The development of a CMOS compatible flexible piezoelectric material is desired for numerous applications and in particular biomedical MEMS devices. Aluminum nitride (AlN) the most commonly used material, which typically deposited on Si order to enhance c-axis (002) crystal orientation gives AlN its high properties. This paper reports successful deposition polyimide (PI-2611) material. has FWHM value 5.1 d33 1.12 pm V 1 , SEM images show quality columnar grains. highly crystalline due...

The integration of large infrastructure with energy-harvesting systems is a growing field potentially new and important applications. possibility energy harvesting from ambient vibration bridges in this regard. This paper investigates the feasibility for number trains considering their passage over bridge. power that can be derived an device due to train crossing bridge at different speeds compared against typical demands small wireless devices found adequate powering such devices. These...

Continuous flow microreactors with an annular microchannel for cyclical chemical reactions were fabricated by either bulk micromachining in silicon or rapid prototyping using EPON SU-8. Fluid propulsion these unusual microchannels was achieved AC magnetohydrodynamic (MHD) actuation. This integrated micropumping mechanism obviates the use of moving parts acting locally on electrolyte, exploiting its inherent conductive nature. Both and SU-8 capable MHD actuation, attaining fluid velocities...

Silver nanowire arrays embedded inside polycarbonate templates are investigated as a viable thermal interface material for electronic cooling applications. The composite shows an average diffusivity value of 1.89×10−5 m2 s−1, which resulted in intrinsic conductivity 30.3 W m−1 K−1. nanowires’ protrusion from the film surface enables it to conform roughness make better contact. This 61% reduction impedance when compared with blank polymer. An ∼30 nm Au on top was found act heat spreader,...

This paper presents a method of integrating thick permanent magnetic films into microfabrication process. An enhanced binding consisting hybrid Parylene N and C thin was used in conjunction with various types NdFeB powders to create embedded magnet films. A systematic study composite developed using three different order control intrinsic coercivities (H <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">ci</sub> ) remanence (B...

An investigation of MOS transistor mismatch is undertaken and a methodology developed for optimizing without increasing layout area. Dramatic improvements up to 300% in matching can be realized by selecting the optimum W/L ratio changing overall WL area product. The theoretical basis obtainable fully described an expression derived verified experiment predict which gives matching.

As microelectromechanical systems (MEMS) move rapidly towards commercialization, the issue of mechanical characterization has emerged as a major consideration in device design and fabrication. It is now common to include set test structures on MEMS wafer for extraction thin film material properties (in particular, residual stress, stress gradient Young's modulus), process monitoring. These usually consist micromachined beams strain gauges. Measurement techniques tensile testing, scanning...

The implementation of a viable statistical circuit design methodology requiring detailed knowledge the variabilities of, and correlations among, simulator model parameters utilized by designers, determination important relationships between these CAD parameter process causing them is presented. This work addresses above requirements detailing new framework which was adopted for 2-/spl mu/m CMOS technology to enable realistic performance prediction prior manufacture. Issues relating MOSFET...

The objective of this paper is to examine the Pulse Transit Method (PTT) as a non-invasive means track Blood Pressure over short period time. PTT was measured time it takes for an ECG R-wave propagate finger, where detected by photoplethysmograph sensor. method ideal continuous 24-hour Measurement (BPM) since both cuff-less and therefore comfortable unobtrusive patient. Other techniques, such oscillometric method, have shown be accurate reliable but require cuff operation, making them...

Aluminum nitride (AlN) is a widely researched piezoelectric material due to its CMOS compatibility. One of the most common applications for AlN in area vibrational energy harvesting. The quality related crystal orientation film and optimal conditions are obtained when c-axis aligned with (0 0 2) orientation. can be challenging integrate into fabrication process dependency process. This paper reports on effects non-(0 oriented peaks an harvesting MEMS cantilever structure. Results show that...

Using a commercial finite-element simulation tool, this work considers some of the electromechanical effects commonly neglected during analysis electrostatically actuated fixed–fixed beams. These structures are used in many applications micromechanical systems, from relay switches and RF resonators to thin film characterization tests, but much analytical modelling device behaviour disregards electrostatic field fringing, plane-strain conditions anchor compliance. It is shown that cumulative...

A non-enzymatic hydrogen peroxide (H2O2) sensor based on a vertically aligned gold nanowire array electrode modified with palladium nanoparticles (PdNP/AuNAE) has been fabricated. PdNP have deposited onto the AuNAE surface by hydrothermal reduction method using borohydride technique. Scanning electron microscope inspection (SEM) revealed granular Pd particles of nanowires. X-ray diffraction (XRD) peak analysis determined an average crystallite size 3 to 5 nm for PdNP. The catalytic behavior...

This paper reports on a low-frequency vibrational piezoelectric energy harvester that scavenges from wire carrying an ac current. The is described, fabricated, and characterized. device consists of silicon cantilever with integrated capacitor proofmass incorporates permanent magnet. When brought close to current wire, the magnet couples magnetic field causing vibrate generate power. was fabricated silicon-on-insulator substrate using microelectromechanical systems (MEMS) technology. charge...

This paper presents a silicon-based MEMS vibrating mesh nebulizer capable of producing micro droplets for inhaled drug delivery. The device concept, design, fabrication, and measurements are presented. core element the (vibrating mesh) was fabricated using silicon process consists 1000 tapered micro-sized apertures. During operation vibrates at high frequency with bending profile corresponding to 02 resonance mode. droplet diameter measured output is 3.75 μm typical rate 0.45 ml / min.

Flexible piezoelectric materials are desired for numerous applications including biomedical, wearable, and flexible electronics. However, most not compatible with CMOS fabrication technology, which is MEMS applications. This paper reports on the development of a hybrid material consisting aluminium nitride (AlN) semi-crystalline polymer substrate. Various types parylene polyimide were investigated as The crystallinity surfaces substrates modified by micro-roughening annealing in order to...

Abstract Energy harvesting to power sensors for structural health monitoring (SHM) has received huge attention worldwide. A number of practical aspects affecting energy and the possibility directly from harvesters is investigated here. The key idea amount a damaged an undamaged structure varying signature such variation can be used SHM. For this study, bridge are considered with located at different positions harvested accessed numerically determine how act as damage detector monitor....