A5071131263- Neuroscience and Neural Engineering
- Advanced Memory and Neural Computing
- EEG and Brain-Computer Interfaces
- Mechanical and Optical Resonators
- Diamond and Carbon-based Materials Research
- Advanced MEMS and NEMS Technologies
- Acoustic Wave Resonator Technologies
- Drilling and Well Engineering
- Analytical Chemistry and Sensors
- Hydraulic Fracturing and Reservoir Analysis
- Force Microscopy Techniques and Applications
- Muscle activation and electromyography studies
- Advanced Chemical Sensor Technologies
- Microfluidic and Bio-sensing Technologies
- Microwave Engineering and Waveguides
- Photoreceptor and optogenetics research
- Advanced Sensor and Energy Harvesting Materials
- Microfluidic and Capillary Electrophoresis Applications
- Neurological disorders and treatments
- Methane Hydrates and Related Phenomena
- Neural dynamics and brain function
- Retinal Development and Disorders
- Enhanced Oil Recovery Techniques
- Gas Sensing Nanomaterials and Sensors
- Conducting polymers and applications
UniLaSalle Amiens (ESIEE-Amiens)
2014-2025
Université Gustave Eiffel
2014-2025
Laboratoire d'électronique, systèmes de communication et microsystèmes
2016-2025
Centre National de la Recherche Scientifique
2015-2024
Conservatoire National des Arts et Métiers
2023-2024
ESIEE Paris
2006-2023
Laboratoire Ville Mobilité Transport
2019
ESI Group (France)
2006-2017
Commissariat à l'Énergie Atomique et aux Énergies Alternatives
1999-2017
Centre d'études de l'emploi
2016
Different processes involving an inductively coupled plasma reactor are presented either for deep reactive ion etching or isotropic of silicon. On one hand, high aspect ratio microstructures with up to 107 were obtained on sub-micron trenches. Application photonic MEMS is presented. Isotropic also used alone in combination anisotropic realize various 3D shapes.
We experimentally demonstrate the high-sensitivity optical monitoring of a micro-mechanical resonator and its cooling by active control. Coating low-loss mirror upon resonator, we have built an optomechanical sensor based on very high-finesse cavity (30000). measured thermal noise with quantum-limited sensitivity at 10^-19 m/rootHz level, cooled down to 5K cold-damping technique. Applications our setup range from quantum optics experiments experimental demonstration ground state macroscopic...
The electrode material is a key element in the design of long-term neural implants and neuroprostheses. To date, ideal offering high longevity, biocompatibility, low-noise recording stimulation capabilities remains to be found. We show that 3D-nanostructured boron doped diamond (BDD), an innovative consisting chemically stable with aspect ratio structure obtained by encapsulation carbon nanotube template within two BDD nanolayers, allows cell attachment, survival neurite extension. Further,...
Establishing a reliable communication interface between the brain and electronic devices is of paramount importance for exploiting full potential neural prostheses. Current microelectrode technologies recording electrical activity, however, evidence important shortcomings, e.g. challenging high density integration. Solution-gated field-effect transistors (SGFETs), on other hand, could overcome these shortcomings if suitable transistor material were available. Graphene particularly attractive...
Graphene solution-gated field-effect transistors (SGFETs) are a promising platform for the recording of cell action potentials due to intrinsic high signal amplification graphene transistors.In addition, technology fulfills important key requirements in-vivo applications, such as biocompability, mechanical flexibility, well ease density integration.In this paper we demonstrate fabrication flexible arrays SGFETs on polyimide, biocompatible polymeric substrate.We investigate transistor's...
The fluctuations of the vortex density in a turbulent quantum fluid are deduced from local second-sound attenuation measurements. These measurements performed with micromachined open-cavity resonator inserted across flow He-II near 1.6 K. frequency power spectrum measured line is compatible (−5/3) law. physical interpretation discussed.
Neural implants allow to decipher brain functions as well design brain–computer interfaces that aim compensate for the loss of after a injury. After two decades development worldwide, efficiency recording/stimulating is now sufficient consider their transfer clinical applications. Nevertheless, this translation slowed down by lack proof long‐term efficacy. Consequently, strong research effort currently dedicated obtain devices can record and stimulate decades. The major sources failure are...
Three-dimensional electrode geometries were proposed to increase the spatial resolution in retinal prostheses aiming at restoring vision blind patients. We report here results from a study which finite-element modeling was used design and optimize three-dimensional geometries. Proposed implants exhibit an array of well-like shapes containing stimulating electrodes their bottom, while common return grid surrounds each well on implant top surface. Extending and/or walls cavities also...
Microelectrode arrays (MEAs) are appealing tools to probe large neural ensembles and build prostheses. Microelectronics microfabrication technologies now allow building high-density MEAs containing several hundreds of microelectrodes. However, major problems become limiting factors when the size microelectrodes decreases. In particular, regarding recording activity, intrinsic noise level a microelectrode dramatically increases becomes small (typically below 20-μm diameter). Here, we propose...
We report on the fabrication and characterization of an 8 × multichannel Boron Doped Diamond (BDD) ultramicro-electrode array (UMEA). The device combines both assets microelectrodes, resulting from conditions in mass transport bulk solution toward electrode, BDD's remarkable intrinsic electrochemical properties. UMEAs were fabricated using original approach relying selective growth diamond over pre-processed 4 inches silicon substrates. prepared characterized by cyclic voltammetry (CV)...
Summary Oil-based muds (OBMs) are complex fluids composed of water, oil, organophilic clays, and various additives. Their very good filtration lubricating properties make their use beneficial in numerous drilling operations. Deep offshore operations may present phases using OBMs as fluids. In these operations, the mud will experience extremely low temperature (down to 0°C) shear rate when flowing through riser. It is therefore primary importance control rheological under such conditions....
Abstract We report on the fabrication of high aspect ratio diamond Micro Electrode Arrays (MEAs) grown silicon as well glass substrates using an optimised nanoseeding technique and Bias Enhanced Nucleation (BEN). Such MEA systems combine electrode reactivity electrical current injection limits with resiliency, biocompatibility optical transparency surfaces. present technological steps for 2D 3D microelectrode arrays. The patterning issues involve use detonation nanodiamond particles (DND)....
We present a new and original approach for the fabrication of diamond MEMS using MPCVD. This process does not rely on etching conventional techniques such as e.g. RIE: here our structures are geometrically defined silicon moulds in which is grown selectively. The can be prepared from DRIE enabling wide range geometries. critical point selectivity growth dramatically depends nucleation process. Two methods selective inside were explored parallel compared, namely, bias enhanced (BEN)...
In this study the design and characterization of a new technology ultrathin AlN piezoelectric sensors able to measure micro-deformations is reported. The are fabricated using CMOS compatible clean room process in which sensitive part embedded into thin bio-compatible conformal layer parylene (total thickness below 10 μm). That makes very flexible micro-deformation measurements. study, applied monitor heart activity: rate, blood pulse wave, wave velocity. Blood could be measured with good...