A5022165395- Advanced MEMS and NEMS Technologies
- Supercapacitor Materials and Fabrication
- Photonic and Optical Devices
- Advanced Sensor and Energy Harvesting Materials
- Mechanical and Optical Resonators
- Microwave Engineering and Waveguides
- Innovative Energy Harvesting Technologies
- 3D IC and TSV technologies
- Electrospun Nanofibers in Biomedical Applications
- Advancements in Battery Materials
- Analytical Chemistry and Sensors
- Advanced Surface Polishing Techniques
- Energy Harvesting in Wireless Networks
- Force Microscopy Techniques and Applications
- Radio Frequency Integrated Circuit Design
- Carbon Nanotubes in Composites
- Graphene research and applications
- Electronic Packaging and Soldering Technologies
- Semiconductor Lasers and Optical Devices
- Microfluidic and Bio-sensing Technologies
- Characterization and Applications of Magnetic Nanoparticles
- Conducting polymers and applications
- Nanofabrication and Lithography Techniques
- Advanced Fiber Optic Sensors
- Acoustic Wave Resonator Technologies
Chalmers University of Technology
2014-2023
Nanosc (Sweden)
2009-2022
Wallenberg Wood Science Center
2011-2021
University of Split
2013
Montanuniversität Leoben
2013
Université de Bretagne Occidentale
2013
Aarhus University
2010
Universitat de Barcelona
2010
Swedish Institute of Space Physics
2009
CEA Grenoble
2008
We have systematically investigated the influence of different bonding parameters on void formation in a low-temperature adhesive process. As result these studies we present guidelines for free 10 cm diameter wafers. focused polymer coatings with layer thicknesses between 1 µm and 18 µm. The tested materials were benzocyclobutene (BCB) from Dow Chemical, negative photoresist (ULTRA-i 300) positive (S1818) Shipley, polyimide (HTR3) Arch Chemical two polyimides (PI2555 PI2610) DuPont....
We describe the microfabrication, packaging and testing of a micromachined dry biopotential electrode, (i.e., where electrolytic gel is not required). It consists an array micro-dimensioned, very sharp spikes, needles) designed for penetration human skin which circumvent high impedance problems associated with layers outer skin. The spikes are etched in silicon by deep reactive ion etching subsequently covered silver-silverchloride (Ag-AgCl) double layer. electrode-skin-electrode spiked...
The first valveless diffuser pump fabricated using the latest technology in deep reactive ion etching (DRIE) is presented. was a two-mask micromachining process silicon wafer polished on both sides, anodically bonded to glass wafer. Pump chambers and elements were etched DRIE, while inlet outlet holes are an anisotropic etch. DRIE etch resulted rectangular cross sections. Results presented pumps with different dimensions terms of neck width, length, angle. maximum pressure 7.6 m H/sub 2/O...
Cellulose nanofibrils isolated from trees have the potential to be used as raw material for future sustainable products within areas of packaging, textiles, biomedical devices, and furniture. However, one unsolved problem has been convert nanofibril‐hydrogel into a dry 3D structure. In this study, printing is cellulose nanofibril hydrogel structures with controlled architectures. Such collapse upon drying, but by using different drying processes can structure preserved solidification....
Presented freestanding carbon nanofibers/graphene composite electrodes for supercapacitors have two essential advantages: sustainable nature and high volumetric electrochemical efficiency.
Carbon nanomaterials such as carbon nanotubes, nanofibers, and graphene are exploited extensively due to their unique electrical, mechanical, thermal properties recently investigated for energy storage application (supercapacitor) additional high specific surface area chemical inertness properties. The supercapacitor is an device which, in addition long cycle life (one million), can give density higher than parallel plate capacitor power battery. In this paper, composites reviewed...
We present the first mass-flow sensor in silicon, based on Coriolis-force principle. The consists of a double-loop tube resonator structure with size only 9/spl times/18/spl times/1 mm. is excited electrostatically into resonance-bending or torsion vibration mode. A liquid mass flow passing through induces Coriolis force, resulting twisting angular motion phase shifted and perpendicular to excitation. excitation Coriolis-induced are detected optically. amplitude induced linearly proportional...
Deep wet etching of borosilicate glass using an anodically bonded silicon substrate as mask is presented. Depths m or more can be achieved very easily. The structured wafer on the same side to another wafer, after having removed mask. A lateral underetching 1.5 times larger than depth was measured. An application this masking technique also It consists frame a resonant structure for deep increase gap between wall and resonator, thus yielding high Q-factor.
Using magnetic particles with sizes in the nanometer range biomedical separation has gained much interest recently due to their higher surface area particle volume and lower sedimentation rates. In this paper, we report our both theoretical experimental investigation of motion a field gradient from 425 nm down 50 nm. measurements, monitor absorbance change sample as concentration varies over time. We also implement Brownian dynamics algorithm investigate influence interactions during compare...
Ionic liquids (ILs) are promising electrolytes for supercapacitors (SCs) aimed high-temperature applications, where increased ionic conductivity results in superior capacitive performance compared to room temperature (RT) performance. However, an also accelerates the self-discharge rate that adversely affects energy retention and restricts usage of SCs standalone applications. In this study, a detailed electrochemical investigation on behaviour carbon-based containing IL,...
The first valve-less diffuser fluid pump in silicon is presented. It consists of a planar double-chamber arrangement fabricated wafer anodically bonded to glass wafer. uses fluid-directing - nozzle elements which have depth and neck width . chamber diameter 6 mm. Pump cavities are etched with an isotropic HNA etch. Pumps three different lengths compared reaching maximum capacity pressure 1.7 m at resonance frequency 1318 Hz for methanol.
We carry out Monte Carlo simulations to study the effective magnetic moment ${\ensuremath{\mu}}_{\text{eff}}$ in low-field region of multicore nanoparticles. Transmission electron microscopy and scanning images show that these particles contain a number nanocrystals (MNCs) randomly packed single cluster total volume ${V}_{\text{tot}}$. illustrate how initial susceptibility ${\ensuremath{\chi}}_{0}$ nanoparticles can be straightforward derived from computed at zero field. observe dipolar...