A5090401330- Metamaterials and Metasurfaces Applications
- Advanced Antenna and Metasurface Technologies
- Advancements in Photolithography Techniques
- Antenna Design and Analysis
- Plasmonic and Surface Plasmon Research
- Electron and X-Ray Spectroscopy Techniques
- Advanced Fiber Optic Sensors
- Photonic Crystal and Fiber Optics
- Integrated Circuits and Semiconductor Failure Analysis
- X-ray Diffraction in Crystallography
- Crystallization and Solubility Studies
- Photonic and Optical Devices
- Advanced Fiber Laser Technologies
- Photorefractive and Nonlinear Optics
- Photonic Crystals and Applications
- Electromagnetic Scattering and Analysis
- Advanced Surface Polishing Techniques
- Solid State Laser Technologies
- Antenna Design and Optimization
- Carbon Nanotubes in Composites
- Nanofabrication and Lithography Techniques
- Optical Systems and Laser Technology
- Microwave Engineering and Waveguides
- Silicon and Solar Cell Technologies
- Semiconductor materials and devices
China University of Mining and Technology
2008-2025
Institute of Electronics
2010-2024
Shenzhen University
2018-2024
China Railway Corporation
2024
Soochow University
2023
Jiangsu Provincial Water Survey & Design Institute (China)
2023
Friedrich-Alexander-Universität Erlangen-Nürnberg
2021
North-West University
2021
Max Planck Institute for Astronomy
2021
Heidelberg University
2021
We present a 7nm technology with the tightest contacted poly pitch (CPP) of 44/48nm and metallization 36nm ever reported in FinFET technology. To overcome optical lithography limits, Extreme Ultraviolet Lithography (EUV) has been introduced for multiple critical levels first time. Dual strained channels have also implemented to enhance mobility high performance applications.
Magnetic field driven nanowire rotation in liquids has been investigated. This approach provides a noncontact, sensitive, cost effective, and easy to scale up scenario manipulate the motion of magnetized one-dimensional nanostructures for “nanomachine” anisotropic nanomaterial development. Due small dimensions, viscous behavior dominates motion. Qualitative analyses considering competing magnetic induced torque resisting fluid drag have conducted under different circumstances. The...
Epsilon-near-zero (ENZ) metamaterial slabs at visible frequencies based on metal-dielectric multilayers are experimentally realized. Transmission, reflection, and absorption spectra measured used to determine the complex refractive indices effective permittivities of ENZ slabs, which agree with results obtained from both numerical simulations optical nonlocalities analysis. Furthermore, light propagation in directional emission prisms also analyzed. The accurate determination wavelength for...
Under complex stress, a rigid filling body can easily cause the shear failure of gob-side entry retaining (GSER) roof, and flexible serious deformation roadway side. The combined with soft upper lower respond to needs support strength GSER. In this paper, uniaxial compression test acoustic emission (AE) characteristic concrete-high water composite (CHWC) specimens different height ratios (Height = High layer height/CHWC height) were performed explore influence ratio on CHWC specimens....
We verify the extraordinary transmission enhancement and collimation induced by material loss in anisotropic near-zero permittivity (ENZ) metamaterials, reveal physical mechanism of this exotic electromagnetic phenomenon via iso-frequency contour (IFC) analysis. In addition, we demonstrate possibility realization such enhanced Gaussian beam realistic silver-germanium multilayered structures applying full-wave numerical simulations.
The concept of loss-compensated broadband epsilon-near-zero metamaterials consisting step-like metal-dielectric multilayer structures doped with gain media is proposed based on the combination Milton representation effective permittivity and optical nonlocality due to structures. With loss compensation by media, possesses significantly low material in frequency range, leading superior electromagnetic properties for realizing unique functional devices, such as demonstrated prisms directional...
The optical nonlocality in symmetric metal-dielectric multilayer metamaterials is theoretically and experimentally investigated with respect to transverse-magnetic-polarized incident light. A nonlocal effective medium theory derived from the transfer-matrix method determine permittivity depending on both frequency wave vector a stack. In contrast local theory, our proposed can accurately predict measured angle-dependent reflection spectra fabricated stack provide dispersion relations....
The colors of objects originate from reflection light in certain directions and absorption undesired light, producing substantial heating. Extensive efforts are expended to cool colorful reduce their energy consumption. However, a strategy below ambient temperature while fully preserving excellent color properties with high saturation large viewing fields remains significant challenge. Inspired by Morpho butterflies, we report robust configuration consisting multilayer, disordered structure,...
A strategy is proposed to design a certain kind of metamaterial with near-zero electric permittivity over broad frequency band, i.e., the broadband epsilon-near-zero (ENZ) metamaterials. Based on Bergman–Milton spectral representation effective permittivity, first carried out in dimensionless space, where ENZ metamaterials mathematically determined by series zeros and poles (singularities), which can be easily arranged as required operating band. Then, through fast inverse algorithm,...
The giant optical nonlocality near the Dirac point in lossless metal-dielectric multilayer metamaterials is revealed and investigated through analysis of band structure stack three-dimensional omega-k space, according to transfer-matrix method with nonlocal effect. position analytically located space. It that emergence due degeneracy symmetric asymmetric eigenmodes coupled surface plasmon polaritons. induced epsilon-near-zero frequency shift for compared effective medium studied....
