A5072782137- Ion-surface interactions and analysis
- Electron and X-Ray Spectroscopy Techniques
- Integrated Circuits and Semiconductor Failure Analysis
- Advanced Electron Microscopy Techniques and Applications
- Electrochemical Analysis and Applications
- Diamond and Carbon-based Materials Research
- Advancements in Semiconductor Devices and Circuit Design
- Advanced Materials Characterization Techniques
- Analytical chemistry methods development
- Mass Spectrometry Techniques and Applications
- Silicon and Solar Cell Technologies
- Electronic and Structural Properties of Oxides
- Advancements in Photolithography Techniques
Tescan (Czechia)
2024
Helmholtz-Zentrum Dresden-Rossendorf
2020-2022
TU Dresden
2020
Over the last few decades, nanoparticles have become a key element in number of scientific and technological fields, spanning from materials science to life sciences. The characterization or samples containing nanoparticles, terms morphology, chemical composition, other parameters, typically involves investigations with various analytical tools, requiring complex workflows extending duration such studies several days even weeks. Here, we report on development new unique situ correlative...
A detection system based on a microchannel plate with delay line readout structure has been developed to perform scanning transmission ion microscopy (STIM) in the helium microscope (HIM). This is an improvement over other existing approaches since it combines information of beam position sample (scattering angle) and time events. Various imaging modes, such as bright field dark or direct image transmitted signal, can be created by post-processing collected STIM data. Furthermore, detector...
Abstract The role of scanning transmission electron microscopy (STEM) in failure analysis has been growing since the introduction advanced technology nodes (10-nm and beyond), which transistors (FinFET nanosheets) have become much smaller more complex. Four-dimensional (4D-STEM) is a new diffraction technique that expands conventional STEM imaging EDX mapping to enable phase orientation crystalline amorphous phases deposited thin films at nanometer resolution. enhancement data by beam...
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A newly developed microscope prototype, namely npSCOPE, consisting of a Gas Field Ion Source (GFIS) column and position sensitive Delay-line Detector (DLD) was used to perform Scanning Transmission Microscopy (STIM) using keV He+ ions. One experiment 25 ions second 30 STIM imaging 50 nm thick free-standing gold membrane exhibited excellent contrast due ion channelling revealed rich microstructural features including isolated nanoscale twin bands which matched well with the in conventional...
A detection system based on a microchannel plate with delay line readout structure has been developed to perform scanning transmission ion microscopy (STIM) in the helium microscope (HIM). This is an improvement over other existing approaches since it combines information of beam position sample (scattering angle) and time events. Various imaging modes such as bright dark field or direct image transmitted signal can be created by post-processing collected STIM data. Furthermore, detector...
An abstract is not available for this content so a preview has been provided. As you have access to content, full PDF via the ‘Save PDF’ action button.
An abstract is not available for this content so a preview has been provided. As you have access to content, full PDF via the ‘Save PDF’ action button.