A5027849553- Force Microscopy Techniques and Applications
- Mechanical and Optical Resonators
- Advanced MEMS and NEMS Technologies
- Near-Field Optical Microscopy
- Cellular Mechanics and Interactions
- Advanced Surface Polishing Techniques
- Acoustic Wave Resonator Technologies
- Integrated Circuits and Semiconductor Failure Analysis
- Microtubule and mitosis dynamics
Shenyang Institute of Automation
2021-2025
Chinese Academy of Sciences
2021-2025
University of Chinese Academy of Sciences
2021-2025
State Key Laboratory of Robotics
2022
Gastric cancer is one of the deadliest malignant tumors digestive tract, and its development metastasis are regulated by various factors. Some studies have shown that PSMD2 involved in regulating tumor microenvironment stiffness. However, exact mechanism unclear, effective means to quantify effect on gastric tissue hardness lacking. Herein, we revealed mechanical heterogeneity tissues patients using a large-scale AFM-based situ method. cryosections were probed this method under aqueous...
Displacement sensors with subnanometer resolution and wide bandwidth are essential for micro-nano manufacturing, measurement, motion control systems. However, the current displacement sensing methods have various limitations, such as requirements optical or electrical properties of target sample, need to be in contact sample surface, contradiction between accuracy bandwidth. This study proposes a method resolution, which is not only insensitive material measured but sample. The squeeze film...
Atomic force microscope (AFM) is a crucial metrology tool in the semiconductor industry. However, bottleneck of AFM technique its low efficiency, primarily owing to time-consuming scanning point switching. The traditional method takes approximately one minute for single To shield probe and sample, switching should first lift considerable distance, move it next point, finally engage slowly sample surface. We propose near-surface tracking use fast probe-sample distance was sensed by squeeze...
Noncontact displacement measurement with high bandwidth and subnanometer resolution is critical for precision engineering applications. However, the existing sensors either require a special plate to be fixed on object measured or are bulky inconvenient integrate other instruments. The air film height between two plates affects squeeze damping coefficient, which has potential sensing. lacking comprehensive analysis, modelling experimental research, possibility of use effect sensing still...
Abstract Atomic force microscopy (AFM) has been adopted in both industry and academia for high‐fidelity, full‐profile topographic characterization. Typically, the tiny tip of cantilever limited traveling range scanner restrict AFM measurement to relatively flat samples (recommend 1 µm). The primary objective this work is address these limitations using a large‐range (measuring height >10 µm) system consisting novel repairable high aspect ratio probe (HARP) with...
The diversity of functional applications atomic force microscopes is the key to development nanotechnology. However, single probe configuration traditional microscope restricts realization different application requirements for same target area a sample, and replacement working will lead loss area. Here, design, simulation, fabrication, unique dual-probe are presented, which consists pair parallel cantilevers with narrow gap U-shaped hinged base. Integrated Hinged Dual-Probe (IHDP) developed...