A5008427794- Advanced MEMS and NEMS Technologies
- Microfluidic and Capillary Electrophoresis Applications
- Innovative Microfluidic and Catalytic Techniques Innovation
- Electrowetting and Microfluidic Technologies
- Advanced Sensor and Energy Harvesting Materials
- Mechanical and Optical Resonators
- Innovative Energy Harvesting Technologies
- Neuroscience and Neural Engineering
- Force Microscopy Techniques and Applications
- Microfluidic and Bio-sensing Technologies
- Bacteriophages and microbial interactions
- Advanced Materials and Mechanics
- Structural Analysis and Optimization
- 3D IC and TSV technologies
- Semiconductor Lasers and Optical Devices
- 3D Printing in Biomedical Research
- Biosensors and Analytical Detection
- Cancer Genomics and Diagnostics
- Chronic Lymphocytic Leukemia Research
- Acoustic Wave Resonator Technologies
- Analytical Chemistry and Sensors
- Advanced biosensing and bioanalysis techniques
- Advanced Biosensing Techniques and Applications
- Tactile and Sensory Interactions
- Advanced Surface Polishing Techniques
Queen's University Belfast
2023
King Abdullah University of Science and Technology
2011-2018
This paper looks at the design, fabrication and characterization of stackable microfluidic emulsion generators, with coefficients variation as low ~6% production rates high ~1 L h(-1). work reports highest throughput reported in literature for a device simultaneous operation liquid-liquid droplet generators. The was achieved by stacking several layers 128 flow-focusing organized circular array. These are interconnected via through-holes fed designated fractal distribution networks. proposed...
This paper reports a versatile multi-user micro-fabrication process for MEMS devices, the "Polyimide Multi-User Process" (PiMMPs). The reported uses polyimide as structural material and three separate metallization layers that can be interconnected depending on desired application. enables first time development of out-of-plane compliant mechanisms designed using six different physical principles actuation sensing wafer from single fabrication run. These are electrostatic motion, thermal...
This paper reports on solid UV cross-linked Poly(ethylene)-glycol-diacrylate (PEGDA) as a material for microfluidic devices biological applications. We have evaluated biocompatibility of PEGDA through two separate means: 1) by examining cell viability and attachment surfaces culture applications, 2) determining if inhibits the polymerase chain reaction (PCR) processes on-chip PCR. Through these studies correlation has been found between degree curing viability, attachment, well PCR outcome.
In this paper, we present a two-phase microfluidic system capable of incubating and quantifying microbead-based agglutination assays. The is based on simple fabrication solution, which requires only laboratory tubing filled with carrier oil, driven by negative pressure using syringe pump. We provide user-friendly interface, in pipette used to insert single droplets 1.25-µL volume into that continuously running therefore works entirely demand without the need for stopping, resetting or...
Measuring the dielectric properties of emulsions using capacitive or RF resonator sensors can provide a quality control method for industrial-scale droplet production.
Next generation sequencing (NGS)-based clonality analysis allows in-depth assessment of the clonal composition a sample with high sensitivity for detecting small clones. Within EuroClonality-NGS working group, protocol NGS IG has been previously developed and validated. This NGS-based approach was designed to generate amplicons, making it suitable samples suboptimal DNA quality, especially material derived from formalin-fixed paraffin-embedded tissue. Using expert results as reference,...
This paper presents the design, simulation, fabrication and testing of novel, untethered SU-8 polymer microrobots based on scratch drive actuators (SDAs). The design consists two 100×120×10μm linked SDAs, individually operated close to their resonant frequencies. frequency deflection behavior an individual SDA can be controlled by its shape, thickness, stiffening features. As a result, paired SDAs actuated or simultaneously multifrequency driving signal, allowing for two-dimensional...
In this paper we report the fabrication and characterization of a single piezoelectric actuator for digital sound reconstruction. This work is first step towards implementation true micro-loudspeaker by means an array acoustic actuators. These actuators consist flexible membrane fabricated using polyimide, which actuated Lead-Zirconate-Titanate (PZT) ceramic layer working in d31 actuation mode. The dimensions are 1mm diameter 4μm thickness, capable being symmetrically both upward downward...
This paper presents the simulation of Scratch Drive Actuators (SDAs) for micro-robotic applications. SDAs use electrostatic forces to generate motion on top an interdigitated electrode array. The purpose this investigation is evaluate several design geometries and micro-actuator configurations using ConventorWare®'s finite element analysis module. study performed investigates modal behavior effects linking two or more together in a micro- robot device. In addition, array performance, used...
The integration of thermal bimorph actuators and buckled cantilever structures to form an out‐of‐plane plate with adjustable angular positions is reported. This structure could be used as a platform build other transducers such optical micromirrors, scanning antennas, switches or low‐frequency oscillators. electromechanical characterisation has shown that these can adjust their position by 6° when they are operated using DC source. performed infrared camera showed the heat‐affected zone...
This paper reports on the Buckled Cantilever Platform (BCP) that allows manipulation of out plane structures through adjustment pitch angle using thermal bimorph micro-actuators. Due to micro-fabrication process used, actuators can be designed move in both: Counter Clockwise (CCW) and (CW) directions with a resolution up 110 µm/V, smallest step range nanometers. Thermal electrical characterization showed low influence platforms temperature power consumption (< 35µW) mainly due natural...
This paper reports on a radio frequency micro-strip T-resonator that is integrated to parallel droplet microfluidic system. The works as feedback system monitor uniform production and detect, in real-time, any malfunctions due channel fouling or clogging. Emulsions at different W/O flow-rate ratios are generated device containing 8 parallelized generators. These emulsions then guided towards the RF sensor, which read using Network Analyzer obtain response of proposed shows shifts 45MHz for...
In this paper we present the fabrication and characterization of a piezoelectric micro-speaker. The speaker is an array micro-machined membranes, fabricated on silicon wafer using advanced micro-machining techniques. Each contains 2 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">n</sup> transducer where "n" bit number. Every element has circular shape structure. membrane made out four layers: 300nm platinum for bottom electrode, 250nm or lead...
This paper reports on the design and fabrication of MEMS actuator arrays suitable for Digital Sound reconstruction Parametric Directional Loudspeakers. Two distinct versions device were fabricated: one using electrostatic principle actuation other one, piezoelectric principle. Both used similar membrane dimensions, with a diameter 500 μm. These devices are smallest Micro-Machined Ultrasound Transducer (MUT) that can be operated both modes: Reconstruction Loudspeaker. The chips consist an...
In this paper we present the fabrication and characterization of an array electrostatic acoustic transducers. The is micromachined on a silicon wafer using standard micro-machining techniques. Each contains 2 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">n</sup> transducer membranes, where "n" bit number. Every element has hexagonal membrane shape structure, which separated from substrate by 3μm air gap. made out 5μm thick polyimide layer that...
This paper presents a capacitive sensor for monitoring parallel microfluidic droplet generation. The great electric permittivity difference between common fluids such as air, oil and water (ε <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">oil</sub> ≈ 2-3 ε xmlns:xlink="http://www.w3.org/1999/xlink">water</sub> 80.4), allows accurate detection of in concentration changes. Capacitance variations large 10 pF channel filled with or dodecane, are...
This work reports on a quantitative study of the incubation microbead-based agglutination assay inside microfluidic system. In this system, droplet (1.25μL) consisting mixture functionalized microbeads and analyte is flowed through 0.51mm internal diameter silicone tube. Hydrodynamic forces alone produce very efficient mixing beads within droplet. We tested at different speeds show robust response higher range (150 - 200μL/min), while also reaching completion in process. At these velocities,...