A5022633132- Advanced MEMS and NEMS Technologies
- Mechanical and Optical Resonators
- Force Microscopy Techniques and Applications
- Innovative Energy Harvesting Technologies
- Diamond and Carbon-based Materials Research
- Energy Harvesting in Wireless Networks
- Wireless Power Transfer Systems
- Advanced Sensor and Energy Harvesting Materials
- Nanowire Synthesis and Applications
- Semiconductor materials and interfaces
- Acoustic Wave Resonator Technologies
- Lubricants and Their Additives
- Graphene research and applications
- Photonic and Optical Devices
- Electrowetting and Microfluidic Technologies
- Surface Roughness and Optical Measurements
- Metal and Thin Film Mechanics
- Photonic Crystals and Applications
- Soft Robotics and Applications
- Metallic Glasses and Amorphous Alloys
- Advanced Materials Characterization Techniques
- Muscle activation and electromyography studies
- Advanced Thermoelectric Materials and Devices
- Fuel Cells and Related Materials
- Analytical Chemistry and Sensors
Tsinghua University
2021-2025
University of Chinese Academy of Sciences
2025
Shanghai Jiao Tong University
2017-2019
Miniaturized or microscale generators that can effectively convert weak and random mechanical energy into electricity have significant potential to provide solutions for the power supply problem of distributed devices. However, owing common occurrence friction wear, all such developed so far failed simultaneously achieve sufficiently high current density long lifetime, which are crucial real-world applications. To address this issue, we invent a Schottky superlubric generator (S-SLG),...
Structural superlubricity is a state of nearly zero friction and no wear between two contacted solid surfaces. However, such has certain probability failure due to the edge defects graphite flake. Here, we achieve robust structural microscale flakes nanostructured silicon surfaces under ambient condition. We find that always less than 1 μN, differential coefficient on order 10-4, without observable wear. This attributed warping flake surface concentrated force, which eliminate interaction...
Micro actuators are widely used in NEMS/MEMS for control and sensing. However, most designed with suspended beams anchored at fixed points, causing two main issues: restricted actuated stroke movement modes, reduced lifespan due to fatigue from repeated beam deformation, contact wear stiction. Here, we develop an electrostatic in-plane actuator leveraging structural superlubric sliding interfaces, characterized by zero wear, ultralow friction, no anchor. The features a micro-scale graphite...
Valves are critical components in advanced fluid control systems (AFCS) and play a vital role applications such as soft robotics medical devices. Traditional mechanical valves often suffer from issues leakage wear, which compromise the efficiency precision of air-driven systems. Here, superlubricity microvalve (SLMV) is developed with characteristics zero leakage, ultralong lifespan, self-sensing capabilities. The SLMV demonstrates helium at pressures exceeding 0.9 MPa, remains defect-free...
A novel electromagnetic energy harvester structure with a highly efficient closed magnetic circuit is presented. An opposite polarity arrangement of permanent magnet pair results in the maximum change flux linkage solenoid when vibration. The strong coupling between stator iron cores and vibrating magnets leads to significantly enhanced output voltage power broadened operation bandwidth. Compared open circuits, can effectively improve power. root mean square 67 mV, working bandwidth 7.3 Hz,...
Abstract Resonators and resonator-based oscillators are used in most electronics systems they classified as either mechanical or electrical, with fixed difficult-to-tune resonant frequencies. Here, we propose an electro-superlubric spring, whose restoring force between two contacting sliding solid surfaces the structural superlubric state is linearly dependent on displacement from balanced position. We use theoretical analysis finite element methods to study stability. The stiffness of this...
A novel nickel-based nonlinear electromagnetic energy harvester has been designed, fabricated, and characterized in this work. Electroplated nickel is very suitable for a stretching-based mechanism to broaden the bandwidth due its good process mechanical properties. strong hardening nonlinearity induced large deformation of thin based guided-beam structure. Combining merits both properties structure, shows performance. It found that increasing thickness central platform could guarantee...
This letter provides an investigation on the combined influence of potential barrier (ΔE) and separation gap a double well (Δx) to maximize performance electromagnetic bistable energy harvester (BEH). A concise method based high-fidelity orthogonal array sampling technique is further developed facilitate searching parameter-set corresponding desired well. According numerical experimental results, depth slightly lower than threshold interwell oscillation cooperating with properly large...
A novel heterogeneous integrated inertial micro-switch has been designed with adjustable acceleration threshold and a stable `on'-state due to predefined bias voltage. The voltage is applied onto the large-area parallel-plate electrodes, which endows movable proof-mass electrostatic forces. With an external excitation acceleration, electrode moves fixed it can be locked by force compliant electrical contacts, are composed of micro-cantilever array eliminate contact rebound during pull-in...
