Lithium metal is considered to be the most promising anode for next-generation batteries due its high energy density of 3840 mAh g–1. However, extreme reactivity Li surface can induce parasitic reactions with solvents, contamination, and shuttled active species in electrolyte, reducing performance employing anodes. One solution this issue application thin chemical protection layers surface. Using a custom-made ultrahigh vacuum integrated deposition characterization system, we demonstrate...

We demonstrate an atomic layer deposition (ALD) process for the solid electrolyte lithium phosphorousoxynitride (LiPON) using tert-butoxide (LiOtBu), H2O, trimethylphosphate (TMP), and plasma N2 (PN2) as precursors. use in-situ spectroscopic ellipsometry to determine growth rates optimization design a rational, quaternary precursor ALD where only certain substrate–precursor chemical reactions are favorable. via XPS tunable nitrogen incorporation into films by variation of PN2 dose find that...

Li metal is among the most attractive anode materials for secondary batteries, with a theoretical specific capacity > 3800 mAh g–1. However, its extremely low electrochemical potential associated high chemical reactivity that results in undesirable reduction of electrolyte species on lithium surface, leading to spontaneous formation solid interphase (SEI) uncontrolled composition, morphology, and physicochemical properties. Here, we demonstrate new approach stabilize anodes using hybrid...

Several active areas of research in novel energy storage technologies, including three-dimensional solid state batteries and passivation coatings for reactive battery electrode components, require conformal electrolytes. We describe an atypical atomic layer deposition (ALD) process a member the lithium phosphorus oxynitride (LiPON) family, which is employed as thin film lithium-conducting electrolyte. The reaction between tert-butoxide (LiOtBu) diethyl phosphoramidate (DEPA) produces...

Three-dimensional thin-film solid-state batteries (3D TSSB) were proposed by Long et al. in 2004 as a structure-based approach to simultaneously increase energy and power densities. Here, we report experimental realization of fully conformal 3D TSSBs, demonstrating the simultaneous power-and-energy benefits structuring. All active battery components-electrodes, solid electrolyte, current collectors-were deposited atomic layer deposition (ALD) onto standard CMOS processable silicon wafers...

We demonstrate the ultraclean atomic layer deposition (ALD) of Li2O and LiOH using lithium tert-butoxide (LiOtBu) precursor with H2O plasma O2 as oxidants, along conversion products to Li2CO3 upon CO2 dosing. Using LiOtBu results in below 240 °C above for otherwise identical process parameters. Substituting oxidation a combination products, indicating modification ALD reaction preventing volatilization C from Li precursor. The chemistry films is definitively characterized first time XPS...

Chemical and electrochemical instability of the Li metal interface with organic solvent has been a major impediment to use Li‐metal anodes for next‐generation batteries. Here character surface degradation application atomic layer deposition (ALD) as protection suppress are addressed. Using standard foil samples in without situ deposited ALD Al 2 O 3 protective layers, results from force microscopy, mass spectrometry (including differential spectrometry), X‐ray Photoelectron Spectroscopy...

This work investigates the role of water and oxygen on shear-induced structural modifications molybdenum disulfide (MoS2) coatings for space applications impact friction due to oxidation from aging. We observed transmission electron microscopy (TEM) X-ray photoelectron spectroscopy (XPS) that sliding in both an inert environment (i.e., dry N2) or humid lab air forms basally oriented (002) running films varying thickness structure. Tribological testing surfaces created N2 showed lower initial...

Pushing lithium-ion battery (LIB) technology forward to its fundamental scaling limits requires the ability create designer heterostructured materials and architectures. Atomic layer deposition (ALD) has recently been applied advanced nanostructured energy storage devices due wide range of available materials, angstrom thickness control, extreme conformality over high aspect ratio nanostructures. A class referred as conversion electrodes proposed capacity electrodes. RuO2 is considered an...

Enabled by a unique integrated fabrication and characterization platform, X-ray photoelectron spectroscopy (XPS) studies reveal the formation of thin solid electrolyte interphase (SEI) layer on Li–O2 cathode after first cycle. Subsequent cycling indicates that this SEI is very stable in terms both chemistry morphology, even extensive cycling, preserving reversibility at cathode/electrolyte interface. Remarkably, cell failure, replacement lithium anode resulted recovery behavior with same...

