A5102807729- Advanced MEMS and NEMS Technologies
- Mechanical and Optical Resonators
- Acoustic Wave Resonator Technologies
- Metamaterials and Metasurfaces Applications
- Advanced Electron Microscopy Techniques and Applications
- Terahertz technology and applications
- Microbial Inactivation Methods
- Microwave Engineering and Waveguides
- Composite Structure Analysis and Optimization
- Advanced Sensor Technologies Research
- Superconducting and THz Device Technology
- Advancements in Photolithography Techniques
- Nanofabrication and Lithography Techniques
- Advanced X-ray Imaging Techniques
- Advanced Antenna and Metasurface Technologies
- Advanced Biosensing Techniques and Applications
- Plasma Applications and Diagnostics
- Thin-Film Transistor Technologies
- Advanced Fluorescence Microscopy Techniques
- Personal Information Management and User Behavior
- Pulsed Power Technology Applications
- Molecular Biology Techniques and Applications
- Semiconductor Lasers and Optical Devices
- Carbon Nanotubes in Composites
- Image Processing Techniques and Applications
Nanjing University of Aeronautics and Astronautics
2020
National University of Singapore
2013-2015
Tongji University
2011
Calculating hinge moments during the morphing process is a critical aspect in folding wing design. The deficiencies of traditional flat-plate aerodynamic model calculation are expounded this work, and flight simulation platform based on high-order panel method established. On basis platform, typical flight-folding aircraft simulated, results different models compared. Results show that airfoil thickness has great influence loading distribution surfaces thus affects process. method, which...
Design, fabrication and test results of a lateral DC-contact RF-MEMS switch for mm-wave applications are presented. The is driven by triple cascaded electrothermal buckle-beam actuator, which can generate large displacements contact forces at lower temperatures than traditional actuators. size the whole only 1.2 mm × 1.4 in area. measured transient times switch-on switch-off 13.6 0.96 ms, respectively. Low insertion losses high isolation 0.17 dB 26.7 dB, respectively, obtained proposed...
In order to meet the different requirements of applications in synchrotron radiation and plasma diagnosis China, focusing imaging optics based on Kirkpatrick‐Baez (KB) mirrors, compound refractive lenses (CRLs), multilayer Laue (MLLs) were studied our lab. A one‐dimensional KB microscope using mirrors with a dual‐periodic coating was developed. The mirror can reflect both 4.75 keV (Ti K‐line) 8.05 (Cu simultaneously, which makes alignment easier. For hard x‐ray microscopy, CRL studied. Using...
Piezoresistive sensor was one of the earliest silicon MEMS devices, which based on theory piezoresistive. In order to build piezoresistive IP library for foundry, we improved structures achievement Liwei Lin 1 , and new analytic model design software square shape membrance has been developed. The ability calculate sensitivity linearity using have demonstrated. As results, output voltage, characteristics are presented in this paper.
This paper presents the models for ultraviolet (UV) lithography of thick photoresists such as SU-8. Simulations various conditions have been conducted using these based on improved dynamical cellular automata method. Some experiments SU-8 2075 layers under UV source with 365nm wavelength implemented to verify simulation results. The results confirm validity proposed models.
Many MEMS devices including accelerometer and gyroscopes, having moving parts, requires hermetic low cost packaging. In this paper we propose a fabricating process to prepare micro glass cavity arrays for wafer-level packaging of MEMS. First, the fundamental was discussed. Then, preparing in Pyrex7740 wafer studied experimentally. After that, defects fabrication were Results show that packaged cavities prepared, whose diameter controllably between 200 microns 2000 microns. It is also...
Fabrication of a novel in-plane field emission diode structure is presented. Sub-micro metal tips were obtained using two-step lithography method. The Minimum width the was less than 100nm, and minimum spacing 145.7nm obtained. I-V characters in atmospheric environment before after silicon etching measured.
A new structure of gap adjustable MEMS resonator has been proposed, and an analytical model the developed. This is a 2D vibration system. An opposite type MATA was used to push fixed finger move, as result, between fingers changed. Simulation results show that displacement mechanical oscillator increased when provided step force, amplitude modulated force in cyclical form. In order improve stability structure, folded beams were changed into clamped beams. FEA simulation told us changed, increased.
A design and simulation of a fully CMOS compatible micromachined multilayer cantilevers-based environmental thermometer are presented. The operation principle the structure is depending on mismatch effect thermal expansion coefficient piezoresistive polysilicon in process. Upon temperature variation, deformation cantilever resulted from large different materials can be sensed translated to an electrical voltage output by using symmetric Wheatstone bridge. mechanical characteristics device...
Differing with the traditional way to perform electroporation (EP) by using DC electrical pulse, this paper proposes a new EP system applying continuous voltages generate proper electric field strengths utilizing shape change of channel. The fabrication chip and set-up are clearly described simulations also carried out CFD-ACE study strength distribution time span when fluid passes through different strengths. proposed is quite simple low-cost.