In this work, we study the detection of acetylene (C2H2), carbon dioxide (CO2) and water vapor (H2O) gases in near-infrared (NIR) range using an on-chip silicon micro-electro-mechanical system (MEMS) Fourier transform infrared (FT-IR) spectrometer wavelength 1300-2500 nm (4000-7692 cm(-1)). The core engine is a scanning Michelson interferometer micro-fabricated deep-etching technology producing self-aligned components. light free-space propagating in-plane with respect to chip substrate....

Abstract The integration of microactuators within a silicon photonic chip gave rise to the field optical micro‐electro‐mechanical systems (MEMS) that was originally driven by telecommunication market. Following latter's bubble collapse in beginning third millennium, new directions research with considerable momentum appeared focusing on realization and applications miniaturized instrumentation biology, chemistry, physics materials science. At heart these light interferometry is key...

Miniaturized optical benches process free-space light propagating in-plane with respect to the substrate and have a large variety of applications, including coupling through an fiber. High efficiency is usually obtained using assembled micro-optical parts, which considerably increase system cost integration effort. In this work, we report high efficiency, monolithically integrated silicon micromirror controlled three-dimensional (3D) curvature that capable manipulating beams in plane...

Abstract Optical spectrometers enable contactless chemical analysis. However, decreasing both their size and cost appears to be a prerequisite widespread deployment. Chip-scale implementation of optical still requires tackling two main challenges. First, operation over broad spectral range extending the infrared is required covering molecular absorption spectrum variety materials. This addressed in our work with an Micro-Electro Mechanical Systems (MEMS)-based Fourier transform spectrometer...

Microplastics contaminating drinking water is a growing issue that has been the focus of few recent studies, where major bottleneck time-consuming analysis. In this work, micro-optofluidic platform proposed for fast quantification microplastic particles, identification their chemical nature and size, especially in 1-100 µm size range. Micro-reservoirs ahead micro-filters are designed to accumulate all trapped solid particles an ultra-compact area, which enables imaging optical spectroscopy...

Microplastics are particulate water contaminants that raising concerns regarding their environmental and health impacts. Optical spectroscopy is the gold standard for detection; however, it has severe limitations such as tens of hours analysis time spatial resolution more than 10 μm, when targeting production a 2D map microparticle population. In this work, through single spectrum acquisition, we aim at quickly getting information about whole population identical particles, chemical nature,...

In this letter, we report a wide tuning range MEMS-based swept laser source using deep reactive ion etching on an SoI substrate. A MEMS Fabry-Pérot filter with free-spectral and wider than 94 nm is presented. The measured transmission loss of the between -10.2 -13.6 dB. This used to construct 85 range. These results represent widest reported in literature for in-plane SoI-MEMS based deeply-etched free-standing distributed-Bragg-reflection mirrors. recorded enables use optical coherence...

Abstract Zinc oxide nanowires are synthesized in situ within microfluidic reactors dynamic mode owing to the continuous flow of growth solution. The synergistic effect fluid and confined volume enables fast synthesis, 8–16 min only, while 2–3 h needed static synthesis. However, co‐integration nanomaterials into poses challenges for their use as functional devices. Here, issue homogeneity nanowire well corresponding uniformity dimensions addressed. This is demonstrated that optimized...

A wide angle microscanning architecture is presented in which the angular deflection achieved by displacing principle axis of a curved silicon micromirror acylindrical shape, with respect to incident beam optical axis. The curvature designed overcome possible deformation scanned spot size during scanning. In architecture, lays in-plane substrate opening door for completely integrated and self-aligned miniaturized scanner. micro-optical bench scanning device, based on translating 200 μm focal...

In this paper, we report subwavelength deeply etched 1000-nm-thick silicon layers using deep etching on an SOI substrate. The are used to construct wideband multilayer Bragg mirrors showing more than 220-nm 3-dB bandwidth. mirror reflectivity and effect of errors estimated optical measurements. realize a 125-nm-tuning range Fabry-Perot tunable with free spectral 130 nm enabled by the MEMS technology. filter has input/output fibers inserted into micromachined grooves in-plane axis aligned...

