A5068341278- Advanced Thermoelectric Materials and Devices
- Nanowire Synthesis and Applications
- Advanced MEMS and NEMS Technologies
- Thermal Radiation and Cooling Technologies
- Gas Sensing Nanomaterials and Sensors
- Analytical Chemistry and Sensors
- Thermal properties of materials
- Photonic and Optical Devices
- Mechanical and Optical Resonators
- Advanced Chemical Sensor Technologies
- Thin-Film Transistor Technologies
- Transition Metal Oxide Nanomaterials
- Near-Field Optical Microscopy
- Mass Spectrometry Techniques and Applications
- Analytical Chemistry and Chromatography
- Analytical chemistry methods development
- ZnO doping and properties
- Optical Coatings and Gratings
- Force Microscopy Techniques and Applications
- Silicon Nanostructures and Photoluminescence
- solar cell performance optimization
- Advanced Sensor and Energy Harvesting Materials
- Innovative Energy Harvesting Technologies
- Acoustic Wave Resonator Technologies
- Spectroscopy and Chemometric Analyses
International Iberian Nanotechnology Laboratory
2018-2024
Institut de Microelectrònica de Barcelona
2009-2018
Centro Nacional de Microelectrónica
2006-2016
Consejo Superior de Investigaciones Científicas
2010-2016
National Research Council
2012
Fondazione Bruno Kessler
2009
University of Perugia
2008
Ferioli & Gianotti (Italy)
2008
Construction Technologies Institute
2008
Universitat de Barcelona
2003-2005
Thermoelectric micro/nanogenerators (µTEGs) are potential candidates as energy harvesters to power IoT sensors. This study reports on a thermoelectric micro/nanogenerator with planar architecture built by silicon micromachining technologies that uses silicon-germanium (SiGe) nanowire (NW) arrays material. The growth of bottom-up NW means Chemical Vapour Deposition - Liquid Solid (CVD-VLS) and their monolithic integration into prefabricated microplatforms presented. It is shown SiGe NWs based...
Silicon nanowires present outstanding properties for electronics, energy, and environmental monitoring applications. However, their integration into microelectromechanical systems (MEMS) is a major issue so far due to low compatibility with mainstream technology, which complicates patterning controlled morphology. This work addresses the growth of 〈111〉 aligned silicon nanowire arrays fully integrated standard MEMS processing by means chemical vapor deposition–vapor liquid solid method...
A novel design of a silicon-based thermoelectric power microgenerator is presented in this work. Arrays silicon nanowires, working as material, have been integrated planar uni-leg thermocouple microstructures to convert waste heat into electrical energy. Homogeneous, uniformly dense, well-oriented and size-controlled arrays nanowires grown by chemical vapor deposition using the vapor–liquid–solid mechanism. Compatibility issues between nanowire growth method microfabrication techniques, such...
Micro and nanotechnologies are called to play a key role in the fabrication of small low cost sensors with excellent performance enabling new continuous monitoring scenarios distributed intelligence paradigms (Internet Things, Trillion Sensors). Harvesting devices providing energy autonomy those large numbers microsensors will be essential. In where waste heat sources present, thermoelectricity obvious choice. However, miniaturization state art thermoelectric modules is not easy current...
This paper describes a specific route for the complete integration of novel planar thermoelectric microgenerator (μTEG) that can operate under environmental conditions using commercial miniaturized heat exchangers. The proposed exchanger process is compatible with fragility micromachined silicon structures. main structure μTEG built around platform defined by microfabrication technologies. Different silicon-based materials, such as bottom-up grown and silicon-germanium nanowire arrays well...
This work presents a flexible polyimide-based capacitive tactile sensing array with sub-millimeter spatial resolution. The sensor is conceived to be embedded in multimodal artificial finger detect and classify the texture morphology of an object's surface. proposed comprises 16 × units. Each unit composed parallel square electrode pairs (340 μm 340 μm) separated by compressible air cavity into polyimide substrate. Standard MEMS microfabrication techniques were used develop sensor. device was...
Broadband and omnidirectional antireflective surfaces are important to various solar energy technologies. The utilization of deep subwavelength features is reported for decrement in the broadband reflection spectrum. study commences with nanopillar (NP) arrays that well known their antireflection properties. Deep introduced, which yield further decrease reflection: quasinanolens (qNL), sidewall scalloping (DSSS), decreasing bottom diameter reshape it into a light funnel (LF). Accordingly,...
Ordered dense arrays of p-type Si nanowires produced with a VLS method have been surveyed as anew active material to produceall-Si thermoelectric energy harvesters. The properties themeta-material consisting bundles thousands 10 μm long (with mean diameter 100 nm)were measured making use an integrated self-test element(heater/thermometer) that allowsanaccurate control the temperature gradient in thesilicon micromachined structure used assemble thermocouples. measuredSeebeck coefficient S and...
This paper presents a novel wide tuning range MEMS varactor based on toggle push-pull mechanism for high RF power applications and improved reliability. The device anchoring utilizes torsion spring which virtually allows full capacitance range. Improved mechanical stability is also provided by the actively controlled pull-out implementation that realized without increasing manufacturing complexity. As proof of concept, has been modeled, designed manufactured in shunt configuration 50...
Deep subwavelength sidewall scalloping (DSSS) on the broadband absorption of nanopillar arrays.