A5054446705- Quasicrystal Structures and Properties
- X-ray Spectroscopy and Fluorescence Analysis
- Advanced X-ray Imaging Techniques
- Mineralogy and Gemology Studies
- X-ray Diffraction in Crystallography
- Intermetallics and Advanced Alloy Properties
- Metal and Thin Film Mechanics
- Ion-surface interactions and analysis
- Crystallography and Radiation Phenomena
- Semiconductor materials and interfaces
- Diamond and Carbon-based Materials Research
- Optical Coatings and Gratings
- Boron and Carbon Nanomaterials Research
- Electron and X-Ray Spectroscopy Techniques
- High-pressure geophysics and materials
- Magnetic properties of thin films
- Advanced Electron Microscopy Techniques and Applications
- nanoparticles nucleation surface interactions
- Advancements in Photolithography Techniques
- Eurasian Exchange Networks
- Material Science and Thermodynamics
- Metallic Glasses and Amorphous Alloys
- Crystal Structures and Properties
- Magnesium Alloys: Properties and Applications
- Microstructure and mechanical properties
National Technical University "Kharkiv Polytechnic Institute"
2013-2024
P.N. Lebedev Physical Institute of the Russian Academy of Sciences
2003
This review paper summarizes and provides an overview of our recent studies related to two types short-period multilayer X-ray mirrors, W/B 4 C Co/C.It deals with the experimental observation layer intermixing effects how they affect mirror's optical performance.The presents also some examples using fabricated mirrors in focusing imaging experiments at working wavelengths 2.48 nm 4.47 nm.
X-Ray Calc is a fast and convenient tool for the simulation of X-ray reflectivity (XRR). The software was developed with aim simplification acceleration XRR through user-friendly interface optimized computation core. implements recursive approach calculation based on Fresnel equations proposes special instruments modeling periodical multilayer structures. computes as function wavelength or grazing angle can be used performance mirrors. Computer fitting to experimental incidence reflectometry...
The synthesis and structural analysis of Mo/B periodical multilayer X-ray mirrors (PMMs) for beyond extreme ultraviolet (BEUV) optics was performed. PMMs were deposited by a combination pulsed DC radio frequency (RF) magnetron sputtering. structure analyzed high-resolution transmission electron microscopy, photoelectron spectroscopy, grazing incidence reflectometry. formation 0.35 nm-thick interlayers comprised mixture molybdenum borides observed at the interfaces. Furthermore, low interface...
The temperature dependence of electrical resistivity in the range from 4.4 to 300 K for Ti41Zr41Ni18 (at.%) thin coatings various crystal perfection and phase compositions has been investigated. films were deposited by magnetron sputtering method. following vacuum annealing modes provided several combinations film phases such as 1/1 2/1 crystal-approximant phases, quasicrystalline icosahedral phase, Laves (Ti,Zr)2Ni α-Ti(Zr) solid solution phase. structure composition before after studied...
Three broadband aperiodic Sb/B4C multilayer mirrors were synthesised for the purposes of soft X-ray optics and spectroscopy in wavelength range beyond L-edge Si (λ < 124 Å), their reflection spectra measured. The structures optimised maximum uniform reflectivity ranges 100 – 120 Å, 95 105 Å 90 Å. recorded using a laboratory laser-plasma radiation source an electronic detector with 2D spatial resolution (a CCD matrix 13 × μm sized pixels). experimental are compared theoretical calculations....
Periodic and aperiodic Sb/B4C multilayer structures have been theoretically calculated synthesised for the first time application in soft X-ray optics 80 A < l 120 range. The reflection spectra of periodic mirrors are mea- sured using synchrotron radiation laser plasma-generated radi- ation. experimental interpreted with inclusion transition layers substrate roughness. den- sity antimony is supposedly r(Sb) = 6.0 g cm -3 , thickness (if any) does not exceed 10 A. peak reflectivity 19 %...
