A5056418265- Metal and Thin Film Mechanics
- Semiconductor materials and devices
- Diamond and Carbon-based Materials Research
- Photorefractive and Nonlinear Optics
- ZnO doping and properties
- Boron and Carbon Nanomaterials Research
- GaN-based semiconductor devices and materials
- Thin-Film Transistor Technologies
- Advanced ceramic materials synthesis
- Solar Thermal and Photovoltaic Systems
- High-Temperature Coating Behaviors
- Microfluidic and Capillary Electrophoresis Applications
- Solid State Laser Technologies
- Analytical Chemistry and Sensors
- Copper Interconnects and Reliability
- Gas Sensing Nanomaterials and Sensors
- MXene and MAX Phase Materials
- Acoustic Wave Resonator Technologies
- Microfluidic and Bio-sensing Technologies
- Nuclear Materials and Properties
- Luminescence Properties of Advanced Materials
- Photonic and Optical Devices
- Ferroelectric and Piezoelectric Materials
- Advanced Fiber Laser Technologies
- Silicon and Solar Cell Technologies
University of Minho
2014-2024
University of Bonn
1994
University of Lisbon
1989-1993
Hungarian Academy of Sciences
1993
The main objective of this work is the preparation decorative zirconium oxynitride, ZrOxNy, thin films by dc reactive magnetron sputtering. Film properties were analyzed as a function gas flow and correlated with observed structural changes. Measurements showed systematic decrease in deposition rate increase revealed three distinct modes: (i) metallic mode, (ii) transition mode (subdivided into zones), (iii) an oxide mode. measurements target potential also consistent these changes,...