A5013946877- Nanofabrication and Lithography Techniques
- Advancements in Photolithography Techniques
- Advanced Surface Polishing Techniques
- Nonlinear Optical Materials Studies
- Laser Material Processing Techniques
- Photonic and Optical Devices
- Force Microscopy Techniques and Applications
- Additive Manufacturing and 3D Printing Technologies
- Gold and Silver Nanoparticles Synthesis and Applications
- Nanowire Synthesis and Applications
- Integrated Circuits and Semiconductor Failure Analysis
- Optical Coatings and Gratings
- Icing and De-icing Technologies
- Economic Issues in Ukraine
- Russia and Soviet political economy
- Advanced Materials and Mechanics
- Gas Dynamics and Kinetic Theory
- Microfluidic and Capillary Electrophoresis Applications
- Adhesion, Friction, and Surface Interactions
- Plasmonic and Surface Plasmon Research
- German Economic Analysis & Policies
- Laser-Ablation Synthesis of Nanoparticles
- Advanced optical system design
- Advanced MEMS and NEMS Technologies
- Fluid Dynamics and Thin Films
TU Dresden
2014-2025
Paul Scherrer Institute
2014-2020
Institute of Semiconductors
2012-2020
University of Veterinary Medicine Hannover, Foundation
2018
Qualis Health
2017
Jacobs (United States)
2014
Fraunhofer Institute for Photonic Microsystems
2010-2012
Fraunhofer Society
2011
Remtech (United States)
1994
University of Konstanz
1994
Abstract Micro- and nanostructures with three-dimensional (3D) shapes are needed for a variety of applications in optics fluidics where structures both smooth sharp features enhance the performance functionality. We present novel method generation true 3D surfaces based on thermally activated selective topography equilibration (TASTE). This technique allows generating almost arbitrary sloped, convex concave profiles same polymer film dimensions micro- nanometer scale. describe its principal...
Recent advancements in two-photon polymerization (2PP) allowed for the precise and versatile fabrication of three-dimensional nano- microscale structures, making it ideal use microelectronics, optoelectronics, photonics, biomedical engineering. This research demonstrates effective multimaterial microstructures by an situ material exchange technique using a commercial printhead system. Therefore, effect pre-existing on laminar flow was investigated, revealing areas zero-flow residual...
A two-step replication process chain is developed for a microlens array structure with deep three dimensional (3D) reliefs and sharp features enabling the transfer of photocured acrylic resist patterns into thermoplastic poly-methyl methacrylate (PMMA) same structural polarity via an intermediate stamp. By using ultraviolet (UV)-curable polydimethyl siloxane (PDMS), high fidelity negatives were cast from original microstructures made by two-photon-polymerization subsequently replicated PMMA...
Polymeric refractive micro‐optical devices simultaneously demand striking smooth 3D topographies and precise shape accuracy for high performance low stray light. Here, a surface selective smoothening of thermoplastic, polymeric material has been established while maintaining the curvature corners required 50 µm tall, refractive, optical diffuser device. The master structures are fabricated using direct write laser‐lithography with two‐photon absorption. Master replicated into poly(methyl...
In the past two decades, direct laser writing (DLW) technologies have seen tremendous growth. However, strategies that enhance printing resolution and development of material with assorted functionalities are still sparser than expected. Herein, a cost-effective method to tackle this bottleneck is presented. Semiconductor quantum dots (QDs) selected carry out task, most importantly via surface chemistry modification enable their copolymerization themonomers, resulting in transparent...
An intensive, energy-based analysis of the thermal reflow thermoplastic polymer structures is presented. Poly (methyl methacrylate) (PMMA) was patterned by grayscale electron beam lithography. The obtained rectangular, micron-scale were transformed into lens-like near glass transition temperature original PMMA. Representative parameters from these experiments used to model process using a new, energy-based, finite element, soapfilm method free software Surface Evolver. time-, temperature-...
Plasmonic sensing in the infrared region employs direct interaction of vibrational fingerprints molecules with plasmonic resonances, creating surface-enhanced platforms that are superior to traditional spectroscopy. However, standard noble metals used for resonances suffer from high radiative losses as well fabrication challenges, such tuning spectral resonance positions into mid- far-infrared regions, and compatibility issue existing complementary metal-oxide-semiconductor (CMOS)...
This work demonstrates implementation of the main effects viscoelastic thermal polymer reflow in an efficient energy and mobility based simulation. The concept is on a finite-element, soap-film method using free software surface evolver. Properties homogeneous 3D volume are thereby represented by corresponding 2D surface. simulation only requires contact angle between substrate for infinite long times, obtained from fingerprint experiments, value as input. measure polymer-chain directly...
Excess phosphorus (P) as seen in cat foods can have a negative effect on health (Dobenecker, Webel, Reese, & Kienzle, ; Pastoor, Klooster, Mathot, Beynen, ). P surpluses may affect the environment, and economics food producing animals, whereas marginal supply impair performance health. only be absorbed if it is soluble. Solubility of feed water weak acid solution-as precondition for absorption-was investigated dogs, cats, pigs poultry. Different containing mineral compounds (Ca(H2 PO4 )2 ,...
Pattern transfer by deep anisotropic etch is a well-established technique for fabrication of nanoscale devices and structures. For this to be effective, the resist material plays key role must have high resolution, reasonable sensitivity, selectivity against conventional silicon substrate or underlayer film. In work, lithographic performance two resistance materials was evaluated: ZEP520A (Nippon Zeon Co.) mr-PosEBR (micro technology GmbH). Both are positive tone, polymer-based,...
Abstract We report on the fabrication of very high-resolution discrete four-resist-level grayscale patterns in poly(methyl methacrylate) with just 6-nm step height and down to 32-nm width using dose-modulated, electron beam lithography a low-contrast resist-developer system. This direct pattern writing is important for replication high-volume manufacturing diffractive optics. An innovative concept unexposed auxiliary spacers helped enhance character multi-level patterns. For widths between...
The direct patterning of hybrid-polymer microring resonators with minimal residual layers by UV-assisted nanoimprint lithography is reported. proposed stamp-and-repeat technology requires no post-processing. imprint polymer was applied spin-coating as a 130-150 nm thin initial film for an optimized processing. importance the thickness discussed in detail. Aspect ratios more than 5:1 were realized 2 μm high ridge-waveguides and sub-400 coupling gaps on maximal 130 layers. achieved ratio...