The stable travel range of parallel-plate electrostatic actuator with a linear suspension flexure is limited to third the nominal gap due pull-in instability resulting from inherent nonlinear behavior force. To overcome this problem, that can counteract nonlinearity force widely adopted. Based on concept, we present novel method for designing customized micro-flexure monotonically increasing stiffness. mechanism characterized an ejector rod consisting double clamped-guided beams slides along...
Metallic glasses (MGs) are considered as promising materials for microelectromechanical systems (MEMS) due to their excellent mechanical properties combined with unique net shape formability. However, the prevalent fabrication of MG MEMS is based on semiconductor micro-manufacturing technology which limited 2D. This work introduces a mechanically guided manufacturing method enables facile free-standing 3D structures predictable complex and high-aspect-ratio configuration. As examples,...
This paper proposes an electrostatic actuator suspended on clamped-guided beams with inherent nonlinear behavior. Under large deflection, a flat beam is characterized by cubic force–displacement behavior without any additional auxiliary. We utilize the nonlinearity to reduce pull-in voltage, extend travel range and simplify configurations. The theoretical analyses voltage of spring were comprehensively implemented. In order examine proposed approach, actuators suspension linear spring,...
The "soft-landing" effect during the closure of RF-MEMS switches is crucial for improving their reliability. However, rebound suppression effectiveness has rather poor robustness against dimension deviations and waveform distortions resulting from micro-fabrication tolerance, wear tear, circuit aging in device's life-cycle. In contrast to traditional constant stiffness system, this letter proposes a novel self-adaptive approach, whereby system's increases markedly with increasing...
This paper presents the first MEMS-based bi-stable electromagnetic energy harvester with polarity-reversible integrated closed magnetic circuit. The mechanism of polarity reversal in micro-scale circuit is utilized to maximize flux variation rate, and overall size fabrication tolerance proposed device are effectively reduced integrating resonant structure. Bi-stable configuration shallow potential barrier less than 3.6μJ achieved trigger sustain inter-well oscillation micro-scale. It's...
Structural superlubricity (SSL) refers to a state where the friction and wear between two directly contacted solid surfaces are virtually zero. The realization of microscale SSL in 2012 rapidly explored technologies which hold great potential development reliable energy-efficient micro devices. A key successful superlubric device is control movements slider. To solve this challenge, here general principles shown guide motion slider, i.e., by minimization interfacial energy electrostatic...
<title>Abstract</title> Valves are critical components in Advanced Fluid Control Systems (AFCS), playing a vital role applications like soft robotics and medical devices. Traditional mechanical valves usually struggle with issues such as leakage wear, reducing the efficiency precision of air-driven systems. This study introduces superlubricity micro valve (SLMV) that excels performance has self-sensing capabilities. The SLMV demonstrated zero helium at pressures over 0.9 MPa remained...
Friction at sliding interfaces, even in the atomistically smooth limit, can proceed through many energy dissipation channels, such as phononic and electronic excitation. These processes are often entangled difficult to distinguish, eliminate, control, especially presence of wear. Structural superlubricity (SSL) is a wear-free state with ultralow friction that closes most except for friction, which raises critical concern how effectively eliminate control channel. In this work, we construct...
Structural superlubricity, a state of zero wear and ultralow friction between two sliding solid contact surfaces, offers transformative potential for NEMS/MEMS switches, relays, logic devices, sensors. Ultralow resistivity in two-dimensional (2D)/three-dimensional (3D) van der Waals heterostructures is critical most applications. Using high-vacuum thermal evaporation Au, we fabricate defect-free single-crystal graphite/Au the SSL state, achieving record-low 2.542 × 10
This paper presents a nonlinear electrostatic actuator which utilizes the mechanical properties of classical clamped-guided beam springs with large deformation to slow impact velocity movable plates. The initial stiffness spring is very small but increases significantly displacement. In this way, increased kinetic energy would be limited. At same time, because stiffness, lower driving voltage can generate enough overcome restoration force reach dynamical pull-in stage. experiments indicated...
Schottky nanogenerators (SNGs) are very simple power generation devices that can generate a direct current with high density of 104–107 Am−2 by sliding metal-coated nanotip on semiconductor wafers. However, the SNGs has rapid degradation if between metal and is repeatedly performed over same area. Although it widely guessed oxidization during side induces attenuation, there no reported in situ characterization ultrathin oxide layer (thickness &lt;0.5 nm) as demonstration aforementioned...
An inherent variable stiffness approach was proposed to suppress the rebound and impact of electrostatic switch due waveform deviations. A simple clamped-guided beam spring with large deflection, which generated cubic nonlinear restoring force, adopted for implementation approach. The initial is very small but increases significantly displacement. In this way, force mostly concentrated in second half operation stroke during closing switch, weakens sensitivity device performance actuation...