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A5103058186
Research Areas
- Mechanical and Optical Resonators
- Advanced MEMS and NEMS Technologies
- Nanowire Synthesis and Applications
Tsinghua University
2020
Compared with conventional solid-state relays, micro-electro mechanical system (MEMS) relays have the advantages of high isolation, low contact resistance, power consumption, and abrupt switching characteristics. Nevertheless, widespread application MEMS has been limited due to issue conflict between actuation voltages device performance. This article presents a novel cantilever relay an embedded electrode which helps achieve voltage (below 8 V) restoring force simultaneously. Meanwhile,...
10.3390/mi11020171
article
EN
cc-by
Micromachines
2020-02-07
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