УкраинаМетодами рентгеновской дифрактометрии и просвечивающей электронной микроскопии поперечных срезов исследована структура многослойного рентгеновского зеркала (МРЗ) Si/Mg 2 Si в исходном состоянии после термического отжига интервале температур 50-750C.В МРЗ слои -аморфные.Слои Mg представляют собой аморфную матрицу с нанокристаллическими включениями метастабильной гексагональной модификации.При отжиге до 450C наблюдается кристаллизация слоёв Si, что сопровождается увеличением плотности...
Abstract Application of x-ray multilayers as reflective masks for lithography is proposed. The mask a specially prepared multilayer mirror capable to selectively reflect x-rays. use grazing geometry allows pattern design on the be compressed in one direction. examples are given (WC/Si multilayers) with two types radiation source: an tube ( λ = 0.154 nm) and synchrotron ∼ 0.35 nm). compression segments by 14–33 times imprint size resist plane 3.5–4 μ m obtained. advantages proposed given....
This paper presents the results of fabricating a model sample multilayer coating on Al2O3 substrate, which consisted 30 periods alternately deposited 10.5-nm-thick layers Ti41Zr41Ni18 and 2.5-nm-thick W. The effect annealing for 1 h at 500, 600, 700 °C was studied. Characterization phase structural state by X-ray diffractometry small-angle reflectometry carried out. It found that during process, tungsten in composition did not undergo significant changes, all alterations occur only layers....
The temperature dependence of the electrical resistivity in range from 4.4 to 300 K for Ti41Zr41Ni18 (at. %) thin coatings different crystal perfection and phase composition was studied. were deposited by magnetron sputtering with subsequent vacuum annealing various modes ensuring formation several heterophase combinations, which included 1/1 2/1 approximation phases, a quasicrystalline icosahedral phase, Laves (Ti, Zr)2Ni, an α-Ti (Zr) solid solution. structure before after studied X-ray...
The influence of annealing temperature and time on the structure coatings with composition Ti41Zr41Ni18 (at.%) was analyzed. conditions for obtaining nanodispersed, single-phase quasicrystalline 2/1 phase-approximant have been determined. Detailed data about films little-studied approximant phase were collected, using XRD high-resolution transmission electron microscopy. By nanoindentation, a comparative study mechanical properties carried out samples having different compositions. It...
X-ray diffraction and SEM microscopy were used to study structural phase changes in the surface layers of a Ti41.5Zr41.5Ni17 alloy bulk sample (target) thin film (deposited by magnetron sputtering target) under radiation-thermal action pulsed hydrogen plasma with thermal load 0.6 MJ/m2 QSPA Kh-50 installation. It is established that irradiation results formation two-phase state: icosahedral quasicrystalline together 1/1 approximant crystal (W-phase). As result isothermal (550⁰C) annealing,...
Зміни у структурі багатошарових
Национальный технический университет «Харьковский политехнический институт », ул.Кирпичёва, 21, 61002 Харьков, Украина Методами рентгеновской дифрактометрии исследованы особенности роста многослойных рентгеновских зеркал (МРЗ) Zr/Mg, изготовленных методом прямоточного магнетронного распыления.Показано, что МРЗ Zr/Mg благодаря высокой степени периодичности слоёв и малому несоответствию параметров их кристаллических решёток в 1,2% когерентно рассеивают рентгеновское излучение с λ = 0,154 нм.В...
This Note deals with thin-film soft x-ray filters for operation at the wavelengths near carbon K edge (∼4.5 nm). The were fabricated by magnetron sputtering deposition of thin layers scandium (total thickness 0.1–0.2 μm) onto films polypropylene (thickness 1.5 and polyimide 0.15–0.3 μm). To protect from oxidation processes in ambient environment, coated 3 nm carbon. measured transmissions 0.1 μm Sc/C are about 0.6 working wavelength ∼10−4 visible. developed can be useful investigations...