A5086355320- Advanced Measurement and Metrology Techniques
- Advanced X-ray and CT Imaging
- Surface Roughness and Optical Measurements
- Medical Imaging Techniques and Applications
- Scientific Measurement and Uncertainty Evaluation
- Force Microscopy Techniques and Applications
- Advanced Surface Polishing Techniques
- Radiation Dose and Imaging
- Optical measurement and interference techniques
- Advanced machining processes and optimization
- Manufacturing Process and Optimization
- Additive Manufacturing Materials and Processes
- Additive Manufacturing and 3D Printing Technologies
- Advanced Sensor Technologies Research
- Laser and Thermal Forming Techniques
- Nanofabrication and Lithography Techniques
- Metal Forming Simulation Techniques
- Sensor Technology and Measurement Systems
- Advanced MEMS and NEMS Technologies
- Photonic and Optical Devices
- Mechanical and Optical Resonators
- Adhesion, Friction, and Surface Interactions
- Cultural Heritage Materials Analysis
- Welding Techniques and Residual Stresses
- Anatomy and Medical Technology
Friedrich-Alexander-Universität Erlangen-Nürnberg
2015-2024
Bayer (Germany)
2024
Deutsche Telekom (Austria)
2022
Walter de Gruyter (Germany)
2021
Institut für Informationsverarbeitung
2019
Zimmer Biomet (France)
2019
Sensors (United States)
2015
Technische Universität Ilmenau
2002-2011
Sensor Tech (Poland)
2005
Rapid progress in several high-tech industries has significantly increased the need for dimensional micro- and nano-metrology. Structures to be measured are becoming more complex with smaller structure widths higher aspect ratios increasingly larger surface regions potentially highly curved surfaces. Significant international effort can seen develop high-capacity measuring machines nanometre precision growing ranges up hundreds of millimetres. This paper begins an outline requirements...
High-precision metrology has emerged as an enabling technology for modern key technologies. Therefore, at the Technische Universität Ilmenau, a new nanopositioning and nanomeasuring machine NPMM-200 with measuring range of 200 mm × 25 mm, resolution 0.02 nm was developed. The represents great improvement extended three-dimensional Abbe comparator principle to achieve nanometre accuracy. All six degrees freedom mirror plate object are measured by fibre-coupled laser interferometers, signals...
With the nanopositioning and nanomeasuring machine (NPM-Machine) developed at Technische Universitat Ilmenau, subnanometre resolution nanometre uncertainty in a measuring volume of 25 × 5 mm3 have been demonstrated last few years. This allows most various problems to be solved. In practice, however, there are too many different requirements for sensing surfaces or detecting structures. So, this paper deals with development also improvement several optical tactile probes application...
One major advantage of additive manufacturing is the high freedom design, which supports fabrication complex structures. However, geometrical features such as combined massive volumes and cellular structures in parts can lead to an uneven heat distribution during processing, resulting different material properties throughout part. In this study, we demonstrate these effects, using a structure consisting three conic shapes with narrow cylinders between hindering flux. We manufacture via...
Abstract After an explanation of the set-up a nanomeasuring machine NMM-1, its high performance is described with metrological analysis. This analysis shows some today´s limits nanopositioning and engineering. Single, double triple beam plane mirror interferometers are applied in order to measure control six degrees freedom 3D stage. The various applications based on installation optical tactile nanoprobes above set-up, function measurement results zero-point combination explained.
Over the past decade a trend of component miniaturization can be observed both in industry and laboratory, which involves an increasing demand for nanopositioning nanomeasuring machines as well miniature tactile probes measuring complex three-dimensional objects. The challenge is that these components—for example, diesel injectors, microgears small optics—feature dimensions micrometre range with associated dimensional tolerances below 100 nm. For this reason, significant number research...
The nanopositioning and nanomeasuring machine NMM-1 developed at the Ilmenau University of Technology was designed for measurements within a measuring volume 25 × 5 mm3. interferometric length drive systems make it possible to move stage corner mirror with resolution 0.1 nm in all three axes. object being measured is placed on can be different probe systems. high precision attributed several factors. most important accuracy Starting short description an improved equation calculation, this...
