A5067559568- Photonic and Optical Devices
- Advanced MEMS and NEMS Technologies
- Mechanical and Optical Resonators
- Advanced Fiber Optic Sensors
- Semiconductor Lasers and Optical Devices
- Acoustic Wave Resonator Technologies
- Gas Sensing Nanomaterials and Sensors
- Metamaterials and Metasurfaces Applications
- Innovative Energy Harvesting Technologies
- Nanowire Synthesis and Applications
- Thermal Radiation and Cooling Technologies
- Advanced Surface Polishing Techniques
- Electrowetting and Microfluidic Technologies
- Advanced Sensor and Energy Harvesting Materials
- Silicon Nanostructures and Photoluminescence
- Optical Coatings and Gratings
- Microfluidic and Capillary Electrophoresis Applications
- Advanced Antenna and Metasurface Technologies
- Photonic Crystals and Applications
- Energy Harvesting in Wireless Networks
- Analytical Chemistry and Sensors
- Latin American Urban Studies
- Innovative Approaches in Technology and Social Development
- Thin-Film Transistor Technologies
- Microfluidic and Bio-sensing Technologies
Laboratoire d'électronique, systèmes de communication et microsystèmes
2016-2025
Université Gustave Eiffel
2016-2025
Centre National de la Recherche Scientifique
1997-2025
UniLaSalle Amiens (ESIEE-Amiens)
2016-2025
Nanyang Technological University
2008-2025
ESIEE Paris
2015-2024
Heliopolis University
2013-2023
Conservatoire National des Arts et Métiers
2013-2022
Changchun Institute of Optics, Fine Mechanics and Physics
2021
Chinese Academy of Sciences
2021
A switchable magnetic metamaterial is demonstrated via reshaping micromachined molecules. It experimentally verified that the effective permeability can be switched from negative to positive near resonant frequency. The micromachining technology offers a powerful platform for metamaterials and provides more degrees of freedom design, easy fabrication, large tunability.
Dichroic polarizers and waveplates exploiting anisotropic materials have vast applications in displays numerous optical components, such as filters, beamsplitters isolators. Artificial media were recently suggested for the realization of negative refraction, cloaking, hyperlenses, controlling luminescence. However, extending these into terahertz domain is hampered by a lack natural media, while artificial metamaterials offer strong engineered response. Here we demonstrate metamaterial with...
In the context of global water scarcity, vapor available in air is a non-negligible supplementary fresh resource. Current and potential energetically passive procedures for improving atmospheric harvesting (AWH) capabilities involve different strategies dedicated materials, which are reviewed this paper, from perspective morphology wettability optimization, substrate cooling, sorbent assistance. The advantages limitations AWH respectively discussed, as well their performance. various...
Different processes involving an inductively coupled plasma reactor are presented either for deep reactive ion etching or isotropic of silicon. On one hand, high aspect ratio microstructures with up to 107 were obtained on sub-micron trenches. Application photonic MEMS is presented. Isotropic also used alone in combination anisotropic realize various 3D shapes.
This paper presents a novel silicon-based and batch-processed MEMS electrostatic transducer for harvesting converting the energy of vibrations into electrical without using an electret layer. Effective conversion from mechanical-to-electric domains 61 nW on 60 MΩ resistive load, under vibration level 0.25 g at 250 Hz, has been demonstrated. Rigorous analysis efficiency harvester is presented, covering issues related with mechanical operation. Various schemes conditioning electronics are...
This paper presents an advanced study including the design, characterization and theoretical analysis of a capacitive vibration energy harvester. Although based on resonant electromechanical device, it is intended for operation in wide frequency band due to combination stop-end effects strong biasing electrical field. The electrostatic transducer has interdigited comb geometry with in-plane motion, obtained through simple batch process using two masks. A continuous conditioning circuit used...
Metasurface absorbing material, which obtains near‐unity electromagnetic absorption through subwavelength artificial structure, plays an important role in the area of stealth and shielding technology, biological imaging, etc. However, they usually suffer from narrow bandwidth only work on planar surfaces. Here, for first time, this study demonstrates a soft water‐resonator‐based metasurface, functions as active material across ultrabroadband range Ku, K, Ka bands. Distinct conventional...
Metastasis is the main cause of cancer mortality. During this process, cells dislodge from a primary tumor, enter circulation and form secondary tumors in distal organs. It poorly understood how these manage to cross tight syncytium endothelial that lines capillaries. Such capillary transmigration would require drastic change cell shape. We have therefore developed microfluidic platform study cells. The device consists an array microchannels mimicking confined spaces encountered. A thin...
