A5045046348- Advanced MEMS and NEMS Technologies
- Mechanical and Optical Resonators
- Acoustic Wave Resonator Technologies
- Photoacoustic and Ultrasonic Imaging
- Silicon Carbide Semiconductor Technologies
- Nanowire Synthesis and Applications
- Advanced Thermoelectric Materials and Devices
- Ultrasonics and Acoustic Wave Propagation
- Advanced Fiber Optic Sensors
- Advanced Electron Microscopy Techniques and Applications
- Thin-Film Transistor Technologies
- Orbital Angular Momentum in Optics
- Thermal properties of materials
- Advanced ceramic materials synthesis
- GaN-based semiconductor devices and materials
- Ultrasound Imaging and Elastography
- Advanced Sensor Technologies Research
- Optical Coherence Tomography Applications
- Photosynthetic Processes and Mechanisms
- Semiconductor materials and devices
- Sensor Technology and Measurement Systems
- Innovative Energy Harvesting Technologies
- Metal and Thin Film Mechanics
- Analytical Chemistry and Sensors
- Infrastructure Maintenance and Monitoring
Institute for Microelectronics and Microsystems
2015-2025
National Research Council
2010-2024
National Academies of Sciences, Engineering, and Medicine
2007-2021
Bologna Research Area
2021
Istituto Nazionale di Fisica Nucleare, Sezione di Bologna
2010
We report the first experimental demonstration of an electrostatic electron orbital angular momentum (OAM) sorter, which can be used to analyze OAM states electrons in a transmission microscope. verify sorter functionality for several beams possessing different superpositions states, and use it record spectra. Our current has resolution 2 units h/bar - reduced Planck constant. It is expected increase optimal 1 future via fine control sorting phase elements.
Silicon carbide (SiC) is an interesting semiconductor for MEMS devices. The high-value Young's modulus of silicon facilitates high frequencies and quality (Q) factors in resonant devices built with double-clamped beams. aim this work to achieve the determination modeling Q-Factor samples micromachined 3C-SiC film on <111> substrates. This study demonstrates that experimental datasets created by Romero, integrated thicker reported work, fit theoretical model presented paper. Furthermore,...
Micro and nanotechnologies are called to play a key role in the fabrication of small low cost sensors with excellent performance enabling new continuous monitoring scenarios distributed intelligence paradigms (Internet Things, Trillion Sensors). Harvesting devices providing energy autonomy those large numbers microsensors will be essential. In where waste heat sources present, thermoelectricity obvious choice. However, miniaturization state art thermoelectric modules is not easy current...
We report the use of an electrostatic micro-electromechanical systems-based device to produce high quality electron vortex beams with more than 1000 quanta orbital angular momentum (OAM). Diffraction and off-axis holography experiments are used show that diameter in diffraction plane increases linearly OAM, thereby allowing content be calibrated. The realization even larger values OAM is currently limited by breakdown voltage device. Potential solutions overcome this problem discussed.
3C-SiC is an emerging material for MEMS systems thanks to its outstanding mechanical properties (high Young’s modulus and low density) that allow the device be operated a given geometry at higher frequency. The of this depend strongly on quality, defect density, stress. For reason, use SiC in Si-based microelectromechanical system (MEMS) fabrication techniques has been very limited. In work, complete characterization residual stress monocrystalline layers with different doping types grown...
The processing parameters which favour the onset of an impurity band conduction around room temperature with a contemporaneous elevated p-type conductivity in Al+ implanted 4H-SiC are highlighted by comparing original and literature results. In examined cases, Al is at 300–400 °C, concentrations from below to above solubility limit (2 × 1020 cm−3) post implantation annealing ≥1950 °C. Transport measurements feature conduction, appearing increasing for implant dose, until this transport...
The paper reports on the fabrication and characterization of flexural resonators designed for resonant strain sensing manufactured using 2 μm thick monocrystalline 3C-SiC layers grown Silicon-On-Insulator substrates. are with Double-Ended-Tuning Fork geometry actuated electrostatically lateral electrodes fixed sides resonator tines, through coupling gaps average width 1.03 μm. They show excellent performance in vacuum environment Q-factor around 30,000 18 dB high resonance peaks measured...