The concept of the broadband epsilon-near-zero meta-atom consisting layered stacks with specified metallic filling ratio and thickness is proposed based on Bergman spectral representation effective permittivity. step-like metal-dielectric multilayer structures are designed to achieve realistic meta-atoms in optical frequency range. These can be integrated as building blocks for unconventional components exotic electromagnetic properties over a wide range, such demonstrated directional...
The first use of extreme ultraviolet (EUV) lithography in logic manufacturing is targeted for the 14 nm node, with possible earlier application to 20-nm node device back-end layers demonstrate technology. Use EUV pattern via-levels will allow dark-field masks low densities and postpone day when completely defect-free mask blanks are needed. quality imaging at considerably higher than double-dipole or double-exposure double-etch 193-nm immersion lithography, particularly 2-dimensional...
Our paper will use stochastic simulations to explore how EUV pattern roughness can cause device failure through rare events, so-called "black swans". We examine the impact of noise on yield simple wiring patterns with 36nm pitch, corresponding 7nm node logic, using a local Critical Dimension (CD)-based fail criteria Contact hole failures are examined in similar way. For our nominal process, CD uniformity variation and Pattern Placement Error was observed, but no were seen modest (few...
The feature scaling and patterning control required for the 7nm node has introduced EUV as a candidate lithography technology enablement. To be established front-up solution those requirements, all associated aspects with yielding are also in process of being demonstrated, such defectivity window through transfer electrical yield. This paper will review current status metrics at IBM, but focus on challenges therein industry begins to look beyond 7nm. address these challenges, some...
We investigate the quantum entanglement between two dots in a plasmonic waveguide with near-zero mode index, considering dependence of concurrence on interdot distance, dot-waveguide frequency detuning and coupling strength ratio. High is achieved for wide range distance due to which largely relaxes strict requirement conventional dielectric waveguides or metal nanowires. The proposed system phase variation along near cutoff shows very promising potential optics information processing.
A strategy is proposed to design the broadband gain-doped epsilon-near-zero (GENZ) metamaterial. Based on Milton representation of effective permittivity, starts in a dimensionless spectral space, where permittivity GENZ metamaterial simply determined by pole-zero structure corresponding operating frequency range. The physical retrieved from via tractable inverse problem. great advantage practical applications and also theoretically reveals cancellation mechanism dominating near-zero...
The successful demonstration of 637 wafer exposures in 24 hours on the EUV scanner at IBM Center for Excellence July marked transition from research to process development using lithography. Early a new tool involves significant characterization, as it is necessary benchmark performance and capability. This work highlights some key learning early with focus identifying largest sources variability trench via hole patterning through process. demonstrated stable overlay 40 lot test run...
The line edge roughness (LER) and width (LWR) transfer in a self-aligned quadruple patterning (SAQP) process is shown for the first time. Three LER characterization methods, including conventional standard deviation method, power spectral density (PSD) method frequency domain 3-sigma are used analysis. wiggling also quantitatively characterized each SAQP step with factor. This work will benefit both optimization monitoring.
We study the use of random nanocomposite material as a photomask absorber layer for next generation extreme ultraviolet (EUV) lithography. By introducing nickel nanoparticles (NPs) randomly into TaN host, can greatly reduce reflectivity compared with standard same thickness. Finite integral simulations show that reduction in is mainly due to enhanced absorption by Ni NPs. The fluctuation induced scattering and position NPs found be on order 0.1%. Based these observations, we build an...
Carbon nanomaterials in the form of paper sheets have been used as platforms to achieve multifunctionality. Combined with electrochemical deposition, room temperature synthesis magnetic Ni coatings on individual carbon nanofibers (CNF) and/or nanotubes (CNT) has realized through solution penetration and ion diffusion. In addition significant electrical conductivity improvement, responses coated nanopaper can be tuned within large ranges terms saturation field, remnant magnetization...
A generalized nonlocal effective medium theory is derived based on the transfer-matrix method to determine permittivity and permeability for symmetric periodic metal–dielectric multilayer metamaterials, with respect both transverse-electric transverse-magnetic polarized light at arbitrary angle of incidence. The tensors are analyzed in detail as functions wavelength, incidence, period. Our consideration can accurately predict dispersion relation, transmission reflection spectra, optical...
A magnetic mirror operating in the terahertz band is designed based on functional reflective metasurface, which simply constructed by a one-dimensional periodic lithium tantalate micro cylindrical rod array Teflon substrate coated with metal layer at bottom and reflects incoming electric field zero-phase change. Magnetic dipole resonance of rods excited metasurface attributed to perfect frequency 0.286 THz reflectivity R = 0.98 for normal incident electromagnetic wave. By real-time varying...
Abstract A precise one-to-one equivalent nanocircuit model for layered metamaterials is presented in this work. The theoretical analysis establishes a link between the system and optical film by comparing transfer matrix of an transmission distributed-element model. Through dimensional analysis, connection properties distributed circuit components line revealed. Subsequently, lumped-element simplified to nonmagnetic films with different features. Finally, further applied multilayer...