A5108041689- Diamond and Carbon-based Materials Research
- Semiconductor materials and devices
- Electronic and Structural Properties of Oxides
- Metal and Thin Film Mechanics
Czech Academy of Sciences
2024
Czech Academy of Sciences, Institute of Physics
2024
Czech Technical University in Prague
2023
Polycrystalline boron-doped diamond is a promising material for high-power aqueous electrochemical applications in bioanalytics, catalysis, and energy storage. The chemical vapor deposition (CVD) process of formation doping totally diversified by using high kinetic energies deuterium substituting habitually applied hydrogen. concentration plasma induces atomic arrangements steric hindrance during synthesis reactions, which consequence leads to preferential (111) texture more effective boron...
In this work, first, we investigate the effect of nitrogen addition in microwave plasma enhanced chemical vapor deposition on growth thick {113} epitaxial diamond layers. We identify a narrow range concentrations for crack-free layers with smooth surface morphology. Without nitrogen, cracks start to appear after layer thickness 7–10 μm due elastic energy stored layer, but stabilizes growth. also use low power density conditions produce boron-doped observe very high boron incorporation...