A5055536978- Advanced Measurement and Metrology Techniques
- Sensor Technology and Measurement Systems
- Scientific Measurement and Uncertainty Evaluation
- Piezoelectric Actuators and Control
- Force Microscopy Techniques and Applications
- Iterative Learning Control Systems
- Tribology and Lubrication Engineering
- Robotic Mechanisms and Dynamics
- Advanced Sensor Technologies Research
- Engineering Technology and Methodologies
- Advanced Surface Polishing Techniques
- Advanced machining processes and optimization
- Manufacturing Process and Optimization
- Advanced MEMS and NEMS Technologies
- Advanced optical system design
- Surface Roughness and Optical Measurements
- Semiconductor Lasers and Optical Devices
- Hydraulic and Pneumatic Systems
- Soft Robotics and Applications
- Engineering and Materials Science Studies
- Lubricants and Their Additives
- Nanofabrication and Lithography Techniques
- Optical Coatings and Gratings
- Transport Systems and Technology
- Laser Material Processing Techniques
Technische Universität Ilmenau
2016-2025
A dual-state reflective optical relay system based on the Alvarez is proposed, which can be used for remote sensing applications. By incorporating a double freeform subsystem into Three-Mirror Anastigmat telescope (TMA) with an intermediate image plane, two different object fields imaged within single system. Using mechanically moved mirror substrates, this enables discrete change in focal length. Featuring compact structure only moving parts, mirrors and nearly diffraction limited...
Abstract The 2019 redefinition of the kilogram not only changes way mass is defined but also broadens horizon for a direct realization other standards. true becquerel project at national institute standards and technology creating new paradigm dissemination radionuclide activity. Standard reference materials radioactivity are supplied as aqueous solutions specific radionuclides which characterized by massic activity in units per gram solution, Bq/g. method requires measuring few milligrams...
Abstract A new Kibble balance is being built at the National Institute of Standards and Technology (NIST). For first time in one highly accurate versions this type balance, a single passive flexure mechanism used for both modes operation: weighing mode velocity mode. The core design as it represents paradigm shift NIST away from using knife edge-based mechanisms, which exhibit hysteresis measurement procedure Mechanical may be limiting factor performance balances approaching digit nanonewton...
According to the common body of knowledge, aerostatic bearings invariably need narrow manufacturing tolerances ensure maximal load capacity and high stiffness. This study experimentally investigates porous material effect parameters on performance properties bearings. During study, samples were manufactured using different methods, geometrical each sample inspected. The bearing measurement device developed during is introduced. results present dependence between under varying operating...
An analytical model that considers the static behaviour of weighing cells based on principle electromagnetic force compensation (EMFC) is presented. With this model, adjustment strategies for stiffness and tilt sensitivity EMFC are derived. These parameters known as limiting factors achievable measurement uncertainty respectively. In order to obtain equations system, linear rigid-body assumed. The results obtained with compared from multi-body simulations. It shown that, considered an...
Abstract The field of optical lithography is subject to intense research and has gained enormous improvement. However, the effort necessary for creating structures at size 20 nm below considerable using conventional technologies. This resulting financial requirements can only be tackled by few global companies thus a paradigm change semiconductor industry conceivable: custom design solutions specific applications will dominate future development (Fritze in: Panning EM, Liddle JA (eds) Novel...
Compliant mechanisms based on flexure hinges are widely used in precision engineering applications. Among those devices such as balances and mass comparators with achievable resolutions uncertainties the nano-newton range. The exact knowledge of mechanical properties notch their modeling is essential for design goal-oriented adjustment these devices. It shown this article that many analytical equations available literature calculating bending stiffness thin semi-circular cause deviations up...
Cross-spring pivots have been widely employed over the last decades in a broad variety of precision engineering applications due to high motion repeatability achieved thanks absence stick slip and clearance. In this paper, non-linear effect anticlastic curvature leaf-springs is considered for accurate analytical modeling elasto-kinematic behavior cross-spring pivots. Finite element analyses (FEA), based on thin-shell model, are carried out order compare them with results main performance...
Abstract. Compliant mechanisms in precision weighing technology are highly sensitive mechanical systems with continuously rising demands for performance terms of resolution and measurement uncertainty. The systematic combination adjustment measures represents a promising option the enhancement cells which is not yet fully exhausted. A novel concept electromagnetic force compensated designed 1 kg mass standards introduced. effect on behavior analyzed detail using planar compliant mechanism...
A novel, to the best of our knowledge, dual-state reflective optical relay system based on Alvarez is proposed, which can be used for remote sensing applications. By keeping image and pupil positions constant, it combined with a telescope achieve two different magnifications. As compact structure only moving parts, freeform mirrors nearly diffraction limited performance infrared wavelength 8 µm make an attractive subsystem space Different design tradeoffs preferred layout properties are...
Zusammenfassung Die stetig voranschreitende Entwicklung im Bereich der Fertigung optischer und elektronischer Elemente auf Basis von Nanotechnologien führt seit Jahren zu einer steigenden Nachfrage nach hochpräzisen Nanomess- Nanofabrikationsmaschinen (The International Roadmap For Devices And Systems, IEEE, 2020; C. Grant Willson and B. J. Roman, “The future of lithography: SEMATECH litho forum 2008,” ASC Nano , vol. 2, no. 7, pp. 1323–1328, 2008). Als technologisch besonders anspruchsvoll...
Porous aerostatic bearings and seals offer several advantages in precision engineering applications. The static performance of elements, i.e., seals, is investigated both experimentally numerically. This study presents a method, test setup, measurement the air gap pressure distribution with high spatial temporal resolution. experimental results are compared to numerical model based on modified Reynolds equation. also load capacity, height, stiffness, consumption, distribution. Furthermore,...
Abstract We studied the anelastic aftereffect of a flexure being used in Kibble balance, where is subjected to large excursion velocity mode after which high-precision force comparison performed. investigated effect constant and sinusoidal on comparison. explored theoretically experimentally simple erasing procedure, i.e. bending opposite direction for given amplitude time. found that procedure reduced time-dependent by about 30%. The investigation was performed with an analytical model...
Aerostatic bearings are typically used in ultra precision and high speed applications controlled environments. The present study expands this operating domain. experimentally investigates the performance feasibility of a novel design for robust air bearing consisting an aerostatically sealed pressurized volume. A suitable domain system was characterized based on measurements load capacity, friction moment, chamber flow, seal flow rate at various opposing surface run-outs supply pressures....
The ``Quantum Electro-Mechanical Metrology Suite'' (QEMMS) is being designed and built at the National Institute of Standards Technology. It includes a Kibble balance, Graphene quantum Hall resistance array Josephson voltage system, so that it new primary standard for unit mass, kilogram, directly traceable to International System Units (SI) based on constants. We are targeting measurement range 10 g 200 optimize design relative combined uncertainty $2\times 10^{-8}$ masses 100 g. QEMMS will...
Abstract The majority of nanopositioning and nanomeasuring machines (NPMMs) are based on three independent linear movements in a Cartesian coordinate system. This combination with the specific nature sensors tools limits addressable part geometries. An enhancement an NPMM is introduced by implementation rotational while keeping precision nanometer range. For this purpose, parameter-based dynamic evaluation system quantifiable technological parameters has been set up employed to identify...