Materials that undergo conversion reactions to form different materials upon lithiation typically offer high specific capacity for energy storage applications such as Li ion batteries. However, since the reaction products often involve complex mixtures of electrically insulating and conducting particles significant changes in volume phase, reversibility is poor, preventing their use rechargeable (secondary) In this paper, we fabricate protect 3D electrodes by first coating multiwalled carbon...

Lithium germanium thiophosphate (LGPS) is an attractive solid-state electrolyte material due to its exceptionally high ionic conductivity (∼1.2 × 10−2 S cm−1), comparable many organic liquid electrolytes commonly used in batteries. Despite the of LGPS, susceptibility LGPS deleterious degradation reactions has impeded commercial adoption into In particular, poor voltage stability with high-voltage cathode or lithium metal potentials often results dramatically increasing cell impedance during...

Vanadium dioxide (VO2) is a promising smart material particularly appealing for added functionality in both electronic and optical applications. We investigate the structure of VO2 films fabricated using atomic layer deposition (ALD) on c-Al2O3 substrates same after an optimized anneal 2 h at 585 °C 10–5 Torr O2. Synchrotron-based grazing incidence X-ray diffraction (GIXRD) measurements revealed that as-deposited ALD contains small crystalline inclusions V2O5 VO. Ex situ annealing film...

Defects in electronic devices can lead to poor performance and device failure. We used deuterium doping investigate the source of hydrogen defects Atomic Layer Deposited (ALD) Al2O3 films situ fabrication techniques produce ultraclean metal-insulator-metal trilayers. compare leakage current defect density ALD dielectrics deposited using different oxidation conditions. The plasma O2 process has lowest number entrained exhibits a 104 times lower than thermal process. Deuterium during shows...

Niobium oxide (NbOx) materials of various compositions are interest for neuromorphic systems that rely on memristive device behavior. In this study, we vary the composition NbOx thin films deposited via atomic layer deposition (ALD) by incorporating one or more in situ hydrogen plasma exposure steps during ALD supercycle. Films with ranging from Nb2O5 to NbO2 were deposited, film dependent duration step, number per supercycle, and content plasma. The chemical optical properties probed using...

Owing to its high energy density, LiNi0.8Co0.1Mn0.1O2 (NMC811) is a cathode material of prime interest for electric vehicle battery manufacturers. However, NMC811 suffers from several irreversible parasitic reactions that lead severe capacity fading and impedance buildup during prolonged cycling. Thin surface protection films coated on the mitigate degradative chemomechanical at electrode-electrolyte interphase, which helps increase cycling stability. these coatings may impede diffusion...

Two-level system (TLS) defects in dielectrics are known to limit the performance of electronic devices. We study TLS using millikelvin microwave (6.4 GHz) loss measurements three atomic layer deposited (ALD) oxide films–crystalline BeO (c-BeO), amorphous Al2O3 (a–Al2O3), and LaAlO3 (a–LaAlO3)–and interpret them with room temperature characterization measurements. find that bulk tangent crystalline film is 6 times higher than films. In addition, its power saturation agrees an distribution...

Wide bandgap semiconducting nitrides have found wide-spread application as light emitting and laser diodes are under investigation for further in optoelectronics, photovoltaics, efficient power switching technologies. Alloys of the binary semiconductors allow adjustments band gap, an important semiconductor material characteristic, which is 6.2 eV aluminum nitride (AlN), 3.4 gallium nitride, 0.7 (InN). Currently, highest quality III-nitride films deposited by metalorganic chemical vapor...

Li 10 GeP 2 S 12 (LGPS) is a superionic conductor that has an ionic conductivity matching conventional liquid electrolytes (10 −3 cm −1 ) and thus shows exceptional potential to fulfill the promise of solid-state metal batteries. Conventional mechanical die pressing LGPS powder into pellets for electrochemical testing can result in large porosity, low density, grain boundary resistance at solid-solid interface with electrodes which greatly decrease performance LGPS, addition poor stability...

A key trailblazer in the development of thin-film solid-state electrolytes has been lithium phosphorous oxynitride (LiPON), success which led to recent progress ion conductors. Here we compare structural, electrochemical, and processing parameters between previously published LiPON NaPON ALD processes with a novel process for K analogue potassium (KPON). In each process, alkali tert-butoxides diethylphosphoramidate are used as precursors. To understand surface reactions, this work proposes...