A5029248580- Plasma Diagnostics and Applications
- Fusion materials and technologies
- Magnetic confinement fusion research
- Metal and Thin Film Mechanics
- Ion-surface interactions and analysis
- Advancements in Photolithography Techniques
- Particle accelerators and beam dynamics
- Electron and X-Ray Spectroscopy Techniques
- Nuclear Materials and Properties
- Semiconductor materials and devices
- Laser-induced spectroscopy and plasma
- Atomic and Molecular Physics
- Diamond and Carbon-based Materials Research
- Integrated Circuits and Semiconductor Failure Analysis
- Superconducting Materials and Applications
- Nuclear Physics and Applications
- Laser-Plasma Interactions and Diagnostics
- Copper Interconnects and Reliability
- Plasma Applications and Diagnostics
- Advanced Surface Polishing Techniques
- Ionosphere and magnetosphere dynamics
- Catalytic Processes in Materials Science
- Nuclear reactor physics and engineering
- Thermodynamic and Structural Properties of Metals and Alloys
- Vacuum and Plasma Arcs
University of Illinois Urbana-Champaign
2015-2024
University of Illinois System
2002-2024
Starfire Industries (United States)
2021
Goodwin College
1993-2018
University of Tennessee at Knoxville
2018
Oak Ridge National Laboratory
2007-2018
International Society for Optics and Photonics
2016
Plasma (Russia)
1987-2014
Urbana University
1994-2014
Los Alamos National Laboratory
2000
Observation of liquid lithium flow in metal trenches has been made using a lithium–metal infused trench (LiMIT) tile and is reported here. The self-pumping uses thermoelectric magnetohydrodynamics to remove heated replenish it at lower temperature. Flow velocities have measured compared with theoretical predictions.
In this tutorial article, we review the technological, physics, and economic basis for a magnetic fusion device utilizing flowing liquid lithium divertor (molten metal velocity in range of cm/s) operating low-recycling plasma regime. When extrapolated to reactor scale, observed effects boundary on recycling reduction, confinement increase, anomalous heat transport mitigation may offer fundamentally distinct promising alternative route energy production. addition, lithium-driven low regime...
Determination of the mechanisms underlying growth tungsten fuzz is an important step towards mitigation formation. Nanostructured was produced on resistively heated wires in a helicon plasma source (maximum flux 2.5 × 1021 m−2 s−1). Asymmetry setup allows for investigation temperature and effects single sample. An effort at elucidating mechanism formation made by inspecting SEM micrographs nanostructured successive fluence steps helium ions up to 1 1027 m−2. To create these sample exposed...
Low-temperature plasmas (LTPs) are essential to manufacturing devices in the semiconductor industry, from creating extreme ultraviolet photons used most advanced lithography thin film etching, deposition, and surface modifications. It is estimated that 40%–45% of all process steps needed manufacture use LTPs one form or another. have been an enabling technology multidecade progression shrinking device dimensions, often referred as Moore’s law. New challenges circuit design, novel materials,...
A model of collisional processes hydrocarbons in hydrogen plasmas has been developed to aid computer modeling efforts relevant plasma–surface interactions. It includes 16 molecules (CH up CH4, C2H C2H6, and C3H C3H6) four reaction types (electron impact ionization/dissociative ionization, electron dissociation, proton charge exchange, dissociative recombination). Experimental rates or cross sections have compiled, estimates made for cases where these are not available. The exchange...
The direct observation of a thermoelectric magnetohydrodynamic (TEMHD) flow has been achieved and is reported here. origin the identified based on series qualitative tests corresponds, quantitatively, with swirling TEMHD model. A theory for determining dominant driver free-surface flow, or thermocapillary (TC), found to be consistent experimental results. use analytical form an open geometry develops new dimensionless parameter describing ratio TC generated flows.
For successful commercial adaptation of the μ-EDM (micro electro-discharge machining) process, there is a need to increase process efficiency by understanding mechanism. This paper presents model plasma discharge phase single event in deionized water. The modeled using global approach which assumed be spatially uniform, and equations mass energy conservation are solved simultaneously along with dynamics bubble growth. Given input voltage, current gap, complete temporal description during...
Recent advances in vacuum sciences and applications are reviewed. Novel optical interferometer cavity devices enable pressure measurements with ppm accuracy. The innovative dynamic standard allows for temporal resolution of 2 ms. Vacuum issues the construction huge ultra-high worldwide surface science thin films include new phenomena observed electron transport near solid surfaces as well novel results on properties carbon nanomaterials. Precise techniques thin-film characterization have...
Two different types of flowing liquid lithium limiters were firstly installed and successfully tested in HT-7 tokamaks 2012 some encouraging results obtained. the first type, called FLiLi limiters, used a thin layer under gravity. The other type had lithium-metal infused trenches (LIMIT) for thermoelectric magnetohydrodynamic drive metal flow. surface one was coated by evaporated before injected Ar pressure into special distributor limiter. Then could slowly move along plasma facing guide...
Monte Carlo simulations of the particle transport process during dc magnetron sputter deposition were performed to determine energy and angular distributions energetic species. The model itself is quite general, here we present specific example hydrogenated amorphous silicon film growth. This involves sputtering a target in an argon-plus-hydrogen plasma. three-dimensional incorporates fractal trim data for distribution Si energies emission angles sputtered from surface. Modified...
This paper presents a micro-electrodischarge machining (EDM) melt-pool model to predict workpiece (anode) material removal from single discharge micro-EDM process. To the melt-pool, heat transfer and fluid flow equations are solved in domain containing dielectric material. A level set method is used identify solid liquid fractions of when molten by plasma flux. The flux, pressure radius bubble have been estimated serve as inputs volume removed surface workpiece. Experiments carried out study...