A5081917511- Physics of Superconductivity and Magnetism
- Quantum and electron transport phenomena
- Superconducting and THz Device Technology
- ZnO doping and properties
- Advancements in Semiconductor Devices and Circuit Design
- Semiconductor materials and devices
- Advanced Electrical Measurement Techniques
- Superconducting Materials and Applications
- Metal and Thin Film Mechanics
- Magnetic properties of thin films
- Atomic and Subatomic Physics Research
- Advanced Condensed Matter Physics
- Semiconductor Quantum Structures and Devices
- Copper Interconnects and Reliability
- Silicon Carbide Semiconductor Technologies
- Magnetic and transport properties of perovskites and related materials
- Advanced Surface Polishing Techniques
- Quantum Computing Algorithms and Architecture
- Ferroelectric and Negative Capacitance Devices
- Superconductivity in MgB2 and Alloys
- Electronic and Structural Properties of Oxides
- Iron-based superconductors research
- Particle accelerators and beam dynamics
- Quantum Information and Cryptography
- Surface and Thin Film Phenomena
Shanghai Institute of Microsystem and Information Technology
2016-2025
Chinese Academy of Sciences
2011-2024
University of Chinese Academy of Sciences
2017-2023
State Key Laboratory of Functional Materials for Informatics
2020
Zhejiang Cancer Hospital
2017
Institute of Microelectronics
2015
Shanghai University
2008-2011
The Abdus Salam International Centre for Theoretical Physics (ICTP)
1999
Nb/Al-AlOx/Nb Josephson junctions are widely used in superconducting quantum interference devices and rapid single flux (RSFQ) circuits. Very large-scale RSFQ integration often has a strict requirement on wafer-scale junction qualities. In particular, Nb film stress trilayer based is critical factor affecting their this work, we develop multi-step sputtering process to prepare films with different combinations of roughness investigate the correlation between quality. method allows us almost...
We have developed a 6-kA/cm superconducting integrated circuit fabrication process toward large-scale single flux quantum digital circuits. To evaluate the reliability and controllability, set of control monitors (PCMs) for monitoring design parameters was designed tested. Fabrication parameters, example, film thicknesses etched depths layers, were measured by testing specific patterns during fabrication. Design such as critical current density J <sub...
In the present work, single buffer layers of La2Zr2O7 (LZO) with different thicknesses were prepared using pulsed laser deposition (PLD) on highly textured Ni?5?at.%W tapes for YBa2Cu3O7??-coated conductors. The LZO are obtained metallic substrates, making subsequent epitaxial growth superconducting YBa2Cu3O7?? feasible. transition temperature increases as thickness up to 240?nm, achieving a value Tc more than 92?K narrow width less 1?K. Inductive measurement reveals that critical current...
We present the latest development of an Nb/Al-AlO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> /Nb Josephson junction fabrication process for superconducting integrated circuits at SIMIT. Our has four niobium layers and one Ti/Pd resistor layer with 1.0 Ω/square sheet shunting circuit biasing. Critical current density J xmlns:xlink="http://www.w3.org/1999/xlink">c</sub> junctions is controlled from 30 A/cm <sup...
We have developed a fabrication technology for the development of large-scale superconducting integrated circuits with Nb-based Josephson junctions. The standard process 10 mask levels uses four metal layers including 3 Nb and Mo resistor layer. influence deposition parameters on film stress, electrical properties, surface roughness were studied systematically. High quality Nb, Al, Mo, SiO2 films successfully deposited subsequent circuits. circuit started resistors target sheet resistance...
Superconducting single flux quantum (SFQ) circuits have been shown to offer huge advantages that are ideal for high performance computing applications. These can operate at very frequencies (tens of GHz) but consume low power (from nanowatts microwatts per gate). Energy-efficient SFQ (ERSFQ) circuits, evolved from traditional rapid (RSFQ) were invented with the goal elimination static dissipation. When compared RSFQ ERSFQ require a new biasing network includes Josephson junction(s),...
Rapid single flux quantum (RSFQ) circuits have the advantages of high speed and low power consumption. The typical frequency RSFQ is tens GHz. Therefore, it necessary to reliably test high-frequency performance simply effectively. This paper proposes a new on-chip testing method, which uses pseudo-random sequences generated by linear feedback shift register (LFSR) as vectors, output registers (SRs) store last piece result read out at low-frequency. Unlike traditional demonstration method...
In this study, we investigate different technologies to measure the specific capacitances C <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">8</sub> of Nb/Al-AlO xmlns:xlink="http://www.w3.org/1999/xlink">x</sub> /Nb Josephson junctions. They involve measuring Fiske mode resonance in long junctions, superconducting quantum interference device (SQUID) resonance, and plasma resonance. We find a logarithmic relationship between junction its critical...
On-chip high-frequency test for Rapid Single Flux Quantum (RSFQ) circuits without external equipment is very attractive and promising. The method based on Shift Register (SR) widely used long time. Recently, we have proposed two methods Pseudo Random Binary Sequence (PRBS) generator. In this paper, a Full Adder (FA) taken as an example of circuit under the design methodology above approaches presented. For FA with traditional approaches, are fabricated tested. We demonstrate successful...
A cold preamplifier based on superconducting quantum interference devices (SQUIDs) is currently the preferred readout technology for low-noise transition edge sensor (TES). In this work, we have designed and fabricated a series SQUID array (SSA) amplifier TES detector circuit. SSA amplifier, each cell composed of first-order gradiometer formed using two equally large square washers, an on-chip low pass filter (LPF) as radio-frequency (RF) choke has been developed to reduce Josephson...
Energy-efficient rapid single flux quantum (ERSFQ) circuits are often considered to have two working states including ERSFQ (zero static power dissipation) and RESFQ (resistive energy-efficient SFQ) state. In our previous research, a new state called MIDSFQ has been also found in which the biasing JJs cannot return non-voltage after dynamic process. Both result extra dissipation should be avoided if possible. this paper, we investigate characteristics of these three explain principle using...
As part of the efforts to establish a reliable fabrication process superconducting integrated circuits at Center for Excellence in Superconducting Electronics (CENSE) China, we investigated influences various deposition conditions on properties molybdenum (Mo) thin films. Thin-film resistors were fabricated based these films by using lift-off process. It was found that Mo structures made from peeled off easily substrate after lift-off. We have optimized grow with compressive or weakly...
We present fabrication technology for planar-type superconducting quantum interference devices (SQUIDs) comprising trilayer Nb/AlOx/Nb Josephson junctions and thin-film pick-up coils integrated on a single chip. A well-established circuit that was originally developed digital applications has been modified developing SQUID processes with high reliability controllability. Combination of two photolithography techniques, high-resolution stepper large-shot-area mask aligner, introduced to...
Single flux quantum (SFQ) circuitry is a promising candidate for scalable and integratable cryogenic control system. However, the operation of SFQ circuits introduces nonequilibrium quasiparticles (QPs), which are significant source qubit decoherence. In this study, we investigate QP behavior in superconducting quantum-classical hybrid chip that comprises an circuit circuit. By monitoring relaxation time, explore dynamics SFQ-circuit-induced QPs. Our findings reveal density near reaches its...