Abstract Nickel oxide is a promising material for transparent electronics applications. This semiconductor demonstrates the possibility of modifying its physical properties depending on method growth and subsequent processing. Here effects discharge power are reported during reactive dc magnetron sputtering, as well modes annealing NiO films, their structural, electrical, optical properties. films annealed at various temperatures both in an oxygen‐containing environment under vacuum...

In this work, we demonstrate the high efficiency of optical emission spectroscopy to estimate etching profile silicon structures in SF6/C4F8/O2 plasma. The is evaluated as a ratio intensity oxygen line (778.1 nm) fluorine lines (685.8 nm and 703.9 nm). It was found that for creation directional with sizes from 13 100 μm aspect ≈ 0.15 5 optimal intensities range 2-6, 400 4000 0.03 0.37 it 1.5-2. Moreover, influence process parameters on rate silicon, aluminum, inclination angle wall etched...

A universal method for fabrication of miniature cells frequency standards and quantum magnetometers containing 87Rb atoms in the atmosphere inert gas neon based on integrated technologies is considered. The results experimental studies coherent population trapping signals observed a series which provided recovery vapors an alkali metal from rubidium dichromate salt with help laser radiation are presented. typical linewidth 2–3 kHz signal-to-noise ratio 1500 1-Hz bandwidth were observed,...

In this work, we studied the influence of technological parameters plasma chemical etching silicon on rate, photoresist selectivity in relation to a photoresist, and sidewall angle etched structures. It was found that rate increases with raising percentage SF6 gas mixture (25%–50%), pressure (1–2.5 Pa), high-frequency (HF) power (1000–2000 W), bias voltage module (15–75 V) decreases total flow (5–35 SCCM) due increasing passivation efficiency sample surface. The HF power, different...

Multi-electrode arrays (MEAs) are a widely used tool for recording neuronal activity both in vitro/ex vivo and experiments. In the last decade, researchers have increasingly MEAs on rodents vivo. To increase availability usability of MEAs, we created an open-source wireless electrophysiological complex. The complex is scalable, neurons brain during their behavior. Schematic diagrams list necessary components fabrication complex, consisting base charging station wearable modules, presented.

In this paper, we consider a technique for increasing the aspect ratio (AR) of an electrostatic comb drive structure microelectromechanical system, which is fabricated with bulk microstructuring technology. The technical solution described, allows electrical capacity driving and measuring structures, reducing duration plasma etching AR various MEMS devices. novel design improves diffusion active components into dedicated cavities. This leads to increase maximum achievable depth while...

Recent years, optogenetic method of scientific research has proved its effectiveness in the nerve cell stimulation tasks. In our article we demonstrate an implanted device for spinal motoneurons activation. This work is carried out Laboratory Molecular Neurodegeneration Peter Great St. Petersburg Polytechnic University, together with Nano and Microsystem Technology Laboratory. The developed based on principle combining fiber optic light genetically modified cells microelectrode multichannel...

The article is devoted to solving the problem of ensuring accurate control operating temperature alkali vapor cells for quantum frequency standards and magnetometers in order increase stability their parameters. For this purpose, a low-magnetic electric heating chip, containing system, which consists thin-film heater sensor, has been developed manufactured by MEMS technology. system such design that magnetic fluxes generated currents passing through its individual elements mutually...

This paper investigates the optical and electrical properties of ITO films for their application as a transparent contact electrode to NiO films. The were fabricated by magnetron sputtering at various parameters discharge power oxygen content in working gas mixture. Structural analysis showed an increase crystallinity during subsequent annealing. demonstrate high conductivity transparency with absorption edge higher than that results study show potential using create layers.

The origins of parameters deviation for MEMS, made in a MEMS and microtechnology research laboratory are analyzed. relationship between the technology size bare resonance mode is obtained, gyro sensitivity threshold estimated.

In present work, the model and methodology for designing of arcuate arc-shallow MEMS with buckling was developed tested. The efficiency is confirmed experimentally. result survey an increase exciting electrostatic comb drive MMG high precision. this research allows to reduce control voltage noise a microgyroscope.

This paper presents the development and design tests of micromechanical gyroscope (MMG) having electrostatic actuator primary oscillations with an arched suspension. Efficiency model is experimentally verified. The result this research increased efficiency comb MMG. makes it possible to reduce control voltage electric noise

In this work is presented the results of development bistable micromechanical actuator for optical MEMS switch, whereby mentioned fabricated on bulk technique microsystems engineering. The influence local profile stiffening dynamic behavior arch-shaped suspension was experimentally and theoretically research. This paper described theoretical experimental results, obtained during numerical simulation measuring switch amplitude-frequency dependence AC DC control voltage. Using methods gives an...

Abstract The paper presents the results of an experimental determination piezoresistive gauge factor and temperature coefficient resistance a GaN films grown by molecular beam epitaxy on sapphire substrates. measured values were used to calculate design characteristics hot-wires anemometer for MEMS gas flow sensor.

The article presents the results of development, fabrication and investigation miniature cesium vapor cells for quantum frequency standards with optical pumping, working on effect coherent population trapping. Microelectromechanical systems technologies were used in manufacture cells. For first time, dry silicon etching inductively coupled plasma sulfur hexafluoride freon gas a mixed mode was to form internal cavities thickness 1.5 mm. Vacuum-tight sealing containing solid-state source...

The sensors measuring parameters of mobile objects are the important components modern inertial systems. They should have sufficient accuracy, tiny sizes, and low cost at high reliability in operation. From all types sensitive elements micromechanical gyroscopes accelerometers most full meet requirements mentioned above. Development is connected with technology used solid-state microelectronics (photolithography, isotropic anisotropic etching, etc.) application nonmetallic materials...

Abstract Effect of the plasmonic resonant absorption in metal nanoparticles formed on GaN surface optical properties samples is studied. Silver and gold are by solid-state dewetting epitaxial grown molecular beam epitaxy (MBE) c-sapphire substrate. Theoretical experimental characteristics show appearance characteristic plasmon resonance. The results work possibility increasing efficiency GaN-based optoelectronic devices.

Abstract This paper presents the results of experiments on development technology MEMS alkali vapor cells for a miniature quantum frequency standard. The classical design two-chamber silicon cell containing an optical chamber, shallow filtration channels and technical container solid-state source was implemented in single-step process wet anisotropic etching. To prevent destruction during etching through cavities, shapes compensating structures at convex corners nitride mask were calculated...

Abstract In this work a technique for optically active nanocomposite structures consisting of an oxide matrix with plasmonic NPs were demonstrated. A film was formed on silicon substrate by NiO sputtering and gold nanoparticles dewetting. Studies the morphology, elemental composition, structure using SEM, EDS, XRD methods are presented. The transfer onto polymer made it possible to study optical characteristics obtained structures. It is shown that coatings highly flexible exhibit excellent...

Abstract The technology of MEMS atomic cells containing rubidium or caesium vapors in an atmosphere neon buffer gas has been developed. Two-chamber silicon optical cavity, shallow filtration channels and a technical container for solid-state alkali source have implemented single-step process anisotropic wet chemical etching. To prevent significant undercutting the during etching through cavities, shapes compensating elements at convex corners nitride mask calculated composition etchant...