High-quality hydrogenated amorphous silicon films (a-Si:H) have been produced by decomposition of low-pressure silane gas on a very hot surface with deposition nearby, typically 210 °C substrate. A high-temperature tungsten filament provides the for heterogeneous thermal and subsequent evaporation atomic hydrogen. These evaporated species (primarily) induce a-Si:H growth nearby substrates which are temperature controlled using novel substrate holder. The light dark conductivities, optical...

Views Icon Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Twitter Facebook Reddit LinkedIn Tools Reprints and Permissions Cite Search Site Citation D. A. Doughty, J. R. Doyle, G. H. Lin, Gallagher; Surface reaction probability of film‐producing radicals in silane glow discharges. Journal Applied Physics 15 May 1990; 67 (10): 6220–6228. https://doi.org/10.1063/1.345188 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers...

Time-dependent production of higher-silane gases and a-Si:H film are measured relative to decomposed silane in rf dc, hot cold cathode, static-gas discharges. From the absence very low partial-pressure discharges, it is inferred that most higher silanes produced by gas-phase SiH2-initiated reactions. The thus tracers SiH2, while traces fraction H, SiH, SiH3 initial decomposition. stable product yields, we deduce SiH4→SiH2+2H dominant electron-collisional dissociation channel.

1. The effects of short-wave diathermy on the epiphysis in growing rat have been presented. In this small series rats bone-growth stimulation was observed. 2. These observations presented as interesting experimental findings relative to physiology bone growth and problem leg-length discrepancy. 3. It must be emphasized that no direct clinical application or comparison can made. further studies using method might value

Attention has been called to a destructive lesion of the spine in children which involves intervertebral disc. The disorder is similar osteomyelitis spine, but because infrequent and minimum vertebral involvement, it believed that condition should be regarded as separate entity. A series sixteen patients presented clinical picture roentgenographie findings are described. etiology, although not definitely established, very likely infectious. Trauma presence transient bacteremia may play role...

The product gas yields for a 30 mTorr C2H2 13.56 MHz glow discharge were measured using mass spectrometry. volatile products are H2, C4H2, and C6H2. A reaction mechanism has been proposed that accounts quantitatively the of C4H2 C6H2, film deposition rate, as function power. gases C6H2 depleted at high rates in plasma by electron collisional dissociation, with H atoms C2H radicals. Under power conditions suitable diamondlike carbon it is growth dominated radicals C4H3, C6H3, C2H. These...

The gas kinetics of a 30 mTorr radio-frequency methane glow discharge are studied as function depletion including conditions suitable for hard carbon thin-film deposition. Mass spectrometry is used to measure the partial pressures species C2H6, C2H4, C2H2, C3H8, C3H6, and C3H4. Net film growth was calculated using mass balance corroborated by direct measurements deposition rate. Using combination static flowing measurements, net yields C2H2 described simple analytic model. C2H6 modeled...

Monte Carlo simulations of the particle transport process during dc magnetron sputter deposition were performed to determine energy and angular distributions energetic species. The model itself is quite general, here we present specific example hydrogenated amorphous silicon film growth. This involves sputtering a target in an argon-plus-hydrogen plasma. three-dimensional incorporates fractal trim data for distribution Si energies emission angles sputtered from surface. Modified...

Research Article| May 01, 2009 Dynamics of the emplacement Heart Mountain allochthon at White Mountain: Constraints from calcite twinning strains, anisotropy magnetic susceptibility, and thermodynamic calculations John P. Craddock; Craddock † 1Geology Department, Macalester College, St. Paul, Minnesota 55105, USA †E-mail: craddock@macalester.edu. Search for other works by this author on: GSW Google Scholar David H. Malone; Malone 2Department Geography-Geology, Illinois State University,...

The surface of freshly deposited hydrogenated amorphous silicon (a-Si:H)films are studied by argon sputtering and mass-spectrometer detection the sputtered neutral molecules. density H atoms in top H-rich layers film is established from initial surge H-containing This shows that growing has a hydrogen-rich layer multiply bonded Si about five monolayers thick on room-temperature substrate. At ∼240 °C substrate temperature typical production, thickness this decreases to one monolayer.

The inadvertent ingestion of contaminated soil can be a major pathway for chemical exposure to humans. Few studies date have quantified rates develop estimates human health risk assessments (HHRA), and almost all those were children in suburban/urban environments. Here we employed quantitative mass balance tracer approach on rural population practicing outdoor activities estimate ingestion. This study followed 9 subjects over 13 day period Cold Lake, Alberta, near the largest situ thermal...

We have measured the initial silane and polysilane product yields from disilane decomposition in rf dc discharges, at 25 250 °C 20 Pa (0.15 Torr) pressure as typically used for a-Si:H film deposition. From analyses of these we conclude that Si2H6 fragmentation pattern is SiH3+SiH2+H (91±9%) H3SiSiH+2H (9±9%), primary H+Si2H6 reaction SiH4+SiH3, SiH3 dominant radical causing growth. a radical-surface probability 0.34±0.03, very similar to observed SiH4 discharges. report spatial distribution...

A detailed kinetic study of silane-germane glow discharges is presented. Stable gas decomposition and production rates have been measured using mass spectrometry a model for the plasma chemistry developed. It found that germane depletes about four times faster than silane, nearly independently their relative fractions. Germane to be much more reactive silane with silylene, germalyn, atomic hydrogen, silylene-germane reaction leads in large part film rather stable gases. The spatial...