We present a pressure sensor based on the convective cooling of air surrounding an electrothermally heated resonant bridge. Unlike conventional sensors that rely diaphragm deformation in response to pressure, does not require diaphragms large surface area, and hence is scalable can be realized even at nanoscale. The concept demonstrated using both straight arch microbeam resonators driven sensed electrostatically. change shown accurately tracked by monitoring resonance frequency structure....

Most gas sensors suffer from the cross sensitivity to environmental temperature, which significantly reduces accuracy and reliability of measurements. Current solutions require fabrication a thermometer in close proximity sensor or an identical reference compensate for drift due temperature. This increases device size, cost, power required operate sensor; also adds complexity circuit signal processing. Here, we demonstrate single resonant sensor, based on microbeam uniformly coated with...

We demonstrate a resonant gas sensor uniformly coated with metal-organic framework (MOF) and excited near the second vibration mode for enhanced sensitivity. The possibility of realizing smart switch triggered upon exceeding threshold mass is demonstrated when operating resonator dynamic pull-in instability. based on an electrostatically clamped-clamped microbeam. microbeam fabricated from polyimide layer top Cr/Au bottom Cr/Au/Cr layer. geometry optimized to reduce effect squeeze film...

We present an experimental and theoretical investigation of a micromachined mirror under mixed-frequency signal composed two harmonic ac sources. The micromirror is made polyimide as the main structural layer. dynamics are explored via frequency sweeps in desired neighborhoods. One fixed while other swept through wide range to study dynamic responses. To simulate behavior micromirror, it modeled single degree freedom system, where parameters model extracted experimentally. A good agreement...

There has been remarkable interest in nanomechanical computing elements that can potentially lead to a new era computation due their re-configurability, high integration density, and switching speed. Here we present device capable of dynamically performing logic operations (NOR, NOT, XNOR, XOR, AND). The concept is based on the active tuning resonance frequency doubly-clamped nanoelectromechanical beam resonator through electro-thermal actuation. performance this re-configurable examined at...

We demonstrate the exploitation of nonlinear behavior two electrically coupled microbeam resonators to realize a band-pass filter. More specifically, we combine their hardening and softening responses near flat pass band filter with sharp roll-off characteristics. The device is composed identical doubly clamped electrostatically actuated microbeams made silicon. One buckled via thermal loading produce frequency response. It then further tuned create desired overlap second resonator response...

This paper reports a versatile multi-user micro-fabrication process for MEMS devices, the "Polyimide Multi-User Process" (PiMMPs). The reported uses polyimide as structural material and three separate metallization layers that can be interconnected depending on desired application. enables first time development of out-of-plane compliant mechanisms designed using six different physical principles actuation sensing wafer from single fabrication run. These are electrostatic motion, thermal...

Amplifying the signal-to-noise ratio of resonant sensors is vital toward effort to miniaturize devices into sub-micro and nano regimes. In this paper, we demonstrate theoretically experimentally, amplification through mechanically coupled microbeams. The device composed two identical clamped-clamped beams, made polyimide, connected at their middle a third beam, which acts as mechanical coupler. Each microbeams coupler are designed be actuated separately, hence providing various possibilities...

We experimentally demonstrate an efficient approach to excite primary and parametric (up the 4th) resonance of Microelectromechanical system MEMS arch resonators with large vibrational amplitudes. A single crystal silicon in-plane microbeam is fabricated such that it can be excited axially from one its ends by a parallel-plate electrode. Its micro/nano scale vibrations are transduced using high speed camera. Through electrode, time varying electrostatic force applied, which converted into...

In this brief, the design principles and experimental demonstration of a compact full adder along with reprogrammable 4-input logic gate are presented. The proposed solution for implementation digital circuits is based on clamped-clamped micro-beam resonator multiple split electrodes, in which inputs tune resonance frequency beam. This technique enables re-programmability during operation, reduces complexity significantly; as an example, 64-bit adder, only 128 micro-resonators required,...

Abstract We demonstrate a simple and flexible technique to efficiently activate micro/nano-electromechanical systems (MEMS/NEMS) resonators at their fundamental higher order vibration modes. The method is based on the utilization of amplified voltage across an inductor, L , LC tank resonant circuit actuate MEMS/NEMS resonator. By matching electrical mechanical resonances, significant amplitude amplification reported terminals. show experimentally up twelve times, which demonstrated excite...

We present multi-function microelectromechanical systems (MEMS) logic device that can perform the fundamental gate AND, OR, universal gates NAND, NOR, and a tristate using mixed-frequency excitation. The concept is based on exciting combination resonances due to mixing of two or more input signals. vibrates at steady states: high state when resonance activated low no activated. These vibration states are assigned logical value 1 0 realize gates. Using ac signals drive resonator execute...

This paper presents a review of existing solar cooling technologies and feasibility study absorption system for packaging facility at Tetrapak Lahore, Pakistan. The includes brief description chiller collectors. case analysis the potential design considered site. calculations upon which is carried out are collector area type, capacity, area. A comparison made between Pakistan sites all across globe. Finally an economic to demonstrate financial viability new system.

The current transistor-based computing circuits use multiple interconnected transistors to realize a single Boolean logic gate. This leads higher power requirements and delayed computing. Transistors are not suitable for applications in harsh environments require complicated thermal management systems due excessive heat dissipation. Also, transistor lack the ability dynamically reconfigure their functionality real time, which is desirable enhanced capability. Further, miniaturization of...