A micro-opto-mechanical system (MOMS) technology for the fabrication of fiber-optic optoacoustic emitters is presented. The described devices are based on thermoelastic generation ultrasonic waves from patterned carbon films obtained by controlled pyrolysis photoresist layers and fabricated miniaturized single-crystal silicon frames used to mount tip an optical fiber. Thanks micromachining process adopted, high miniaturization levels reached in emitters, self-standing fiber with diameter...
An ultrasonic probe was developed by using, in conjunction, optoacoustic and acousto-optic devices based on fiber optic technology. The intrinsic high frequency wide bandwidth associated both to the opto-acoustic source receiving element could open a way towards “virtual biopsy” of biological tissue. A Micro-Opto-Mechanical-System (MOMS) approach is proposed realize broadband micromachined silicon frames suited be mounted tip optical fibers.
The electrical characteristics of n-metal oxide semiconductor field effect transistors (n-MOSFETs) fabricated on 4H-SiC with a process based nitrogen (N) implantation in the channel region before growth gate are reported as function N concentration at SiO2/SiC interface. A strong correlation among increase concentration, reduction interface state density near conduction band and improvement MOSFET performance was obtained. Hall-effect measurements were used to determine electron mobility...
This paper reports on the fabrication and characterization of high-resolution strain sensors for steel based Silicon On Insulator flexural resonators manufactured with chip-level LPCVD vacuum packaging. The present high sensitivity (120 Hz/με), very resolution (4 nε), low drift, near-perfect reversibility in bending tests performed both tensile compressive regimes.
In this work, the fabrication of wafer-level vacuum-packaged 3C-SiC on Si double- clamped beam resonators via glass–silicon anodic bonding using Ti-based vacuum gettering is reported. Open-loop resonance measurements are performed devices, showing Q-factor values up to 290,000, a process yield above 80%, and maximum level around 10−2 mbar inside Ti-gettered encapsulations.
Chirality can appear at many length scales in nature. In this study the authors introduce planar chirality as a quantitative geometric measure of for two-dimensional objects. They apply to evaluate nanometer-sized structures with an electron microscope. employ innovative electron-optics device, orbital-angular-momentum sorter, which applies log-polar conformal mapping wave function and reaches near-optimal resolution orbital angular momentum.
The paper presents a technology for strain sensing on steel using resonant MEMS packaged in vacuum. For this purpose, custom sensor fabrication and novel vacuum packaging technique have been developed. sensors fabricated by surface micromachining of thick (15 μm) Silicon On Insulator substrates with heavily doped handle layers (ρ=0.005Ωcm). Using process, Double-Ended Tuning Fork (DETF) parallel-plate resonators reduced coupling gaps (less than 1 fabricated, high-performance Deep Reactive...
We present a design study aimed at fabricating micromachined thermal emitters for infrared gas sensing with high emission efficiency in the 9-12 μm wavelength range. In order to achieve optical radiance relatively low power consumption and possibility of fast modulation, technology based on dielectric membranes composed by stacked silicon oxide nitride platinum heaters is adopted, that guarantees good isolation reduced mass. The stack adopted such way its emissivity enhanced range concern an...
A novel type of linear extensometer with exceptionally high resolution 4 nm based on MEMS resonant strain sensors bonded steel and operating in a vacuum package is presented. The tool implemented by means thin bar that can be pre-stressed tension within two fixing anchors. extension the detected using vacuum-packaged double-ended tuning fork (DETF) epoxy glue, one which utilized for temperature compensation. Both are driven closed loop self-oscillating transresistance amplifier feedback...
A Micro-Opto-Mechanical-System (MOMS) based technology for the fabrication of Fabry-Perot interferometers on optical fiber is presented. Exploiting silicon micromachining techniques, ultrasonic receiver arrays suitable wideband and high performance applications demonstrated. Thanks to their miniaturization level, devices presented may be suited minimally invasive endoscopic in medicine. The are use a SU-8 polymer interferometer manufactured micromachined frame whose thickness can modulated...