

High-precision microelectromechanical inertial sensors based on spring-mass structures are of great interests for a wide range applications, including navigation, disaster warning and resource exploration. Lowering the resonant frequency is essential to further improve sensitivity sensors. However, conventional approaches facing insurmountable difficulties from size reduction machining precision. This paper proposed novel quasi-zero-stiffness mechanism that compatible with MEMS technologies...

Based on experiments of both transport and paramagnetic resonance for (La1−xYx)2/3Ca1/3MnO3, the ground state above Tc possible origins insulator–metal transition colossal magnetoresistance near are discussed. Modeling system as a network junctions, each consisting region sandwiched between two ferromagnetic domains, phenomenological expression is proposed resistance function temperature magnetic field. We show that observed magnetotransport phenomena can be quantitatively explained by...

Gravity gradient measurement makes use of the difference between outputs pairs linear accelerometers, which results in cancelling out common mode accelerations caused by mounting platform and external environment. One key technologies is to match acceleration-to-voltage or acceleration-to-current transfer functions accelerometers an extremely high degree accuracy. The differential signals then make gravity gradients observable. By using two quartz-flexure with a capacitive sensing...

The reduction of temperature effect is vitally important for high precision sensors. This paper introduces the theoretical analysis and experimental verification an in-situ compensation method on coefficient scale factor a single-axis electromagnetic force-balance feedback MEMS accelerometer. A micro thermistor, fabricated together with accelerometer, integrated to sense variation thermistor connected voltage-to-current resistance in series, which compensates accelerometer that influenced by...

High precision accelerometers play a vital role in the measurement of Earth’s gravitational field. They can be used rotating-accelerometer-based gravity gradient instrument (GGI) to detect change gradient. For that application, high should have noise floor below 1 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\text{n}{g}/ (Hz)^{1/2}$ </tex-math></inline-formula> , and both range with dozens...

Most spaceborne scientific experiment applications require a microgravity environment. The current high-precision accelerometers used for the vibration isolation system generally have noise floor of sub-μg/√Hz, which cannot meet demand higher-level measurements. This article introduces micro-electromechanical (MEMS) acceleration sensor that has 2–5 ng/√Hz and an input range more than ±2 mg. Its three-component version, MEMS measurement module (MEMS-M3), is designed to measure accelerations...

Rotating accelerometer gravity gradiometer (RAGG) is the only gradient measuring device in world to achieve commercial applications. When parameter consistency among multiple accelerometers of RAGG not sufficient, its combined output cannot effectively suppress common-mode noise environment. A method for suppressing RAGG’s linear and angular motion presented this article by projecting parameters, including scale factor, misalignment angle, second-order terms, cross-coupling onto Cartesian...

Nowadays, deep learning models are widely adopted in web-scale applications such as recommender systems, and online advertising. In these applications, embedding of categorical features is crucial to the success models. models, a standard method that each feature value assigned unique vector which can be learned optimized. Although this well capture characteristics promise good performance, it incur huge memory cost store table, especially for those applications. Such significantly holds...

This paper reports a newly developed chip-level micro-electromechanical system (MEMS) accelerometer for tilt sensing based on differential array area-change capacitive displacement transducer and through-silicon-wafer etching process. The proposed MEMS consists of silicon-based acceleration-sensitive spring-mass structure, upper glass cover plate an universal readout application specific integrated circuit (ASIC) die, which is used to apply driving signals pickup capacitance change due...

Nano- <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$g$ </tex-math></inline-formula> accelerometers are widely used in space exploration and measurement of the earth’s gravitational field. It is essential to precisely evaluate error effects at high orders such as cross-coupling for applications a dynamic environment. Nevertheless, it remains challenging meet precision requirements using conventional...

This paper investigates low temperature ohmic contact formation of Au/Sb to n-type Si substrates through AuSb/NiCr/Au metal stacks. Liquid epitaxy growth is utilized incorporate Sb dopants into substrate in AuSi melt. The best specific resistivity achieved 0.003 Ω ⋅ cm2 at 425 oC. Scanning electron microscopy (SEM) reveals inverted pyramidal crater regions the metal/semiconductor interface, indicating that alloying efficiently occurs such sites. Secondary ion mass spectroscopy (SIMS) shows...

In a rotating accelerometer gravity gradiometer (RAGG), rotary table wobble refers to the shift in direction of spin axis during operation. This motion causes errors output RAGG, but mechanism is not clear. The purpose this paper analyze relationship between and RAGG propose method for rejecting these errors. We consider influence attitude changes, angular velocity, acceleration caused by on specific force, we describe error transmission process based configuration its measurement principle....

As the insulation layers between two metal layers, inter-metal dielectric (IMD) films are widely used in integrated circuits (IC) and micro-electromechanical-systems (MEMS) devices. Commonly IMD materials, such as silicon dioxide nitride, can be deposited on surface using either physical vapor deposition (PVD) or chemical (CVD). However, due to imperfections of processes cleanliness, defect-free an film cannot guaranteed. a common defect film, pinhole is tiny via that result failures...

MEMS Accelerometers are one of the core inertial measurement components in navigation systems. This paper reports a high-precision force balance accelerometer based on technology. Utilizing spring-mass structure with low resonant frequency 8 Hz and periodic capacitive displacement transducer, has an extremely self-noise 1 ng/Hz1/2, which is most sensitive MEMS-based accelerometers reported to date.

We show that for La0.5Ca0.5 – xBaxMnO3, the sample is single phase with an orthorhombic structure x < xd ≈︂ 0.28 while a separation occurs ≥ xd. The observed chemically driven inhomogeneity caused by large size-mismatch (σ2) which as σ2 1.42 × 10–4 nm2. In single-phase region, increasing to 0.14 causes transition metallic state, and magnetoresistance near shows behavior similar in double-exchange manganite oxides. two-phase although compound also insulator–metal transition, both transport...