A5078927602- Optical measurement and interference techniques
- Force Microscopy Techniques and Applications
- Photonic and Optical Devices
- Surface Roughness and Optical Measurements
- Advanced Measurement and Metrology Techniques
- Optical Polarization and Ellipsometry
- Image Processing Techniques and Applications
- Advanced Fiber Optic Sensors
- Advanced Materials Characterization Techniques
- Photoacoustic and Ultrasonic Imaging
- Mechanical and Optical Resonators
- Electron and X-Ray Spectroscopy Techniques
- Advanced MEMS and NEMS Technologies
- Near-Field Optical Microscopy
- Optical Coherence Tomography Applications
- Advanced machining processes and optimization
- Advanced Sensor Technologies Research
- Dielectric materials and actuators
- Ferroelectric and Piezoelectric Materials
- Advanced Fluorescence Microscopy Techniques
- Tribology and Lubrication Engineering
- Advanced Sensor and Energy Harvesting Materials
- Scientific Measurement and Uncertainty Evaluation
- Adhesion, Friction, and Surface Interactions
- Advanced Optical Sensing Technologies
Friedrich-Alexander-Universität Erlangen-Nürnberg
2018-2024
Institut für Informationsverarbeitung
2019
Zimmer Biomet (France)
2019
This article presents a new robust, precise, high-frequency focal-distance-modulated confocal point sensor for probing in coordinate measuring systems (CMSs). While maintaining the known advantages of measurement principle, represents an innovative combination fiber-coupled illumination and detection with tuneable, acoustically driven gradient-index fluid lens modulation focus distance novel signal processing utilizing lock-in amplifier. The arrangement is able to achieve approximately...
Zusammenfassung In diesem Artikel wird die Messpräzision eines hochfrequent fokusabstandsmodulierten, fasergekoppelten Konfokalsensors unter temperaturstabilen Bedingungen bestimmt. Insbesondere in der Mikro- und Nanomesstechnik verursachen thermische Driften signifikante Messabweichungen. Diese lassen sich bei wiederholten Messungen zwar zu einem großen Teil korrigieren, innerhalb einer Messung ist dies bisher jedoch nicht möglich. Das verwendete Nanokoordinatenmesssystem (NMM-1) wurde...
This paper presents the bidirectional confocal measurement of a microsphere, which enables simple sphere with similar number measuring points taken on its upper and lower hemispheres. The innovative strategy is placement above mirror subsequent hemisphere real mirrored sphere. While theoretical explanations are given first, main focus presentation idea itself very promising empirical findings. We believe these findings prove that presented has potential to become prime method for optical...
Traceability is of vital importance in metrology and achieved by an unbroken chain calibrations that relate the measurement result to a reference. Less clear temporal aspect traceability, namely determination recalibration dates. Relevant standards require conduction recalibrations planned manner, thus general there calibration history consisting number past for measurands are part traceability chain. Nevertheless, commonly only results last considered when determining result. Furthermore,...
Zusammenfassung In diesem Artikel wird ein neues Messverfahren zur Oberflächenmessung bei gleichzeitiger axialer Regelung des Arbeitsabstandes eines hochfrequent fokusabstandsmodulierten, fasergekoppelten, konfokalen Punktsensors in einem Nanokoordinatenmessgerät (NMM- 1) [4] vorgestellt. Während Verfahren alle bekannten Vorteile der Konfokaltechnik beibehalten werden, stellt die innovative Kombination einer fasergekoppelten Beleuchtung und Detektion mit akustisch getriebenen, modulierbaren...
Zusammenfassung In diesem Artikel wird ein neues Messverfahren zur Oberflächenmessung bei gleichzeitiger axialer Regelung des Arbeitsabstandes eines hochfrequent fokusabstandsmodulierten, fasergekoppelten, konfokalen Punktsensors in einem Nanokoordinatenmessgerät (NMM-1) [T. Hausotte, B. Percle, and G. Jäger. Meas. Sci. Technol. , 2009] vorgestellt. Während Verfahren alle bekannten Vorteile der Konfokaltechnik beibehalten werden, stellt die innovative Kombination einer fasergekoppelten...
Abstract This article presents a new tilting atomic force microscope (AFM) with an adjustable probe direction and piezoresistive cantilever operated in tapping-mode. The AFM is based on two rotational axes, which enable the adjustment of to cover complete hemisphere. whole setup integrated into nano measuring machine (NMM-1) metrological traceability warranted by situ calibration NMM-1. To demonstrate capabilities AFM, measurements were conducted step height standard.
Abstract The article presents measurements with a high-speed focal-distance modulated fibre-coupled confocal sensor integrated into nano measuring machine (NMM-1). Combined an appropriate signal processing, this axial beam modulating yields linear characteristic curve within range of about 600 nm. This enables scans in closed-loop constant distance mode, where the controller NMM-1 keeps between measured surface and constant. Therefore, only one lateral scan is necessary to measure given...
This article presents the evaluation of optical performance a new high-frequency focal-distance-modulated confocal point sensor. While maintaining known advantages measurement principle, sen- sor represents an innovative combination fibre-coupled illumination and detection with tuneable, acoustically driven gradient-index fluid lens (TAG lens) for modulation focus distance novel signal processing utilizing lock-in amplifier. The arrangement is able to achieve approximately linear...
Abstract The article presents a redesigned sensor holder for an atomic force microscope (AFM) with adjustable probe direction, which is integrated into nano measuring machine (NMM-1). AFM, consisting of commercial piezoresistive cantilever operated in closed-loop intermitted contact-mode, based on two rotational axes, enable the adjustment direction to cover complete hemisphere. axes greatly enlarge metrology frame system by materials comparatively high coefficient thermal expansion. AFM...
The desire to develop artificial muscles which can mimic biological behaviors and are accessible for medical or industrial applications require a suitable technology. For this purpose dielectric elastomers represent promising technology, transform electrical energy into mechanical energy. They have properties similar human like high density, good weight-to-power ratio, efficiency, inherent flexibility elastic strains. Dielectric not only be used as actuators, but also flexible sensors. A...
The article presents large range closed-loop scans with a high-speed focal-distance-modulated fibre-coupled confocal sensor integrated into nano measuring machine (NMM-1). Combined an appropriate signal processing this axial beam modulating yields linear characteristic curve, which enables areal scans. Such are conducted under thermally stable conditions on concave mirror nominal focal length of 19 mm. Prior to the is used determine and adjust probe direction in order align z-axis NMM-1....
The article presents the determination of topographic spatial resolution an optical point sensor. It is quantified by lateral period limit DLIM measured on a type ASG material measure, also called (topographic) Siemens star, with confocal sensor following both radial measurement and evaluation, as proposed ISO 25178-70, subsequent evaluation two line scans, NPL Good Practice Guide. As will be shown, for latter, only slightly misidentified target centre star leads to quite significant errors...
Abstract This article presents the application and evaluation of a cantilever with integrated sensing actuation as part an atomic force microscope (AFM) adjustable probe direction, which is into nano measuring machine (NMM-1). The AFM, operated in closed-loop intermittent contact mode, based on two rotational axes that enable adjustment direction to cover complete hemisphere. greatly enlarge metrology frame system by materials comparatively high coefficient thermal expansion, ultimately...
Exemplified by a stitching procedure that is frequently applied in optical surface metrology and based on the maximization of cross-correlation function, article shows dependency accuracy result many different interdependent influence factors. Furthermore it shown remaining deviations regions are regarded to be overlapping ones no generally valid indication for result. Thus, second part article, method determine uncertainty Monte Carlo simulation presented. The input quantities procedure,...