This paper reports an acceleration sensing method based on two weakly coupled resonators (WCRs) using the phenomenon of mode localization. When acts proof masses, differential electrostatic stiffness perturbations will be applied to WCRs, leading localization, and thus, shape changes. Therefore, can sensed by measuring amplitude ratio shift. The proposed localization with perturbation leads a sensitivity enhancement factor 2 than common single method. theoretical model sensitivity,...

In this paper, a handheld inertial pedestrian navigation system (IPNS) based on low-cost microelectromechanical sensors is presented. Using the machine learning method of support vector machine, multiple classifier developed to recognize human step modes and device poses. The accuracy selected >85%. A novel detection model created results eliminate over-counting under-counting errors. presented detector >98%. Based improvements recognition detection, IPNS realized precise tracking using dead...

This paper reports a high-sensitivity resonant electrometer based on the mode localization of two degree-of-freedom weakly coupled resonators (WCRs). When charges are applied to input electrodes, effective stiffness specific resonator WCRs will be perturbed, leading drastic change in shape owing phenomenon. By measuring shift amplitude ratio, small charge fluctuation can accurately sensed. The theoretical is established transfer functions WCRs. In particular, we establish design rules...

Abstract Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management generated high-voltage for practical low-voltage applications is still under investigation. Autonomous switches are key elements improving harvested per cycle, but they complicated implement at such voltages higher than several hundreds volts. This paper proposes a self-sustained and automatic...

Mode-localized sensors have attracted attention because of their high parametric sensitivity and first-order common-mode rejection to temperature drift. The high-fidelity detection resonator amplitude is critical determining the resolution mode-localized where measured ratio in a system coupled resonators represents output metric. Operation at specific bifurcation points nonlinear regime can potentially improve bias stability; however, scale factor input measurand has not been fully...

Phononic frequency combs represent the mechanical analog of optical combs. Several independent experimental studies have demonstrated onset and evolution comb response in a variety micro- nanoelectromechanical devices recent years. A theoretical basis for exploring understanding conditions generation with varying driving parameters is essential to enable future practical applications. Here, we present comparison between modeling results on mechanism phononic nonlinear micromechanical...

Abstract The mode localization phenomenon of disordered weakly coupled resonators (WCRs) is being used as a novel transduction scheme to further enhance the sensitivity micromechanical resonant sensors. In this paper, two characteristics are described. First, we found that anti-resonance loci behave linear function stiffness perturbation. behavior can be regarded new manifestation in frequency domain, and occurs at deeper level approaches closer resonance. identify symmetry WCRs locations...

This paper experimentally demonstrates the ambient pressure drift rejection capability in full measurement range of mode-localized sensors. Based on a resonant stiffness sensor, experimental results show that maximum error amplitude ratio readout is ~2.74% whereas frequency ~21.63% with [2.6, 20] Pa. And based sensitivity averagely ~1970.3 times higher than sensitivity. It can be concluded sensors not only amplify but also reject drift.

Thermal-actuation and piezoresistive-detection effects have been employed to pump the effective quality factor of MEMS resonators, targeting simple self-oscillation better sensing performance in air. However, ratio pumped inherent mechanical factor, crucial for characterizing amplification, is hard obtain. The main difficulty stems from hidden Lorentz peaks caused by feedthrough effect once current applied. In this paper, we demonstrated presence high-order harmonic components output...

Influences of the feedthrough capacitance on weakly coupled micromechanical resonators are theoretically analyzed and experimentally observed using current vector analysis Nyquist plots method for first time. By analyzing equivalent electric model with capacitance, it is found that existence will lead to frequency asynchronization measurement error amplitude ratio mode localization based sensors. The variations transmission responses influence demonstrated. became less than 2.3 ppm, down...

An ultra-sensitive mode-localized accelerometer is reported in this letter. In order to lower the coupling factor of coupled resonators thus improving parametric amplitude ratio sensitivity, a stiff anchor support employed as mechanical coupler between resonators. A 7.4 × 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-5</sup> was obtained, which so far lowest that has been for weakly MEMS sensors. As result, proposed demonstrates an...

This paper describes a novel electrostatically actuated microgripper with freeform geometries designed by genetic algorithm. new semiautomated design methodology is capable of designing near-optimal MEMS devices that are robust to fabrication tolerances. The use algorithm significantly improves the performance microgripper. An experiment shows has large displacement (91.5 μm) low actuation voltage (47.5 V), which agrees well theory. and can handle micro-objects size from 10 100 μm. A...

This paper reports a resonant MEMS tilt sensor based on mode localization phenomenon for the first time. The consists of two accelerometers which are perpendicular to each other. input angle will cause dramatic changes shape both accelerometers. Furthermore, linear measurement range is extended full-range [-90°, 90°] by alternatively measuring shifts amplitude ratios with phase difference 90°. Current test results show that relative sensitivity ratio averagely 169 times higher than frequency...

This paper reports a precision mode-localized accelerometer operating in higher-order flexural mode. The consists of two symmetric resonators coupled by central rigid coupler to generate an ultra-weak coupling factor. A reduced noise floor is observed when the operate mode compared basic lower-order working fifth-order demonstrates input-referred bias instability 130 ng and 85 ng/ √Hz, which are best results obtained for accelerometers employing localization paradigm date. These indicate...

In this work, a zeolitic imidazolate framework-8 (ZIF-8)-coated coupled resonant sensor was fabricated using solvent-free method. The method avoids the use of solvents for ZIF-8 synthesis, which eliminates risk device contamination, corrosion, or destruction. This process enables batch fabrication ZIF-8-coated resonators at wafer level. By tracking shifts in frequency and amplitude ratio, demonstrates strong responses to ethanol vapor different concentrations exhibits good reversible...

Miniaturized physical transducers based on weakly coupled resonators have previously demonstrated the twin benefits of high parametric sensitivity and first-order common-mode rejection environmental effects. Current approaches to sensing resonator employ strong coupling where modal overlap responses is avoided. This limits for such mode-localized sensors that utilize an amplitude ratio (AR) output metric as opposed tracking resonant frequency shifts. In this article, limitation broken...

This article reports a mode-localized mass sensor based on thermal-actuation piezoresistive-detection self-oscillated weakly coupled resonators. Detailed theoretical models and simulations of the self-oscillation resonators were established also verified using optical electrical measurements. The was fabricated characterized in terms stability, linearity, sensitivity, resolution. Supplied with only constant direct current (DC), resonant could oscillate at its frequency an ultrahigh quality...

This paper reports a high-sensitive MEMS resonant electrometer based on mode localization of two weakly coupled resonators (WCRs). In the electrometer, small electric charge input will cause stiffness perturbation to one resonator WCRs, leading drastic change shape owing phenomena. By measuring shift amplitude ratio, fluctuation can be accurately sensed. The experimental results show that with 144fC relative sensitivity ratio is 663751ppm, which -2341 times higher than frequency (283.56ppm).