A5102957743- Advanced X-ray Imaging Techniques
- Nanofabrication and Lithography Techniques
- Force Microscopy Techniques and Applications
- Photonic and Optical Devices
- Advanced Electron Microscopy Techniques and Applications
- Advanced optical system design
- Metal and Thin Film Mechanics
- Advancements in Photolithography Techniques
- Advanced Surface Polishing Techniques
- Image Processing Techniques and Applications
- Adaptive optics and wavefront sensing
- Astrophysical Phenomena and Observations
- Optical and Acousto-Optic Technologies
- Optical Coatings and Gratings
- Digital Holography and Microscopy
- Laser Material Processing Techniques
- Crystallography and Radiation Phenomena
Technische Universität Ilmenau
2016-2021
Abstract The field of optical lithography is subject to intense research and has gained enormous improvement. However, the effort necessary for creating structures at size 20 nm below considerable using conventional technologies. This resulting financial requirements can only be tackled by few global companies thus a paradigm change semiconductor industry conceivable: custom design solutions specific applications will dominate future development (Fritze in: Panning EM, Liddle JA (eds) Novel...
Abstract Illumination with LEDs is of increasing interest in imaging and lithography. In particular, compared to lasers, are temporally spatially incoherent, so that speckle effects can be avoided by the application LEDs. Besides, LED arrays qualified due their high optical output power. However, have not been widely used for investigating effects, e.g., Lau effect. this paper, we propose an array realizing effect taking into account influence coherence properties illumination on Using...
Illumination is a crucial part of any optical device. Innovative design and illumination concepts enable compact systems for imaging sensing. We present examples sensors using freeform, adaptive or wavelength selective illumination.
Abstract The Fourier ptychographic microscopy (FPM) technique provides high-resolution images by combining a traditional imaging system, e.g. microscope or 4f-imaging with multiplexing illumination an LED array and numerical image processing for enhanced reconstruction. In order to numerically combine that are captured under varying angles, iterative phase-retrieval algorithm is often applied. However, in practice, the performance of FPM degrades due imperfections optical noise caused...
Two opto-mechatronic systems for optical measurements are proposed and realized. The first experimental setup is applied determining the temporal coherence of light sources. other system used to study Lau effect with a partially coherent source, which unconventional in Lau's experiment.