Abstract It is expected that miniaturized infrared spectrometers will enable spectral sensing anywhere. Their applications are almost infinite, including in smart devices, monitoring of air and water quality, healthcare wearables, among many others. Free‐space on‐chip, or photonic MEMS, interferometers an attractive solution since they provide the required miniaturization while achieving optical throughput needed for device sensitivity. A Fourier‐transform spectrometer on‐chip presented...

In this work, black silicon (BSi) structures including nanocones and nanowires are modeled using effective medium theory (EMT), where each structure is assumed to be a multilayer of varying index, its optical scattering in the infrared range studied terms total reflectance, transmittance absorptance transfer matrix method (TMM). The different mechanisms intrinsic absorption taken into account, which translates proper modeling complex refraction depending on several parameters doping level....

Portable and handheld spectrometers are being developed commercialized in the late few years leveraging rapidly-progressing technology triggering new markets field of on-site spectroscopic analysis. Although devices were for near-infrared spectroscopy (NIRS), their size cost stand as an obstacle against deployment spectrometer spectral sensing components needed smart phone industry IoT applications. In this work we report a chip-sized microelectromechanical system (MEMS)-based FTIR...

Black silicon properties are investigated in the wavelength range extending from 0.2 to 25 μm with a focus on mid‐infrared (MIR). It is demonstrated that concurrently increasing initial level of doping bare silicon, given limits, enables reaching even higher absorptance and spectral range. Unprecedented light levels obtained black up 99.5% 1 8 above 90% until 20 μm, leading ultrabroadband, ultrablack surfaces. The synergetic effects morphology volume elucidated; particular, how high...

In this work we present the full characterization of an optical MEMS Fourier Transform Infra Red FTIR spectrometer fabricated by Deep Reactive Ion Etching DRIE Technology on Silicon substrate. Both electrical and properties are measured. The presented techniques allows to build engineering model for predict its main specifications taking into account specificity technology used in fabrication.

Notch filters are used in spectroscopy, multi-photon microscopy, fluorescence instrumentation, optical sensors and other life science applications. One type of notch filter is based on a fiber-coupled Fabry–Pérot cavity, which formed by reflector (external mirror) facing dielectric-coated end an fiber. Tailoring this kind for different applications possible because the external mirror has fewer mechanical constraints. In paper we present modeling implementation fiber inserted into...

A novel optical MEMS interferometer is proposed based on spatial splitting and combining of beams using the imaging properties multimode interference (MMI) waveguides. The light propagates in air, allowing operation over wide spectral range covering both infrared visible ranges. propagation structure modeled analyzed by incorporating modal analysis technique for waveguides angular spectrum approach free-space propagation. beam splitter overall are fabricated deep reactive ion etching...

Miniaturized spectrometers are being developed in the recent few years leveraging rapidly-progressing technology and triggering new markets field of on-site mobile spectroscopic analysis. Although some devices were commercialized for near-infrared spectroscopy (NIRS), their size cost still don't meet requirements ubiquitous deployment spectrometer as a spectral sensor needed smart industry IoT applications. In this work we report an integrated microelectromechanical system (MEMS)-based...

Prior magneto‐optical transmission models through ferrofluids are limited by oversimplifications which hinder accuracy and generalizability. To overcome this challenge, study the magnetic field effect on hematite ferrofluid using method of invariant embedding. Optical coherence tomography (OCT) is used to extract changes in refractive index, enabling a discovery magnetodielectric for ferrofluid. establish basis control understanding, influence spatial profile at different wavelengths,...

Light trapping in optical cavities has many applications telecommunications, biomedical optics, atomic studies, and chemical analysis. Efficient coupling these is an important engineering problem that affects greatly the cavity performance. Reported in-plane external fiber Fabry–Perot literature are based on flat micromachined mirrors. In this case, diffraction loss usually overcome by using expensive-lensed or inserting a coated lens leading to long with small free spectral range. work, we...

This paper reports a novel class of deeply etched curved micromirrors enabling linear conversion between the reflection angle incident light beam and displacement axis with respect to mirror principal axis. Moreover, provides phase-transformation independent inclination on surface. The are fabricated SOI substrate by deep reactive ion etching technology. profile surface is optimized controlled precisely, thanks photolithographic process. High optical throughput exhibiting submillimeter focal...