The nanopositioning and nanomeasuring machine developed at the Ilmenau University of Technology was originally designed for surface measurements within a measuring volume 25 mm × 5 mm. interferometric length drive systems make it possible to move stage with resolution 0.1 nm positioning uncertainty less than 10 in all three axes. Various tasks are depending on installed probe system. Most sensors utilized one-dimensional probes; however, some require sidewalls other three-dimensional...
Severely damaged historical documents are extremely fragile. In many cases, their secrets remain concealed beneath cover. Recently, non-invasive digitization approaches based on 3-D scanning have demonstrated the ability to recover single pages or letters without need open manuscripts. This can even be achieved using conventional micro-CTs for synchrotron hardware. However, not all manuscripts may suited such techniques due material and X-ray properties. order recommend which inks best a...
Abstract Powder bed-based additive manufacturing has become increasingly important for industrial applications. In the light of this, qualitative considerations such as geometrical accuracy, resulting mechanical properties, and surface quality additively manufactured parts must be taken into account. Optical measuring techniques confocal laser scanning microscopy, fringe projection focus variation well profilometers are evaluated here, to determine powder parts. Even though these evaluation...
Continuously increasing demands on nanopositioning and nanomeasuring (NPM) machines require a detailed analysis of decrease in measurement uncertainty. Initial studies have been done the field length angle measurement. The resulted updated assemblies, which were investigated further. Significant improvements mechanical stability, drift behaviour temperature dependence produced. To minimize undesired heat production by non-self-locking vertical linear drive systems, an improved weight force...
Some time ago, an interferometer-based metrological scanning probe microscope (SPM) was developed at the Institute of Process Measurement and Sensor Technology Ilmenau University Technology, Germany. The specialty this SPM is combined deflection detection system that comprises interferometer a beam deflection. Due to it possible simultaneously measure displacement, bending torsion (cantilever). integrated into nanopositioning nanomeasuring machine (NPM machine) allows measurements with...
Processes of the new production technology sheet-bulk metal forming allow a fast and efficient near-net-shape highly complex parts. Thus need energy raw material as well cycle time can be reduced. In order to guarantee these advantages by avoiding scrap moreover ensure parts' geometrical requirements, production-related metrological solutions for an adapted inspection parts tools processes have developed. To fulfill demands differing measuring tasks two prototypical measurement are under...
Abstract The field of optical lithography is subject to intense research and has gained enormous improvement. However, the effort necessary for creating structures at size 20 nm below considerable using conventional technologies. This resulting financial requirements can only be tackled by few global companies thus a paradigm change semiconductor industry conceivable: custom design solutions specific applications will dominate future development (Fritze in: Panning EM, Liddle JA (eds) Novel...
Abstract Am Institut für Prozessmess- und Sensortechnik wird eine Nanomessmaschine die dreidimensionale Koordinatenmessung mit einem Messbereich von 25 mm x 5 einer Auflösung 1,24 nm entwickelt. Das Gerät schließt seiner seinem Gerätelücke in der Koordinatenmesstechnik. Drei Miniaturplanspiegelinterferometer, ein Antastsensor zwei Winkelsensoren werden so angeordnet, dass allen drei Koordinatenachsen abbefehlerfreie Messungen möglich sind. Anwendungsgebiet neuen ist Präzisionsvermessung...
Abstract Due to the increasing importance of reducing CO 2 emissions, lightweight construction strategies are highly emphasized in automotive industry. One these is moulding, which used, for example, space frame design. Here, materials joined with castings form a structure that well adapted application force. Especially multi-material joints, self-piercing riveting frequently used as joining technology due wide range possibilities and high load-bearing capacities. However, susceptibility...
This article presents a new robust, precise, high-frequency focal-distance-modulated confocal point sensor for probing in coordinate measuring systems (CMSs). While maintaining the known advantages of measurement principle, represents an innovative combination fiber-coupled illumination and detection with tuneable, acoustically driven gradient-index fluid lens modulation focus distance novel signal processing utilizing lock-in amplifier. The arrangement is able to achieve approximately...
Fringe projection profilometry in combination with other optical measuring technologies has established itself over the last decades as an essential complement to conventional, tactile devices. The non-contact, holistic reconstruction of complex geometries within fractions a second conjunction lightweight and transportable sensor design open up many fields application production metrology. Furthermore, triangulation-based principles feature good scalability, which led 3D scanners for various...