A5068085580- Advanced MEMS and NEMS Technologies
- Mechanical and Optical Resonators
- Advanced Fiber Optic Sensors
- Nutritional Studies and Diet
- Advanced Surface Polishing Techniques
- Advancements in Semiconductor Devices and Circuit Design
- Cardiovascular and exercise physiology
- Heart Rate Variability and Autonomic Control
Yonsei University
2023
Vitenparken
2023
LG (United States)
2023
Seoul National University
1998-2002
A novel micromachining process based on the UV-LIGA and (110) silicon anisotropic etching to fabricate a high-aspect-ratio comb actuator was developed. The electrodes were fabricated by spring structures using process. structure designed considering etch-rate-ratio between (111) planes lateral etch rate of line-type structure. 400 μm thick 18 wide separated 7 height–gap ratio approximately 57. In addition, number, width, height length resonant frequency frequency-matching sensing driving...
The characteristics of (110) silicon anisotropic bulk etching are studied with varied temperature and concentration aqueous KOH solution. etch rates (111) planes increase increasing but decrease concentration. maximum rate ratio is above 150 at 45 exact wt.% 60°C Surface roughness varies greatly concentration, the minimum observed in an solution 41 wt.%. In 65°C, comb structure have been fabricated which 8μm wide, 150μm high separated by 7μm gaps, using a mask pattern 10μm wide 5μm gaps.
In this paper, we report an electrostatically driven and electromagnetically sensed planar vibratory gyroscope based on a surface-bulk combined micromachining. The has comb electrodes fabricated by (110) silicon anisotropic etching. These are 400 µm thick, 18 wide, 600 long separated 7 so that the height-gap ratio is about 57. It also electroplated gold springs which 15 14 thick 500 both sides of inertial mass. electromagnetic detecting system conventional machining process then attached to...
PURPOSE: This study aimed to explore the relationship between blood glucose level changes and body characteristics during exercise present six models for predicting in levels exercise.METHODS: 148 healthy men women (age: 31.9±9.7 year, fasting glucose: 102.1±14.1 mg/dL, <i>p</i>=.032) participated study, 30 of them study. Eight variables were selected build two prediction models: 24-hour ingested carbohydrates, age, glucose, heart rate changes, sex, skeletal muscle mass, recovery...