This paper reports a three degree-offreedom (3DoF) microelectromechanical systems (MEMS) resonant sensing device consisting of weakly coupled resonators with enhanced sensitivity to stiffness change.If one resonator the system is perturbed by an external stimulus, mode localization occurs, which can be detected change modal amplitude ratio.The perturbation be, for example, in resonator.A detailed theoretical investigation revealed that aliasing effect, along thermal noise floor sensor and...

In this paper, we present the strongly nonlinear behavior of a 2-degree-of-freedom weakly coupled microelectromechanical systems (MEMS) resonator system in mixed regime, using closed-loop phase feedback oscillator approach. Three out four bifurcation points within system, with both electrical and mechanical nonlinearities, were revealed. Furthermore, are able to study amplitude frequency stabilities resulting when biased at points. Specifically, discover that, as compared linear case, orders...

An electrostatically actuated non-linear microelectromechanical systems (MEMS) resonator can describe double hysteresis behavior in the measured frequency response due to interplay between electrical and mechanical non-linearities system. This paper provides first experimental mapping of stable unstable branches a MEMS describing hysteretic using closed-loop phase feedback oscillator. Furthermore, stability oscillator is compared for varying amplitude conditions, it experimentally...

This paper systematically investigates the characteristics of different output metrics for a weakly coupled three degree-of-freedom microelectromechanical systems resonant sensor. The key figures-of-merit examined are sensitivity and linear range. four main investigated mode frequency shift, amplitude difference, ratio, eigenstate shift. It is shown from theoretical considerations, equivalent RLC circuit model simulations electrical measurements, that there strong tradeoff between For...

This letter presents the first experimental results on closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between oscillator approach and open-loop frequency sweep show good agreement output metrics including amplitude ratios mode frequencies. new enables real-time measurements using emerging resonant sensors represents an important step toward realizing based this measurement principle.

This paper reports on a novel MEMS resonant sensing device consisting of three weakly coupled resonators that can achieve an order magnitude improvement in sensitivity to stiffness change, compared current state-of-the-art resonator sensors with similar size and frequency. In 3 degree-of-freedom (DoF) system, if external stimulus causes change the spring one resonator, mode localization occurs, leading drastic shape, which be detected by measuring modal amplitude ratio change. A 49 times...

This work reports a multiple-parameter decoupling (MPD) method based on resonant MEMS sensors subject to blue-sideband excitation (BSE), thus enabling simultaneous separation of the cross-coupled physical quantities, e.g. acceleration and temperature, single sensor. Such technique exploits property BSE that multiple vibration modes resonator can be excited at same time. The proposed MPD algorithm is applied two distinct sensors, i.e. base-line electrostatic force sensor, vacuum-packaged...

As a vital component of mining hoisting equipment, wire rope (MWR) is critical in the operation mine. Once damaged, it very easy to cause loss life and property. Therefore, meaningful identify damage MWR, especially weak identification. This paper proposes method based on continuous wavelet transform (CWT) convolutional neural network (CNN) model for MWR degree Firstly, signals with different degrees were acquired. Secondly, CWT data augmentation performed original obtain time-frequency...

This letter presents the first experimental results on closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between oscillator approach and open-loop frequency sweep show good agreement output metrics including amplitude ratios mode frequencies. new enables real-time measurements using emerging resonant sensors represents an important step toward realizing based this measurement principle.

Abstract. We report a new class of MEMS resonant potential sensor based on the mode localization effect using 3-degree-of-freedom (DoF) electrically weakly coupled resonator system. As opposed to previously reported 2DoF mode-localized sensors, it can be shown in theory that 3DoF structure has an improved sensitivity without sacrificing signal transduction, addition reduced nonideal with regard vibration amplitudes and motional currents. Experimentally, also been several orders magnitude...

This paper, for the first time, investigates characteristics of different output metrics a three degree-of-freedom (DoF) coupled resonator sensor. The main aspects examined are sensitivity and linear range. It is shown from theoretical estimations, equivalent RLC circuit model simulations electrical measurements that using vibration amplitude ratio as an signal provides improved linearity range, compared to other methods such shift in eigenstate, mode frequency or difference.

This letter conducts a thorough comparison between two temperature compensation methods for resonant micro-electro-mechanical-system (MEMS) sensors, i.e., 1) newly proposed in-situ technique based on multiple parameter decoupling (MPD) using single MEMS sensor subject to blue-sideband excitation, and 2) the prevailing method utilizing sensor, which, in this letter, is thermometer close vicinity of sensor. Experimental results show that MPD-based offers better noise performance, long-term...

If a pair of MEMS resonators is electrostatically coupled together, the vibration amplitude ratios at resonant frequencies resulting system are sensitive to stiffness perturbation. An imbalance between two causes confinement energy when resonating, an effect known as mode localization. The degree localization can be determined by extracting ratio through capacitive transduction. In this paper, we have fabricated devices, using dicing-free silicon-on-insulator process, consisting pairs...

Abstract The ‘cognitive buffer’ hypothesis predicts that the costs of relatively large brains are compensated for later in life by increased benefits providing a higher chance survival under changing environments through flexible behaviors animal kingdom. Thus, animals live larger range (with probability environmental variation) expected to have than those restricted geographic range. Here, test prediction should be occur species living ranges size, we analyzed relationship between size and...

For the first time, we investigate a self-oscillating control loop for three degree-of-freedom (DoF) weakly coupled MEMS resonator sensor force sensing applications. This is an important step towards real-time measurements using such sensor. The simulated results successfully demonstrated that, without any external drive signals, proposed able to automatically lock desired mode frequency amplitude ratios from simulation showed good agreement with theoretical values.

By combining three-dimensional panorama technology with geometric modeling technology, the models of primary and secondary equipment substations are built to get a (3D) virtual environment. This method makes it easy view equipments improves integration substation monitoring information. paper analyzes discusses two kinds solutions which based on Virtual Reality Modeling Language (VRML) Open Scene Graph (OSG) together Qt as main technologies.

The mode-localization effect exhibited in electrostatically-coupled microelectromechanical systems (MEMS) resonators was demonstrated using a pair of rectangular clamped-clamped beams that were fabricated silicon-on-insulator (SOI) based process. response the amplitude ratio resonating at fundamental mode frequencies to change stiffness one characterized. Beams with different widths and tested, up 13 times improvement sensitivity relative being reported for device 20 μιη widths, compared 10...

This work reports an intriguing phenomenon discovered when subjecting a differential resonant MEMS accelerometer to blue sideband excitation (BSE). The exhibited behavior is similar that of phononic frequency combs (PFCs). experimental data presents PFC-like spectrum response, with collection equidistant fingers employing BSE. spacing the in induced comb are unaffected by variations BSE parameters (i.e., and amplitude), as well equivalent input acceleration. On other hand, amplitudes...

<title>Abstract</title> Mining wire rope (MWR) is an important part of mine hoisting equipment and plays a key role in mining operations. Damage to these ropes can significantly reduce production efficiency pose serious safety risks workers. Therefore, quantitatively identifying damage MWR great importance. Traditional methods for signal identification rely on manual feature extraction (MFE), which depends heavily experience lacks stability flexibility. This paper proposes end-to-end (E2E)...