Untethered magnetic soft robots can broaden the working scenarios of and have numerous potential applications in space exploration, industry, medicine. However, existing face challenges such as limited reparability, difficulty expanding functions, adjusting motion mode. Herein, an efficient comprehensive laser thermal-curing printing method is proposed for robots. In this method, directionality photothermal effect infrared property thermosetting resin are utilized to achieve fabrication,...

Abstract Bi 2 Fe 4 O 9 ( BFO ) is one of the most important photocatalyst materials and its composition with graphene may leave an optimizing effect on photocatalytic performance. In this paper, reduced oxide RGO various contents selected to be composited successfully via one‐step hydrothermal method. A series ‐ x =0, 1.25, 2.50, 3.75, 5, 6.25, 7.50 wt.%) were prepared effects content crystalline, light absorption, impedance, degradation rate methyl violet MV solution are characterized. The...

We investigate the architecture of microfabricated vapor cells with reflective sidewalls for applications in chip scale atomic sensors. The optical configuration operation is suitable both one-beam and two-beam (pump & probe) schemes. In miniaturized cells, laser beam reflected twice by aluminum reflectors on wet etched 54.7° to prolong length significantly, thus resulting a return reflectance that three times bare silicon sidewalls. To avoid limitations faced fabrication process,...

In this study, an all-ceramic heat-flux sensor with high temperature resistance and no water-cooling system was designed to address the problems of short effective lifespan low sensitivity sensors under harsh ultra-high temperatures conditions. The components comprised resistant ceramic materials, that is, alumina (Al <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> ), indium tin oxide...

Through silicon via (TSV) technology is crucial for modern semiconductor device package, enabling high-performance integrated microsystems. This paper investigates the mechanism of bottom-up copper deposition process in TSV, leveraging a co-adsorbed polyether-Cl-suppression layer and accelerators optimized filling profiles. We present numerical simulations effects additives (accelerator, suppressor) chloride ions (Cl−) on TSV filling. By varying substance concentration, we obtain three...

Tungsten-rhenium thin film thermocouples (TFTCs) are well suited for the surface temperature monitoring of hot components due to their small size, rapid response and low cost. In this study, a tungsten-rhenium TFTC with SiC protective on all parts except pads was fabricated by microelectromechanical system (MEMS) process. During medium (-40 °C 500 °C) repeatability test phase, thermal voltage from agreed that standard thermocouple. However, during high lost electronic at around 620 °C....

In this paper, a surface acoustic wave (SAW) temperature sensor with Pt/Ti/AlN/Mo/AlN/Si structure was prepared, and the high characteristics of sensors at 20–600 °C under different electrode metallization rates (ղ) were measured. It found that frequent device mutation occurred in first high-temperature test, point decreased increase rate (ղ). subsequent data became stable, sensor’s center frequency increased, return loss (S11) factor merit (Q) increased. After annealing same 600 for 30 min,...

In the commonly used existing siliconon-insulator microelectromechanical systems (MEMS) process, a silicon-oxide-silicon sandwich structure in sensor device creates parasitic capacitance, which reduces charge sensitivity. this letter, for first time, we demonstrate vibrating-reed-based electrometry system with high sensitivity and resolution silicon-onglass (SOG) MEMS process. utilize glass substrate instead of silicon to ameliorate by reducing capacitance. An improved preamplifier circuit...

Compared with conventional solid-state relays, micro-electro mechanical system (MEMS) relays have the advantages of high isolation, low contact resistance, power consumption, and abrupt switching characteristics. Nevertheless, widespread application MEMS has been limited due to issue conflict between actuation voltages device performance. This article presents a novel cantilever relay an embedded electrode which helps achieve voltage (below 8 V) restoring force simultaneously. Meanwhile,...

Actuators play a crucial role in microelectromechanical systems (MEMS) and hold substantial potential for applications various domains, including reconfigurable metamaterials. This research aims to design, fabricate, characterize structures the actuation of EMA. The electromagnetic actuator overcomes lack high drive voltage required by other actuators. proposed configuration comprises supporting cantilever beams with fixed ends, an integrated coil positioned above cantilever's movable plate,...

For the first time, a surface acoustic wave (SAW) resonator based on AlN/6H-SiC multilayer structure is designed and fabricated. Firstly, we have succeeded in solving problem of obtaining AlN (002) 6H-SiC substrate. The results show that highly c-axis-oriented thin films are obtained, with diffraction peak 36.121° lowest full width at half maximum (FWHM) value only 0.62°. Besides, MEMScompatible fabrication process employed to fabricate SAW by using lift-off photolithography techniques....

Abstract The remote real‐time detection of specific arsenic species would significantly benefit in minerals processing to mitigate the release into aquatic environments and aid selective mining. At present, there are no technologies available detect bulk volumes outside laboratories. Here we report on first room‐temperature broadband 75 As nuclear quadrupole resonance (NQR) common abundant ores Earth crust using a large sample (0.78 L) volume prototype sensor. Broadband excitation aids...

Ni90%Cr10% and Ni97%Si3% thin-film thermocouples (TFTCs) were fabricated on a silicon substrate using magnetron sputtering technology. Static calibration yielded Seebeck coefficient of 23.00 μV/°C. During staged temperature elevation the TFTCs while continuously monitoring their thermoelectric output, rapid decline in potential was observed upon hot junction reaching 600 °C; device had failed. Through three cycles repetitive static tests ranging from room to 500 °C, it that performance...

An atomic magnetometer based on coherent population trapping (CPT) resonances in microfabricated vapor cells is demonstrated. Fabricated by the micro-electro-mechanical-system (MEMS) technology, are filled with Rb and Ne at a controlled pressure. experimental apparatus built for characterizing properties of via CPT effects. The typical linewidth measured to be about 3 kHz (1.46 approximately zero laser intensity) rubidium D1 line 90 °C. effects pressure, temperature intensity studied...

Oxide thin film thermocouples (TFTCs) are widely used in high-temperature environment measurements and have the advantages of good stability high thermoelectric voltage. However, different annealing processes affect performance TFTCs. This paper studied impact times on cyclic characteristics ceramic oxide thermocouples. ITO/In2O3 TFTCs were prepared alumina ceramics by a screen printing method, samples annealed at times. The microstructure ITO was scanning electron microscopy (SEM), X-ray...