Abstract Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management generated high-voltage for practical low-voltage applications is still under investigation. Autonomous switches are key elements improving harvested per cycle, but they complicated implement at such voltages higher than several hundreds volts. This paper proposes a self-sustained and automatic...
Abstract The integration of microactuators within a silicon photonic chip gave rise to the field optical micro‐electro‐mechanical systems (MEMS) that was originally driven by telecommunication market. Following latter's bubble collapse in beginning third millennium, new directions research with considerable momentum appeared focusing on realization and applications miniaturized instrumentation biology, chemistry, physics materials science. At heart these light interferometry is key...
Abstract This paper reports fast and efficient chemical decontamination of water within a tree-branched centimeter-scale microfluidic reactor. The microreactor integrates Zinc oxide nanowires (ZnO NWs) in situ grown acting as an photocatalytic nanomaterial layer. Direct growth ZnO NWs the chamber brings this medium at very close vicinity flow path, hence minimizing required interaction time to produce purification performance. We demonstrate degradation efficiency 95% <5 s residence...
The design of a micropump employing only one valve is presented. This device was simulated by means model based on electrical analogies and equivalent networks. With total size , working voltage 10 V, the sizing gives flow rates in - 100 range, which are very suitable for drug-delivery applications.
The aim of this paper is to present a rapid modeling method for micropumps, based on electrical analogies and equivalent networks. different parts pump are modelled by means lumped elements which calculated using appropriate formulae. These linked together constitute network describes the entire electromechanical system. networks built were implemented in an simulation tool analysis. In case pneumatic actuation, was validated qualitative quantitative comparison with results obtained another...
Motivated by the need for obtaining low reflectivity silicon surfaces, we report on (sub-) micro-texturing of using a high throughput fabrication process involving SF6/O2 reactive ion etching at cryogenic temperatures, leading to Black Silicon (BS). The corresponding aspect ratio conical spikes microstructured surface give rise multiple reflections and hence, enhanced absorption under electromagnetic radiation. Aiming better understanding this mechanism, performed systematic study varying...
We experimentally demonstrated a polarization dependent state to independent change in terahertz (THz) metamaterials. This is accomplished by reconfiguring the lattice structure of metamaterials from 2-fold 4-fold rotational symmetry using micromachined actuators. In experiment, it measures resonance frequency shift 25.8% and 12.1% for TE TM polarized incidence, respectively. Furthermore, single-band dual-band switching also demonstrated. Compared with previous reported tunable...
In this paper, for the first time, an on-chip optofluidic imaging system is innovated to measure biophysical signatures of single waterborne bacteria, including both their refractive indices and morphologies (size shape), based on immersion refractometry. The key features proposed platform include (1) multiple sites single-bacterium trapping, which enable parallel measurements achieve higher throughput, (2) a chaotic micromixer, enables efficient index variation surrounding medium....
Bistable piezoelectric generators have been demonstrated to outperform linear spring–mass–damper systems in terms of frequency bandwidth and harvested power from wideband vibrations. In this work, a nonlinear vibration energy harvester consisting clamped–clamped buckled beams combined with four-pole magnet across coil generator is investigated. By buckling the support beams, an elastic Duffing potential provided so that seismic mass can pass being dynamically monostable bistable. A...
Miniaturized optical benches process free-space light propagating in-plane with respect to the substrate and have a large variety of applications, including coupling through an fiber. High efficiency is usually obtained using assembled micro-optical parts, which considerably increase system cost integration effort. In this work, we report high efficiency, monolithically integrated silicon micromirror controlled three-dimensional (3D) curvature that capable manipulating beams in plane...
Abstract Optical spectrometers enable contactless chemical analysis. However, decreasing both their size and cost appears to be a prerequisite widespread deployment. Chip-scale implementation of optical still requires tackling two main challenges. First, operation over broad spectral range extending the infrared is required covering molecular absorption spectrum variety materials. This addressed in our work with an Micro-Electro Mechanical Systems (MEMS)-based Fourier transform spectrometer...
Microplastics contaminating drinking water is a growing issue that has been the focus of few recent studies, where major bottleneck time-consuming analysis. In this work, micro-optofluidic platform proposed for fast quantification microplastic particles, identification their chemical nature and size, especially in 1-100 µm size range. Micro-reservoirs ahead micro-filters are designed to accumulate all trapped solid particles an ultra-compact area, which enables imaging optical spectroscopy...
Microplastics are particulate water contaminants that raising concerns regarding their environmental and health impacts. Optical spectroscopy is the gold standard for detection; however, it has severe limitations such as tens of hours analysis time spatial resolution more than 10 μm, when targeting production a 2D map microparticle population. In this work, through single spectrum acquisition, we aim at quickly getting information about whole population identical particles, chemical nature,...